公开(公告)号：US20230008684A1

公开(公告)日：2023-01-12

申请号：US17810759

申请日：2022-07-05

Applicant: ASM IP Holding B.V

Inventor： Theodorus G.M. Oosterlaken ,  Adriaan Garssen ,  Herbert Terhorst ,  Lucian Jdira

IPC: F27B17/00 ,  H01L21/67 ,  F27B5/16

Abstract: An apparatus 1 for processing a plurality of substrates 3 is provided. The apparatus may have a process tube 5 creating a process chamber 7; a heater 9 surrounding the process tube 5; a flange 11 for supporting the process tube; and a door 15 configured to support a wafer boat 17 with a plurality of substrates 3 in the process chamber and to seal the process chamber 7. An exhaust operably connected to the process chamber 7 may be provided to remove gas from the process chamber via a first exhaust duct 19. The apparatus may be provided with an extractor chamber 21 surrounding the first exhaust duct where it connects to the process chamber and connected to a second exhaust duct 23 to remove gas from the extractor chamber.

公开(公告)号：US20200350193A1

公开(公告)日：2020-11-05

申请号：US16765125

申请日：2018-11-26

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen

IPC: H01L21/677

Abstract: A storage device for use with at least one batch furnace for batch treatment of wafers supported in a wafer boat is disclosed. The storage device comprises a cassette storage carousel for storing a plurality of wafer cassettes on rotatable platform stages. A carousel housing bounds a mini-environment chamber in which the platform stages are accommodated. A gas recirculation circuit of the storage device subsequently comprises a gas inlet channel, a gas inlet filter, the mini-environment chamber, a plurality of gas outlet openings in a bottom wall of the carousel housing, a plenum housing bounding a plenum chamber, a plenum chamber outlet, a gas circulation pump connecting the plenum chamber outlet to an inlet end of the gas inlet duct.

公开(公告)号：US10672636B2

公开(公告)日：2020-06-02

申请号：US16208062

申请日：2018-12-03

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L21/673 ,  H01L21/677 ,  H01L23/32

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

公开(公告)号：US20190051548A1

公开(公告)日：2019-02-14

申请号：US15673110

申请日：2017-08-09

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L21/673 ,  H01L21/677

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

公开(公告)号：US20240395586A1

公开(公告)日：2024-11-28

申请号：US18672416

申请日：2024-05-23

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen

IPC: H01L21/673 ,  B25J15/06 ,  H01L21/02 ,  H01L21/687

Abstract: A wafer handling assembly, a semiconductor processing apparatus comprising the wafer handling assembly and a method of forming a layer on a plurality of wafers is disclosed. Embodiments of the described wafer handling assembly comprise a boat having three boat supports per wafer for supporting the wafer in the boat and an end effector comprising three end effector supports for supporting a wafer on the end effector.

公开(公告)号：US20230307269A1

公开(公告)日：2023-09-28

申请号：US18186653

申请日：2023-03-20

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen

IPC: H01L21/67

CPC classification number: H01L21/67155

Abstract: A semiconductor processing system and a method for assembling such a system in a room of a semiconductor fabrication plant. The system comprises an equipment module and a pedestal. The equipment module may be movable over the pedestal to bring the equipment module in an end position and may have a plurality of stop surfaces. The method comprises placing the pedestal in the room, placing two stops on the pedestal and positioning the two stops relative to reference elements in the room, and connecting the positioned stops to the pedestal so that the positions thereof in the X-direction and Y-direction are fixed. The equipment module may be moved over the pedestal until the stop surfaces of the equipment module abut against the stops so as to position the equipment module in the X-direction and Y-direction relative to the reference elements.

公开(公告)号：US11682572B2

公开(公告)日：2023-06-20

申请号：US17398177

申请日：2021-08-10

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen

IPC: H01L21/677

CPC classification number: H01L21/67769

Abstract: A storage device for use with at least one batch furnace for batch treatment of wafers supported in a wafer boat is disclosed. The storage device comprises a cassette storage carousel for storing a plurality of wafer cassettes on rotatable platform stages. A carousel housing bounds a mini-environment chamber in which the platform stages are accommodated. A gas recirculation circuit of the storage device subsequently comprises a gas inlet channel, a gas inlet filter, the mini-environment chamber, a plurality of gas outlet openings in a bottom wall of the carousel housing, a plenum housing bounding a plenum chamber, a plenum chamber outlet, a gas circulation pump connecting the plenum chamber outlet to an inlet end of the gas inlet duct.

公开(公告)号：US20210407838A1

公开(公告)日：2021-12-30

申请号：US17470048

申请日：2021-09-09

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68

Abstract: The invention relates to a storage apparatus to store cassettes for substrates comprising: a moveable base plate constructed and arranged to hold cassettes; an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.

公开(公告)号：US20210366754A1

公开(公告)日：2021-11-25

申请号：US17398177

申请日：2021-08-10

Applicant: ASM IP Holding B.V

Inventor： Adriaan Garssen

IPC: H01L21/677

Abstract: A storage device for use with at least one batch furnace for batch treatment of wafers supported in a wafer boat is disclosed. The storage device comprises a cassette storage carousel for storing a plurality of wafer cassettes on rotatable platform stages. A carousel housing bounds a mini-environment chamber in which the platform stages are accommodated. A gas recirculation circuit of the storage device subsequently comprises a gas inlet channel, a gas inlet filter, the mini-environment chamber, a plurality of gas outlet openings in a bottom wall of the carousel housing, a plenum housing bounding a plenum chamber, a plenum chamber outlet, a gas circulation pump connecting the plenum chamber outlet to an inlet end of the gas inlet duct.

公开(公告)号：US11139191B2

公开(公告)日：2021-10-05

申请号：US16637134

申请日：2018-08-07

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68

Abstract: A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening is disclosed. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.