公开(公告)号：US20130004340A1

公开(公告)日：2013-01-03

申请号：US13615926

申请日：2012-09-14

Applicant: George Gonnella ,  James Cedrone

Inventor： George Gonnella ,  James Cedrone

IPC: F04B49/00

CPC classification number: F04B13/00 ,  F04B1/08 ,  F04B23/04 ,  F04B23/06 ,  F04B41/06 ,  F04B43/088 ,  F04B49/06 ,  F04B49/065 ,  F04B49/08 ,  F04B49/103 ,  F04B51/00 ,  F04B2203/0209 ,  F04B2205/01 ,  F04B2205/03 ,  F04B2205/04

Abstract: Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Abstract translation: 公开了用于监视泵的操作的系统和方法，包括验证泵的操作或动作。 可以建立泵的一个或多个参数的基线曲线。 然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。 然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。 如果操作配置文件与基线配置文件的差异超过一定容差，则可能会发送报警或采取其他操作，例如泵送系统可能会关闭等。

公开(公告)号：US08172546B2

公开(公告)日：2012-05-08

申请号：US11602472

申请日：2006-11-20

Applicant: James Cedrone ,  George Gonnella ,  Raymond A. Zagars ,  Robert F. McLoughlin

Inventor： James Cedrone ,  George Gonnella ,  Raymond A. Zagars ,  Robert F. McLoughlin

IPC: F15B13/16

CPC classification number: F04B13/00 ,  F04B7/0076 ,  F04B43/02 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2201/0601 ,  F04B2205/03 ,  Y10T137/87885

Abstract: Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.

Abstract translation: 公开了用于补偿可能在泵送装置的各种封闭空间中发生的压力增加的系统和方法。 本发明的实施例可以通过移动泵送装置的泵送装置来调节泵室的容积来补偿泵送装置的腔室中的压力增加，以补偿腔室中的压力增加。 更具体地，在一个实施例中，为了解决分配室中的流体的不希望的压力增加，分配马达可以反向以返回活塞以补偿分配室中的任何压力增加。

公开(公告)号：US20120070313A1

公开(公告)日：2012-03-22

申请号：US13301516

申请日：2011-11-21

Applicant: George Gonnella ,  James Cedrone ,  Iraj Gashgaee

Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

IPC: F04B49/06

CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

公开(公告)号：US20070128050A1

公开(公告)日：2007-06-07

申请号：US11602464

申请日：2006-11-20

Applicant: James Cedrone ,  George Gonnella ,  Iraj Gashgaee

Inventor： James Cedrone ,  George Gonnella ,  Iraj Gashgaee

IPC: F04B3/00

CPC classification number: F04B43/04 ,  F04B7/0076 ,  F04B9/02 ,  F04B13/00 ,  F04B23/06 ,  F04B49/065 ,  F04B53/06 ,  F04B53/16 ,  F04B53/22 ,  F04B2201/0201 ,  F04B2201/0601 ,  F04B2205/03 ,  Y10T29/49236 ,  Y10T137/87885

Abstract: Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having a motor driven feed stage pump and a motor driven dispense stage pump. The feed stage motor and the feed stage motor can include various types of motors and the pumps can be rolling diaphragm or other pumps. According to one embodiment, a dispense block defining the pump chambers and various flow passages can be formed out of a single piece of material.

Abstract translation: 本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。 此外，本发明的实施例提供了用于温和流体处理特性的特征。 本发明的实施例可以包括具有马达驱动的进料级泵和马达驱动的分配级泵的泵。 进料级马达和进料级马达可以包括各种类型的马达，泵可以是滚动隔膜或其他泵。 根据一个实施例，可以由单件材料形成限定泵室和各种流动通道的分配块。

公开(公告)号：US20070128048A1

公开(公告)日：2007-06-07

申请号：US11602485

申请日：2006-11-20

Applicant: George Gonnella ,  James Cedrone ,  Iraj Gashgaee

Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

IPC: F04B49/06

CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

公开(公告)号：US20070128047A1

公开(公告)日：2007-06-07

申请号：US11364286

申请日：2006-02-28

Applicant: George Gonnella ,  James Cedrone

Inventor： George Gonnella ,  James Cedrone

IPC: F04B41/06

CPC classification number: F04B13/00 ,  F04B1/08 ,  F04B23/04 ,  F04B23/06 ,  F04B41/06 ,  F04B43/088 ,  F04B49/06 ,  F04B49/065 ,  F04B49/08 ,  F04B49/103 ,  F04B51/00 ,  F04B2203/0209 ,  F04B2205/01 ,  F04B2205/03 ,  F04B2205/04

Abstract: Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Abstract translation: 公开了用于监视泵的操作的系统和方法，包括验证泵的操作或动作。 可以建立泵的一个或多个参数的基线曲线。 然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。 然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。 如果操作配置文件与基线配置文件的差异超过一定容差，则可能会发送报警或采取其他操作，例如泵送系统可能会关闭等。

公开(公告)号：US20140303791A1

公开(公告)日：2014-10-09

申请号：US14239737

申请日：2012-08-17

Applicant: Traci L. Batchelder ,  James Cedrone

Inventor： Traci L. Batchelder ,  James Cedrone

IPC: G05D9/12 ,  G05D7/06

CPC classification number: G05D9/12 ,  F04B13/00 ,  F04B49/065 ,  F04B53/06 ,  F04B2205/03 ,  G05D7/0617

Abstract: Embodiments can detect air in a pumping system. A portion of the system may be isolated from other components located upstream or downstream. The isolated portion may include a chamber, tubing, lines, valves or other components of a pump. In one embodiment, the difference between the starting pressure and an ending pressure taken after a piston has moved a predetermined distance. The pressure difference can be compared with an expected value established for the particular system set up and/or fluid property to detect the presence of air in the system. In some embodiments, a distance between the starting and ending positions of a pump component may be determined after a predetermined pressure difference has been achieved. The distance can be compared with an expected distance to detect the presence of air in the system.

Abstract translation: 实施例可以检测泵送系统中的空气。 系统的一部分可以与位于上游或下游的其它部件隔离。 隔离部分可以包括泵的腔室，管道，管线，阀或其它部件。 在一个实施例中，起动压力和在活塞已经移动预定距离之后所采取的结束压力之间的差异。 压力差可以与为特定系统建立的预期值和/或流体性质进行比较，以检测系统中空气的存在。 在一些实施例中，泵部件的起始位置和结束位置之间的距离可以在实现预定的压力差之后确定。 该距离可以与预期距离进行比较，以检测系统中空气的存在。

公开(公告)号：US08814536B2

公开(公告)日：2014-08-26

申请号：US13554746

申请日：2012-07-20

Applicant: Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

IPC: F04B13/00 ,  F04B49/06

CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

Abstract translation: 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。

公开(公告)号：US08678775B2

公开(公告)日：2014-03-25

申请号：US13301516

申请日：2011-11-21

Applicant: George Gonnella ,  James Cedrone ,  Iraj Gashgaee

Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

IPC: F04B35/04

CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率来减少发热，而不会不期望地损害分配泵的精确位置控制。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

公开(公告)号：US20130101438A1

公开(公告)日：2013-04-25

申请号：US13805601

申请日：2011-06-27

Applicant: James Cedrone ,  Iraj Gashgaee ,  Paul J. Magoon ,  Jennifer M. Braggin ,  George L. Gonnella ,  Johnathan Owen Vail

Inventor： James Cedrone ,  Iraj Gashgaee ,  Paul J. Magoon ,  Jennifer M. Braggin ,  George L. Gonnella ,  Johnathan Owen Vail

IPC: F04B49/06 ,  F04B49/00

CPC classification number: B65D83/00 ,  F04B43/06 ,  F04B49/007 ,  F04B49/02 ,  H01L21/67017

Abstract: Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The switching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.

Abstract translation: 所公开的实施例提供了实现模块化架构的可定制的分配系统，该可定制的分配系统包括智能控制器，该智能控制器被配置为在对印刷图案的缺陷敏感的各种半导体制造过程中操作各种气动泵和电动泵。 智能控制器被配置为在从与第一泵通信到第二泵的交换中自动识别第二泵并应用控制方案来控制第二泵，其可以是电动泵或气动泵。 切换可能是由于第一泵的物理断开和第二泵的物理连接，或者可以通过软件完全完成。 智能控制器可以连接到跟踪和各种设备，包括智能过滤器。