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1.发明授权公开(公告)号：US10975470B2
公开(公告)日：2021-04-13
申请号：US16242852
申请日：2019-01-08
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Carl White
IPC: C23C16/455 , C23C16/52 , C23C16/505 , G01N21/73 , G01N21/68 , G01J3/443 , H01L21/67 , H01L21/02 , H05H1/46 , H01J37/32 , G01N21/15
Abstract: An apparatus and method are disclosed for monitoring and/or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
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公开(公告)号：US20150308586A1
公开(公告)日：2015-10-29
申请号：US14260701
申请日：2014-04-24
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Ron Moen
IPC: F16K35/00
CPC classification number: F16K3/0254 , F16K35/02 , F16K35/022 , F16K35/06 , F16K35/10 , F16K51/02
Abstract: A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.
Abstract translation: 一种用于限制阀的行进的装置，包括可移除地连接到传递模块，真空阀或反应室的主体的行程限制杆，穿过主体以接合和限制阀的行进，并且其中主体包括在 与行程限位杆相对的至少一个安装凸缘。
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公开(公告)号：US20200018421A1
公开(公告)日：2020-01-16
申请号：US16036692
申请日：2018-07-16
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue
Abstract: A diaphragm valve is disclosed. The diaphragm valve may include, a valve body comprising a valve channel, the valve channel including an inlet channel and an outlet channel. The diaphragm valve may also include, a valve seat adjacent to the valve channel and a flexible diaphragm comprising a wetted surface and an opposing non-wetted surface, the flexible diaphragm being disposed adjacent to the valve channel. The diaphragm valve may also include, a flexible heater disposed over the non-wetted surface of the flexible diaphragm, and a valve actuator that is operable to operable to move the wetted surface of the flexible diaphragm into and out of contact with the valve seat. Valve components including a flexible heater and methods for forming such valve components are also disclosed.
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Patent Agency Ranking
公开(公告)号：US20190316255A1
公开(公告)日：2019-10-17
申请号：US16304526
申请日：2016-05-27
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Lucian C. Jdira , Chris G.M. de Ridder
IPC: C23C16/455 , C23C16/44
Abstract: A spatial atomic layer deposition apparatus (10), including a showerhead (16) with a showerhead side (18) having a center, a central area and a circumferential area. The apparatus also includes a susceptor (12) having a substrate support side that extends parallel to and of opposite the showerhead side forming a gap. The susceptor and the showerhead are rotatable relative to each other around an axis of rotation. The apparatus has a plurality of switchable showerhead sections. The apparatus also includes a plurality of multi-way valve assemblies. Each switchable showerhead section is fluidly connected with one of the plurality of multi-way valve assemblies, so as to fluidly connect a selected one of a plurality of different gas sources with that switchable showerhead section.
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公开(公告)号：US09404587B2
公开(公告)日：2016-08-02
申请号：US14260701
申请日：2014-04-24
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Ron Moen
CPC classification number: F16K3/0254 , F16K35/02 , F16K35/022 , F16K35/06 , F16K35/10 , F16K51/02
Abstract: A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.
Abstract translation: 一种用于限制阀的行进的装置，包括可移除地连接到传递模块，真空阀或反应室的主体的行程限制杆，穿过主体以接合和限制阀的行进，并且其中主体包括在 与行程限位杆相对的至少一个安装凸缘。
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公开(公告)号：US10900122B2
公开(公告)日：2021-01-26
申请号：US16304526
申请日：2016-05-27
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Lucian C. Jdira , Chris G. M. de Ridder
IPC: C23C16/40 , C23C16/455 , C23C16/44
Abstract: A spatial atomic layer deposition apparatus (10), including a showerhead (16) with a showerhead side (18) having a center, a central area and a circumferential area. The apparatus also includes a susceptor (12) having a substrate support side that extends parallel to and of opposite the showerhead side forming a gap. The susceptor and the showerhead are rotatable relative to each other around an axis of rotation. The apparatus has a plurality of switchable showerhead sections. The apparatus also includes a plurality of multi-way valve assemblies. Each switchable showerhead section is fluidly connected with one of the plurality of multi-way valve assemblies, so as to fluidly connect a selected one of a plurality of different gas sources with that switchable showerhead section.
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公开(公告)号：US10767789B2
公开(公告)日：2020-09-08
申请号：US16036692
申请日：2018-07-16
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue
Abstract: A diaphragm valve is disclosed. The diaphragm valve may include, a valve body comprising a valve channel, the valve channel including an inlet channel and an outlet channel. The diaphragm valve may also include, a valve seat adjacent to the valve channel and a flexible diaphragm comprising a wetted surface and an opposing non-wetted surface, the flexible diaphragm being disposed adjacent to the valve channel. The diaphragm valve may also include, a flexible heater disposed over the non-wetted surface of the flexible diaphragm, and a valve actuator that is operable to operable to move the wetted surface of the flexible diaphragm into and out of contact with the valve seat. Valve components including a flexible heater and methods for forming such valve components are also disclosed.
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8.发明申请公开(公告)号：US20190264324A1
公开(公告)日：2019-08-29
申请号：US16242852
申请日：2019-01-08
Applicant: ASM IP Holding B.V.
Inventor： John Shugrue , Carl White
IPC: C23C16/455 , H01J37/32 , C23C16/505 , G01N21/68 , G01J3/443
Abstract: An apparatus and method are disclosed for monitoring and/or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
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