Visual prominence meter
    1.
    发明授权
    Visual prominence meter 失效
    视觉突出表

    公开(公告)号:US5953117A

    公开(公告)日:1999-09-14

    申请号:US68159

    申请日:1998-06-04

    CPC classification number: A61B3/024 A61B3/06

    Abstract: Method for a visual measurement, in which an image sector of an image with a target object is presented to an eye of an operative by a display unit, and in which the fovea of the eye is placed into such a reference position relative to the display unit, or the image sector is shifted in such a way towards the periphery relative to the fovea of the eye in a reference position, that the target object lies outside the fovea and the operative decides whether the target object is still visible, and the extent to which the target object is situated outside the reference position is determined.

    Abstract translation: PCT No.PCT / NL96 / 00431 Sec。 371日期:1998年6月4日 102(e)1998年6月4日PCT 1996年11月1日PCT PCT。 出版物WO97 / 16112 PCT 日期1997年5月9日的方法,其中通过显示单元将具有目标对象的图像的图像扇区呈现给操作的眼睛,并且其中眼窝的中央凹被放置在参考位置 相对于显示单元,或者图像扇区在参考位置中以相对于眼睛的中心凹的周边方向移位,目标对象位于中心凹的外侧,并且操作者判定目标对象是否仍然可见 并且确定目标对象位于参考位置之外的程度。

    System and Method for Picking and Placement of Chip Dies
    2.
    发明申请
    System and Method for Picking and Placement of Chip Dies 有权
    芯片采集和放置的系统和方法

    公开(公告)号:US20130004269A1

    公开(公告)日:2013-01-03

    申请号:US13520674

    申请日:2011-01-06

    Abstract: According to an aspect of the invention, there is provided a chip die 2 manipulator apparatus arranged for picking and placing of a chip die 2 in a chip manufacturing process, wherein an imaging system 11 comprising an arc form convex spherical mirror 13 arranged at a second off-axis position B and centered relative to the centre position 5; a folding mirror 4 arranged in a light path between the convex spherical mirror 13 and the centre position 5 for folding the light path to a third off-axis position C; and an arc form concave spherical mirror 15 arranged at the third off-axis position C having a curvature to image from at least one of the centre position 5 and the component 2 on the image detection system 9. The imaging system 11 corrects for the angled image detection of the centre position 5.

    Abstract translation: 根据本发明的一个方面,提供了一种在芯片制造过程中设置用于拾取和放置芯片芯片2的芯片芯片2的机械手装置,其中,成像系统11包括设置在第二个处的弧形凸球面镜13 离轴位置B并相对于中心位置5居中; 折叠镜4,布置在凸球面镜13和中心位置5之间的光路中,用于将光路折叠到第三离轴位置C; 以及布置在第三离轴位置C处的弧形凹球面镜15,其具有从图像检测系统9上的中心位置5和部件2中的至少一个成像的曲率。成像系统11校正成角度 图像检测中心位置5。

    Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.
    3.
    发明授权
    Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same. 有权
    用于检测颗粒高度的检测器系统,以及包括其的光刻设备和设备制造方法。

    公开(公告)号:US07173270B1

    公开(公告)日:2007-02-06

    申请号:US11229832

    申请日:2005-09-20

    CPC classification number: G01N21/956 G03F7/70791 G03F7/70983

    Abstract: A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable actuator to adjust a distance between the projection system and the substrate; and a particle detector system to detect a particle on a surface of the substrate. The particle detector system has illumination optics directing the radiation to a detection area of the surface of the substrate, detection optics receiving radiation from the detection area of the surface of the substrate, and a detector coupled to the detection optics to produce a measurement signal. The apparatus further has a processing system to determine the height of a particle from the measurement signal, generate a height excess signal if the height exceeds a threshold value, and control the actuator in response to the height excess signal.

    Abstract translation: 光刻设备将图案从图案形成装置传送到基板上并且包括将图案化的辐射束投影到基板上的投影系统; 可调节致动器,用于调节投影系统和基板之间的距离; 以及用于检测基板表面上的颗粒的颗粒检测器系统。 粒子检测器系统具有将辐射引导到基底表面的检测区域的照明光学器件,接收来自基底表面的检测区域的辐射的检测光学器件和耦合到检测光学器件以产生测量信号的检测器。 该装置还具有处理系统,用于根据测量信号确定颗粒的高度,如果高度超过阈值则产生高度过剩信号,并根据高度过剩信号来控制致动器。

    System and method for picking and placement of chip dies
    4.
    发明授权
    System and method for picking and placement of chip dies 有权
    芯片芯片拾取和放置的系统和方法

    公开(公告)号:US08925186B2

    公开(公告)日:2015-01-06

    申请号:US13520674

    申请日:2011-01-06

    Abstract: According to an aspect of the invention, there is provided a chip die 2 manipulator apparatus arranged for picking and placing of a chip die 2 in a chip manufacturing process, wherein an imaging system 11 comprising an arc form convex spherical mirror 13 arranged at a second off-axis position B and centered relative to the center position 5; a folding mirror 4 arranged in a light path between the convex spherical mirror 13 and the center position 5 for folding the light path to a third off-axis position C; and an arc form concave spherical mirror 15 arranged at the third off-axis position C having a curvature to image from at least one of the center position 5 and the component 2 on the image detection system 9. The imaging system 11 corrects for the angled image detection of the center position 5.

    Abstract translation: 根据本发明的一个方面,提供了一种在芯片制造过程中设置用于拾取和放置芯片芯片2的芯片芯片2的机械手装置,其中,成像系统11包括设置在第二个处的弧形凸球面镜13 离轴位置B并相对于中心位置5居中; 折叠镜4,布置在凸球面镜13和中心位置5之间的光路中,用于将光路折叠到第三离轴位置C; 以及布置在第三离轴位置C处的弧形凹球面镜15,其具有从图像检测系统9上的中心位置5和部件2中的至少一个成像的曲率。成像系统11校正成角度 图像检测中心位置5。

    OPTICAL PROBE COMPRISING TRANSPARENT MONOLITHIC BODY WITH REFRACTING AND REFLECTING SURFACE PARTS
    5.
    发明申请
    OPTICAL PROBE COMPRISING TRANSPARENT MONOLITHIC BODY WITH REFRACTING AND REFLECTING SURFACE PARTS 审中-公开
    包含透明单体的光学探测器,具有反射和反射表面部件

    公开(公告)号:US20130229651A1

    公开(公告)日:2013-09-05

    申请号:US13825020

    申请日:2011-09-20

    Abstract: The optical probe contains a monolithic body of optically transparent material to perform focusing for a plurality of parallel light paths from one or more fibers to one or more object points. Surface parts of the monolithic body are curved to form lenses and/or coated with a reflective coating. On a fiber side of the monolithic body an opening or openings are provided in a reflective coating opposite the tip or tips of the fibers to pass light. On the object side of the monolithic body, a coated surface part reflects the light path from the openings back to the fiber side of the monolithic body, from where the light path is reflected towards an aperture on the object side. At least part of the reflecting surfaces is curved to form reflector a plurality of distinct lenses on the same side of the monolithic body.

    Abstract translation: 光学探针包含光学透明材料的整体,以便执行从一个或多个光纤到一个或多个物体点的多条平行光路的聚焦。 单块体的表面部分是弯曲的以形成透镜和/或涂覆有反射涂层。 在单片体的纤维侧,在与纤维的尖端或尖端相对的反射涂层中提供开口或开口以通过光。 在整体式物体的物体侧,涂覆的表面部分将光路从开口反射回单片体的纤维侧,从该光路向物体侧的孔反射。 反射表面的至少一部分是弯曲的,以在整体式主体的同一侧上形成多个不同的透镜。

    Projector for the projection of a panoramic image and camera for the
manufacture of films for a projector of this kind
    6.
    发明授权
    Projector for the projection of a panoramic image and camera for the manufacture of films for a projector of this kind 失效
    用于投影全景图像和相机的投影机,用于制造这种投影机的胶片

    公开(公告)号:US4357081A

    公开(公告)日:1982-11-02

    申请号:US116451

    申请日:1980-01-29

    Inventor: Kees Moddemeijer

    CPC classification number: G03B37/04

    Abstract: A motion picture projector, camera, and film for a panoramic motion picture. The projector advances a film strip along a cylindrical path for the projection of a panoramic image. Substantially identical condenser lenses with light sources are mounted inside the cylindrical film path aligned with and connected to projection lenses outside the cylindrical path. The condensers and projection lenses are rotated together at a speed other than the speed of movement of the film. The ratio of the angular velocity of the film to the angular velocity of the projection lenses is n:(n-1), where n is the number of projection lenses. Each projection lens projects a section of the film that has a length of 360.degree./(n(n-1)). The film strip has n series of portions representing n sectors of the panoramic scene, the time sequential portions of one series having n-1 intervening portions of other series therebetween. A camera for producing the film is similar in layout to the projector. The camera moves film and objective lenses with shutters and diaphragms at an angular velocity ratio of n:(n-1).

    Abstract translation: 用于全景电影的电影投影机,相机和电影。 投影仪沿着圆柱形路径推进胶片条以投影全景图像。 具有光源的基本相同的聚光透镜安装在圆柱形光路内部,与圆柱形路径外的投影透镜对准并连接。 电容器和投影透镜以不同于胶片移动速度的速度一起旋转。 胶片的角速度与投影透镜的角速度的比率为n:(n-1),其中n为投影透镜的数量。 每个投影透镜投影长度为360度/(n(n-1))的薄膜的一部分。 影片条具有表示全景场景的n个扇区的n个系列的部分,其中一系列的时间序列部分具有n-1个中间部分。 用于制作胶片的相机在布局上类似于投影机。 相机以n:(n-1)的角速度比移动带有百叶窗和隔膜的胶片和物镜。

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