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公开(公告)号：US20210132370A1
公开(公告)日：2021-05-06
申请号：US17068643
申请日：2020-10-12
Applicant: KOREA OPTRON CORP.
Inventor： Yun Goo Kim , Hwan Sun Kim , Eun Joong Lee , Yong Kook Kim
Abstract: A vertically-shifting electrostatic actuator and an optical scanner employing the electrostatic actuator are disclosed. The optical scanner includes a mirror configured to reflect an incident light and an electrostatic actuator configured to oscillate the mirror. The electrostatic actuator includes a frame having an installation space in a central portion and a drive electrode, a stationary electrode, a shifter, and a force application part installed in the installation space. Drive electrode fingers in the drive electrode and stationary electrode fingers in the stationary electrode are alternately disposed. The shifter may be connected either between the frame and the drive electrode or between the frame and the stationary electrode and vertically shifts either the drive electrode or the stationary electrode connected to the shifter when a vertical force is applied through the force application part.
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公开(公告)号：US20160131893A1
公开(公告)日：2016-05-12
申请号：US14403308
申请日：2013-10-11
Applicant: KOREA OPTRON CORP.
Inventor： Kyungsu KIM , Junil KIM , Jonghyun LEE , Seunghwan MOON
CPC classification number: G02B26/0841 , B81B3/0048 , B81B2201/033 , G02B26/105 , G03B21/008 , H02N1/008 , H04N3/08
Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.
Abstract translation: 微机电系统（MEMS）扫描器技术领域本发明涉及一种微机电系统（MEMS）扫描器，更具体地说，涉及一种MEMS扫描器，用于在使用MEMS工艺增加固定电极和驱动电极之间的驱动角的同时实现稳定的驱动。 MEM扫描器包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。
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公开(公告)号：US11789254B2
公开(公告)日：2023-10-17
申请号：US17068643
申请日：2020-10-12
Applicant: KOREA OPTRON CORP.
Inventor： Yun Goo Kim , Hwan Sun Kim , Eun Joong Lee , Yong Kook Kim
CPC classification number: G02B26/0841 , B81B3/0062 , G02B26/105 , B81B2201/042
Abstract: An optical scanner includes a mirror configured to reflect an incident light and a vertically-shifting electrostatic actuator configured to oscillate the mirror. The electrostatic actuator includes a frame having an installation space in a central portion and a drive electrode, a stationary electrode, a shifter, and a force application part installed in the installation space. Drive electrode fingers in the drive electrode and stationary electrode fingers in the stationary electrode are alternately disposed. The shifter may be connected either between the frame and the drive electrode or between the frame and the stationary electrode and vertically shifts either the drive electrode or the stationary electrode connected to the shifter when a vertical force is applied through the force application part.
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公开(公告)号：US09383577B2
公开(公告)日：2016-07-05
申请号：US14403308
申请日：2013-10-11
Applicant: KOREA OPTRON CORP.
Inventor： Kyungsu Kim , Junil Kim , Jonghyun Lee , Seunghwan Moon
CPC classification number: G02B26/0841 , B81B3/0048 , B81B2201/033 , G02B26/105 , G03B21/008 , H02N1/008 , H04N3/08
Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.
Abstract translation: 微机电系统（MEMS）扫描器技术领域本发明涉及一种微机电系统（MEMS）扫描器，更具体地说，涉及一种MEMS扫描器，用于在使用MEMS工艺增加固定电极和驱动电极之间的驱动角的同时实现稳定的驱动。 MEM扫描器包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。
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