公开(公告)号：US10295912B2

公开(公告)日：2019-05-21

申请号：US15327330

申请日：2015-07-30

Applicant: ASELTA NANOGRAPHICS

Inventor： Mohamed Saib ,  Patrick Schiavone ,  Thiago Figueiro

IPC: G03F7/20 ,  G03F1/36 ,  H01J37/317 ,  H01J37/302 ,  G03F1/26

Abstract: An IC manufacturing model is disclosed, wherein input variables and an output variable are measured using a calibration set of patterns. The model can or cannot include a PSF. The output variable may be a dimensional bias between printed patterns and target patterns or simulated patterns. It can also be a Threshold To Meet Experiments. The input variables may be defined by a metric which uses kernel functions, preferably with a deformation function which includes a shift angle and a convolution procedure. A functional or associative relationship between the input variables and the output variable is defined. Preferably this definition includes normalization steps and interpolation steps. Advantageously, the interpolation step is of the kriging type. The invention achieves a much more accurate modeling of IC manufacturing, simulation or inspection processes.

公开(公告)号：US10423074B2

公开(公告)日：2019-09-24

申请号：US15310709

申请日：2015-06-02

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES ,  ASELTA NANOGRAPHICS

Inventor： Mohamed Saïb ,  Aurélien Fay ,  Patrick Schiavone ,  Thiago Figueiro

IPC: G06F17/50 ,  G03F7/20 ,  G03F1/36 ,  G03F1/80 ,  H01J37/317

Abstract: A method for calculating the parameters of a resist model of an IC manufacturing process is provided. Accordingly, a function representative of the target design convoluted throughout the whole target design with a kernel function compounded with a deformation function with a shift angle. The deformation function is replaced by its Fourier series development, the order of which is selected so that the product of convolution is invariant through rotations within a tolerance of the corrections to be applied to the target design. Alternatively, the product of convolution may be decomposed into basic kernel functions selected varying by angles determined so that a deformation function for a value of the shift angle can be projected onto a couple of basic kernel functions the angles of which are proximate to the shift angle.

公开(公告)号：US10156796B2

公开(公告)日：2018-12-18

申请号：US15310731

申请日：2015-06-03

Applicant: ASELTA NANOGRAPHICS

Inventor： Mohamed Saïb ,  Patrick Schiavone ,  Thiago Figueiro

IPC: G06F17/50 ,  G03F7/20

Abstract: A method to easily determine parameters of a second process for manufacturing from parameters of a first process is provided. Metrics representative of differences between the first process and the second process are computed from a number of values of the parameters, which can be measured for the first process and the second process on a calibration layout, or which can be determined from pre-existing values for layouts or reference data for the first process and the second process by an interpolation/extrapolation procedure. A set of metrics are selected so that their combination gives a precise representation of the differences between the first process and the second process in all areas of a target design. Advantageously, the metrics are calculated as a product of convolution of the target design and a compound of a kernel function and a deformation function.

公开(公告)号：US10553394B2

公开(公告)日：2020-02-04

申请号：US14915288

申请日：2014-08-28

Applicant: ASELTA NANOGRAPHICS

Inventor： Nader Jedidi ,  Patrick Schiavone ,  Jean-Hervé Tortai ,  Thiago Figueiro

IPC: H01J37/304 ,  H01J37/285 ,  H01J37/317

Abstract: A method for projecting an electron beam onto a target includes correction of the scattering effects of the electrons in the target. This correction is made possible by a calculation step of a point spread function having a radial variation according to a piecewise polynomial function.

公开(公告)号：US09934336B2

公开(公告)日：2018-04-03

申请号：US13861284

申请日：2013-04-11

Applicant: ASELTA NANOGRAPHICS

Inventor： Jean-Herve Tortai ,  Patrick Schiavone ,  Thiago Figueiro ,  Nader Jedidi

IPC: G06F17/10 ,  G06F17/50 ,  H01J37/22 ,  H01J37/317 ,  G03F7/20 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: G06F17/5009 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2059 ,  H01J37/222 ,  H01J37/3174 ,  H01J2237/226 ,  H01J2237/31769

Abstract: A method for projecting an electron beam used notably in lithography by direct or indirect writing as well as in electron microscopy, is provided. Notably for critical dimensions or resolutions of less than 50 nm, the proximity effects created by the forward and backward scattering of the electrons of the beam in interaction with the target must be corrected. This is traditionally done using the convolution of a point spread function with the geometry of the target. In the prior art, said point spread function uses Gaussian distribution laws. At least one of the components of the point spread function is a linear combination of Voigt functions and/or of functions approximating Voigt functions, such as the Pearson VII functions. In certain embodiments, some of the functions are centered on the backward scattering peaks of the radiation.

公开(公告)号：US10578978B2

公开(公告)日：2020-03-03

申请号：US15763829

申请日：2016-10-05

Applicant: ASELTA NANOGRAPHICS

Inventor： Mohamed Saib ,  Patrick Schiavone ,  Thiago Figueiro ,  Sébastien Bayle

IPC: G06F17/50 ,  G03F7/20

Abstract: A method is provided to easily determine the parameters of a second process for manufacturing from the parameters of a first process. Metrics representative of the differences between the two processes are computed from a number of values of the parameters, which can be measured for the two processes on a calibration layout, or which can be determined from pre-existing values for layouts or reference data for the two processes by an interpolation/extrapolation procedure. The number of metrics is selected so that their combination gives a precise representation of the differences between the two processes in all areas of a design. Advantageously, the metrics are calculated as a product of convolution of the target design and a compound of a kernel function and a deformation function. A reference physical model of the reference process is determined. A sizing correction to be applied to the edges of the design produced by the reference process is calculated. It is then converted, totally or partially, into a dose correction.

公开(公告)号：US10522328B2

公开(公告)日：2019-12-31

申请号：US15742003

申请日：2016-07-19

Applicant: ASELTA NANOGRAPHICS

Inventor： Mohamed Saib ,  Patrick Schiavone ,  Thiago Figueiro

IPC: H01J37/317 ,  H01J37/302

Abstract: A method for transferring a pattern onto a substrate by direct writing by means of a particle or photon beam comprises: a step of producing a dose map, associating a dose to elementary shapes of the pattern; and a step of exposing the substrate according to the pattern with a spatially-dependent emitted dose depending on the dose map; wherein the step of producing a dose map includes: computing at least first and second metrics of the pattern for each of the elementary shapes, the first metric representative of features of the pattern within a first range from the elementary shape and the second metric representative of features of the pattern within a second range, larger than the first range, from the elementary shape; and determining the emitted dose associated to each of the elementary shapes of the pattern as a function of the metrics. A computer program product is provided for carrying out such a method or at least the step of producing a dose map.