公开(公告)号：US20210407838A1

公开(公告)日：2021-12-30

申请号：US17470048

申请日：2021-09-09

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68

Abstract: The invention relates to a storage apparatus to store cassettes for substrates comprising: a moveable base plate constructed and arranged to hold cassettes; an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.

公开(公告)号：US11139191B2

公开(公告)日：2021-10-05

申请号：US16637134

申请日：2018-08-07

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68

Abstract: A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening is disclosed. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.

公开(公告)号：US20200258766A1

公开(公告)日：2020-08-13

申请号：US16637134

申请日：2018-08-07

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67

Abstract: The invention relates to a storage apparatus to store cassettes for substrates comprising: a moveable base plate constructed and arranged to hold cassettes; an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.

公开(公告)号：US11769682B2

公开(公告)日：2023-09-26

申请号：US17470048

申请日：2021-09-09

Applicant: ASM IP Holding B.V.

Inventor： Adriaan Garssen ,  Edwin den Hartog-Besselink

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L21/67769 ,  H01L21/6773 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/681

Abstract: A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.

公开(公告)号：US20230005770A1

公开(公告)日：2023-01-05

申请号：US17850060

申请日：2022-06-27

Applicant: ASM IP Holding B.V.

Inventor： Wiebren Harm Damsma ,  Edwin den Hartog-Besselink ,  Erik ter Vrugt

IPC: H01L21/67 ,  H01L21/687 ,  C23C16/458 ,  C23C16/52

Abstract: A semiconductor substrate processing apparatus is provided with a reaction chamber; a heater to heat the reaction chamber; and a substrate support assembly. The substrate support assembly comprising: a substrate support defining an outer support surface for supporting a substrate or substrate carrier in the reaction chamber; and a base assembly including a door for sealing the reaction chamber of the apparatus. The substrate support being connected to the base assembly through a bearing that facilitates rotation of the substrate support. The substrate support assembly is provided with a temperature sensor to measure the temperature of the bearing.