High-sensitivity flexible three-dimensional force tactile sensor and preparation method thereof

    公开(公告)号:US12044584B2

    公开(公告)日:2024-07-23

    申请号:US17771818

    申请日:2021-12-31

    CPC classification number: G01L1/144

    Abstract: A high sensitivity flexible three-dimensional force tactile sensor includes a hemispherical contact, wherein the hemispherical contact includes a tray with a groove on the surface and a hemispherical protrusion arranged in the groove. A flexible inverted cone component connected to the lower surface of the hemispherical contact, wherein a plurality of flexible triangular excitation electrode is arranged on the side surface of the flexible inverted cone component. A flexible common electrode surrounding part of the flexible triangular excitation electrode, wherein a first cavity with an opening is opened inside the flexible common electrode, parts of the flexible triangular excitation electrode and the flexible inverted cone component are arranged in the first cavity of the flexible common electrode. The flexible triangular excitation electrode and the flexible inverted cone component have no contact with the inner wall of the first cavity of the flexible common electrode to form an air cavity.

    Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure

    公开(公告)号:US12078556B2

    公开(公告)日:2024-09-03

    申请号:US17798087

    申请日:2021-12-31

    CPC classification number: G01L1/142

    Abstract: A capacitive flexible tactile sensor based on graded inclined micro-cylindrical structure, includes an upper electrode layer, a lower electrode layer and a dielectric layer between them. The dielectric layer is composed of an upper dielectric layer and a lower dielectric layer. The upper dielectric layer includes an upper dielectric layer base, upper dielectric layer long micro-cylinders and upper dielectric layer short micro-cylinders. The lower dielectric layer includes lower dielectric layer base, lower dielectric layer long micro-cylinder and lower dielectric layer short micro-cylinder. The upper dielectric layer long micro-cylinders and the lower dielectric layer long micro-cylinders are closely bonded, and there is a distance between the upper dielectric layer short micro-cylinder and the lower dielectric layer short micro-cylinder. The sensor structure of the present application is stable, overcomes the viscous effect.

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