FINE PATTERN FORMING METHOD, IMPRINT MOLD MANUFACTURING METHOD, IMPRINT MOLD, AND OPTICAL DEVICE

    公开(公告)号:US20210373217A1

    公开(公告)日:2021-12-02

    申请号:US17285992

    申请日:2019-10-15

    Abstract: A forming method of forming a micropattern which has a direction and a position controlled for each predetermined position on an object subjected to pattern formation, and an imprinting mold producing method, an imprinting mold and an optical device to which such a forming method is applied. A first mask pattern forming process of forming, by imprinting, a first mask pattern for forming the micropattern on a surface of an object subjected to pattern formation, the surface including a region where at least the micropattern is not formed yet; a second mask pattern forming process of forming a resist film on the object subjected to pattern formation and on the first mask pattern, exposing and developing such a film by light emission to form a second mask pattern that causes a region where the micropattern is not formed but the first mask patten is formed to appear in an uncovered manner; and a micropattern forming process of performing etching on the object subjected to pattern formation to form the micropattern. The first mask pattern forming process, the second mask pattern forming process and the micropattern forming process are repeated in this sequence.

    Imprint device and imprint method

    公开(公告)号:US10343312B2

    公开(公告)日:2019-07-09

    申请号:US14407510

    申请日:2013-08-23

    Abstract: An imprint device and an imprint method which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target using flexible first and second dies and includes first and second casings which each apply pressure of first and second pressurizing rooms respectively, to the first and second dies respectively and the molding target, a pressurizer that adjusts the pressures of the pressurizing rooms, first and second moving units that move the first and second dies respectively and the molding target in a direction coming close to or distant from each other, a depressurizer that depressurizes a depressurizing room formed between the first and second casings, and eliminates fluids present between the dies and the molding target, and a pressure adjuster that adjusts pressures to reduce pressure differences between the depressurizing room and the pressurizing rooms.

    Molding Method And Molding Device
    4.
    发明申请
    Molding Method And Molding Device 有权
    成型方法和成型装置

    公开(公告)号:US20150091220A1

    公开(公告)日:2015-04-02

    申请号:US14371849

    申请日:2013-01-11

    Abstract: A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film including a patterned face with a micropattern, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film, and includes a fixing step for fixing an outer edge of the shaping-target area of the film by fixing means, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film by the pressurizing means in such a way that pressure at a side where the film is fixed in the fixing step becomes small to form a pre-curved face.

    Abstract translation: 提供了一种成形方法和成形装置,其可以容易且廉价地在包括微图案的薄膜中形成弯曲面。 一种成形方法是在包含具有微图案的图案面的膜的预定成形对象区域和与图案面相对的后表面上形成超过膜厚度的弯曲面,并且包括固定步骤 用于通过固定装置固定膜的成形对象区域的外边缘,通过加热装置95加热膜20的第一加热步骤和用于通过以下步骤产生膜的两个面之间的预定压力差的压力调节步骤: 加压装置使得在定影步骤中胶片固定的一侧的压力变小,形成预弯曲面。

    POLARIZER, DISPLAY UTILIZING THE SAME AND ULTRAVIOLET EMITTING APPARATUS

    公开(公告)号:US20210333628A1

    公开(公告)日:2021-10-28

    申请号:US16621084

    申请日:2019-06-24

    Abstract: A polarizer that suppresses a decrease in extinction ratio due to leakage light in a Cross Nicol condition, a display that utilizes the same, and an ultraviolet emitting apparatus are provided. A polarizer includes a substrate transparent to light within a utilized bandwidth, a wire grid portion including a plurality of wires which extends in a direction and which is arranged side by side at a pitch shorter than a wavelength of the light, and a polarizing axis correcting portion which is formed of a dielectric provided at a side at which the light enters the wire grid portion, and which performs correction so as to reduce a displacement in an angle between an incidence-side transmittance axis of linear polarized light and an emitting-side absorption axis thereof when the linear polarized light within the utilized bandwidth enters at an azimuth angle of 45 degrees relative to the wires.

    Roller-type pressurization device, imprinter, and roller-type pressurization method

    公开(公告)号:US10357903B2

    公开(公告)日:2019-07-23

    申请号:US14402402

    申请日:2013-12-06

    Abstract: A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.

    OPTICAL IMAGE FORMATION APPARATUS
    8.
    发明申请

    公开(公告)号:US20190179062A1

    公开(公告)日:2019-06-13

    申请号:US15566794

    申请日:2017-06-19

    Abstract: An optical image formation apparatus which has a high brightness of an actual image, easy for manufacturing, and reduces costs. This optical image formation apparatus mainly includes a polarizer causing P polarization light to pass through, and reflecting S polarization light, a phase difference element converting either one of or both of the P polarization light having passed through the polarizer or the S polarization light reflected by the polarizer into circular polarization light or elliptical polarization light, and a recursive light reflector recursively reflecting the light having passed through the phase difference element.

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