公开(公告)号：US20120287362A1

公开(公告)日：2012-11-15

申请号：US13558396

申请日：2012-07-26

Applicant: Akinori Hashimura ,  Douglas J. Tweet ,  Apostolos T. Voutsas

Inventor： Akinori Hashimura ,  Douglas J. Tweet ,  Apostolos T. Voutsas

IPC: G02F1/1335 ,  G02B27/22 ,  C23F1/02 ,  G02B5/30

CPC classification number: B82Y20/00 ,  G02F1/133528 ,  G02F2001/133565 ,  G02F2203/10

Abstract: A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.

Abstract translation: 提供等离子体激元偏振器和制造等离子体激元偏振器的方法。 该方法沉积非金属膜和金属的交替层，形成堆叠。 在叠层上形成硬掩模。 硬掩模包括具有小于第一长度的相邻结构之间的尺寸和周期的结构，其中第一长度等于（第一波长λ/ 2）。 通过硬掩模中的开口蚀刻叠层以形成具有硬掩模结构尺寸的交替的非金属和金属层的柱堆叠。 然后，去除硬掩模结构。 在一个方面，在去除硬掩模结构之后，柱堆叠之间的空间被电介质材料填充。

公开(公告)号：US20080284544A1

公开(公告)日：2008-11-20

申请号：US11570924

申请日：2005-07-25

Applicant: Akinori Hashimura

Inventor： Akinori Hashimura

IPC: H03H9/50 ,  H03H3/007

CPC classification number: H03H9/462 ,  B82Y10/00 ,  B82Y30/00 ,  H03H9/2436 ,  H03H9/505 ,  H03H2009/0237 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527 ,  H03H2009/2442 ,  Y10S977/742 ,  Y10S977/762 ,  Y10S977/766

Abstract: An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.

Abstract translation: 本发明的一个目的是提供具有设计灵活性和最小化质量负载效应的MEMS滤波器的耦合元件。 本发明提供了一种结构，其中通过使用具有非常小的质量的纳米尺度耦合元件，与微型MEMS谐振器（例如碳纳米管（CNT））作为耦合元件部分相比，质量负载效应未反映在MEMS滤波器特性上 。

公开(公告)号：US08503064B2

公开(公告)日：2013-08-06

申请号：US13157225

申请日：2011-06-09

Applicant: Liang Tang ,  Akinori Hashimura ,  Apostolos T. Voutsas

Inventor： Liang Tang ,  Akinori Hashimura ,  Apostolos T. Voutsas

IPC: G02B26/00

CPC classification number: G02F1/0128 ,  G02F1/13338 ,  G02F1/19 ,  G02F2001/13345 ,  G02F2203/10 ,  G02F2203/34 ,  G06F3/0412

Abstract: An electrical pressure-sensitive reflective display includes an array of display pixels, each with a transparent top surface, first electrode, second electrode, an elastic polymer medium, and metallic nanoparticles distributed in the elastic polymer medium. When a first voltage potential is applied between the first and second electrodes of each display pixel, a first color is reflected from the incident spectrum of light, assuming no pressure is applied on the top surface of each display pixel. When the top surface of a first display pixel is deformed in response to an applied pressure, the elastic polymer medium in the first display pixel is compressed, decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance in the first display pixel. In response to decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance, the color reflected from the incident spectrum of light by the second display pixel is changed from the first color to second color.

Abstract translation: 电压敏反射显示器包括显示像素阵列，每个显示像素具有分布在弹性聚合物介质中的透明顶表面，第一电极，第二电极，弹性聚合物介质和金属纳米颗粒。 当在每个显示像素的第一和第二电极之间施加第一电压电位时，假设在每个显示像素的顶表面上没有施加压力，第一颜色从光的入射光谱反射。 当第一显示像素的顶表面响应于所施加的压力而变形时，第一显示像素中的弹性聚合物介质被压缩，从而降低第一显示像素中金属纳米颗粒与金属纳米颗粒的平均距离。 响应于减少金属纳米颗粒 - 金属纳米颗粒平均距离，由第二显示像素的入射光谱反射的颜色从第一颜色变为第二颜色。

公开(公告)号：US08045107B2

公开(公告)日：2011-10-25

申请号：US12614368

申请日：2009-11-06

Applicant: Liang Tang ,  Akinori Hashimura ,  Apostolos T. Voutsas

Inventor： Liang Tang ,  Akinori Hashimura ,  Apostolos T. Voutsas

IPC: G02F1/1335 ,  G02B26/00 ,  H01L21/00

CPC classification number: G02F1/195 ,  G02F2203/10

Abstract: A color-tunable plasmonic device is provided with a partially modulated refractive index. A first dielectric layer overlies a bottom electrode, and has a refractive index non-responsive to an electric field. A second dielectric layer overlies the first dielectric layer, having a refractive index responsive to an electric field. An electrically conductive top electrode overlies the second dielectric layer. A plasmonic layer including a plurality of discrete plasmonic particles is interposed between the top and bottom electrodes. In one aspect, the plasmonic layer is interposed between the first and second dielectric layers. In a second aspect, the plasmonic layer is interposed between the first dielectric layer and the bottom electrode. In a third aspect, a first plasmonic layer is interposed between the first dielectric layer and the bottom electrode, and a second plasmonic layer of discrete plasmonic particles is interposed between the first dielectric layer and the second dielectric layer.

Abstract translation: 彩色等离子体激元器件具有部分调制的折射率。 第一电介质层覆盖在底部电极上，并且具有对电场无响应的折射率。 第二电介质层覆盖第一电介质层，具有响应于电场的折射率。 导电顶电极覆盖在第二电介质层上。 包括多个离散等离子体激元的等离子体激元层插入在顶部和底部电极之间。 在一个方面，等离子体激元层介于第一和第二电介质层之间。 在第二方面，等离子体激元层介于第一介电层和底电极之间。 在第三方面中，在第一介电层和底电极之间插入第一等离子体激元层，并且在第一介电层和第二电介质层之间插入离散等离子体激元的第二等离子体层。

公开(公告)号：US20110109821A1

公开(公告)日：2011-05-12

申请号：US12635349

申请日：2009-12-10

Applicant: Liang Tang ,  Akinori Hashimura ,  Jiandong Huang ,  Apostolos T. Voutsas

Inventor： Liang Tang ,  Akinori Hashimura ,  Jiandong Huang ,  Apostolos T. Voutsas

IPC: G02F1/133

CPC classification number: G02F1/23 ,  G02F2203/10 ,  G02F2203/34

Abstract: A plasmonic display device is provided with liquid crystal dipole molecule control. The device is made from a first set of electrodes including at least one electrically conductive top electrode and at least one electrically conductive bottom electrode capable of generating a first electric field in a first direction. A second set of electrodes, including an electrically conductive right electrode and an electrically conductive left electrode, is capable of generating a second electric field in a second first direction. A dielectric layer overlies the bottom electrode, made from a liquid crystal material with molecules having dipoles responsive to an electric field. A plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the first and second set of electrodes and in contact with the dielectric layer. In one aspect, the plasmonic layer is embedded in the dielectric layer.

Abstract translation: 具有液晶偶极子分子控制的等离子体显示装置。 该装置由第一组电极制成，其包括至少一个导电顶电极和能够沿第一方向产生第一电场的至少一个导电底电极。 包括导电右电极和导电左电极的第二组电极能够在第二第一方向上产生第二电场。 电介质层覆盖在液晶材料制成的底部电极上，分子具有响应于电场的偶极子。 包括多个离散等离子体激元的等离子体激元层介于第一和第二组电极之间并与电介质层接触。 在一个方面，等离子体激元层嵌入电介质层。

公开(公告)号：US07907025B2

公开(公告)日：2011-03-15

申请号：US12017186

申请日：2008-01-21

Applicant: Akinori Hashimura

Inventor： Akinori Hashimura

IPC: G04C3/10

CPC classification number: B81C1/00142 ,  B81B2201/0271

Abstract: An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.

Abstract translation: 机电谐振器包括谐振器部分，其包括固定电极和与具有间隙的固定电极分开形成的振荡器。 间隙具有沿固定电极的厚度方向排列的第一间隙区域和第二间隙区域。 第一间隙区域的宽度与第二间隙区域不同。

公开(公告)号：US20090195330A1

公开(公告)日：2009-08-06

申请号：US12304602

申请日：2007-06-14

Applicant: Kunihiko Nakamura ,  Michiaki Matsuo ,  Yoshito Nakanishi ,  Akinori Hashimura

Inventor： Kunihiko Nakamura ,  Michiaki Matsuo ,  Yoshito Nakanishi ,  Akinori Hashimura

IPC: H03H9/24 ,  H03H9/125

CPC classification number: H03H9/2463 ,  H03H3/0072 ,  H03H9/02244 ,  H03H9/1057 ,  H03H9/2405 ,  H03H9/2457 ,  H03H2009/02314 ,  H03H2009/02519

Abstract: An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.

Abstract translation: 本发明的目的是提供一种谐振器和具有高Q值的振动器，其中振动器的振动中的振动能量的耗散小，并且梁结构的振动器的支撑部分的厚度比厚度 振动器和支撑部分相对于梁的长度方向以轴对称形成。 通过这种构造，支撑部件的脆性得到改善，并且来自支撑部件的振动能量的损失减小，并且还可以减小由振动器的表面的表面粗糙度引起的振动能量的损失，使得具有高Q值的谐振器 可以提供价值。

公开(公告)号：US08810897B2

公开(公告)日：2014-08-19

申请号：US13434548

申请日：2012-03-29

Applicant: Akinori Hashimura ,  Liang Tang ,  David R. Evans

Inventor： Akinori Hashimura ,  Liang Tang ,  David R. Evans

IPC: G02B26/00 ,  G02F1/167

CPC classification number: G02F1/167 ,  B05D5/12 ,  G02F1/1334 ,  G02F1/13439 ,  G02F1/23 ,  G02F2202/36 ,  G02F2203/10 ,  G02F2203/34

Abstract: A method is provided for improving metallic nanostructure stability. The method provides a substrate, and using a physical vapor deposition (PVD) process for example, deposits metallic nanostructures having a first diameter overlying the substrate. Some examples of metallic nanostructures include Ag, Au, and Al. The metallic nanostructures are annealed in an atmosphere including an inert gas and H2. The annealing temperature is less than the melting temperature the metal material in bulk form. In response to the annealing, stabilized metallic nanostructures are formed. If the stabilized metallic nanostructures are exposed to an ambient air environment the stabilized metallic nanostructure maintain the first diameter. Typically, the metallic nanostructures are initially formed having a rectangular shape with corners. After annealing, the stabilized metallic nanostructures have a dome shape.

Abstract translation: 提供了一种提高金属纳米结构稳定性的方法。 该方法提供基底，并且例如使用物理气相沉积（PVD）工艺沉积具有覆盖在基底上的第一直径的金属纳米结构。 金属纳米结构的一些实例包括Ag，Au和Al。 金属纳米结构在包括惰性气体和H 2的气氛中退火。 退火温度小于块状形式的金属材料的熔融温度。 响应于退火，形成稳定的金属纳米结构。 如果稳定的金属纳米结构暴露于环境空气环境，则稳定的金属纳米结构保持第一直径。 通常，金属纳米结构最初形成为具有角部的矩形形状。 退火后，稳定的金属纳米结构具有圆顶形状。

公开(公告)号：US20130077036A1

公开(公告)日：2013-03-28

申请号：US13434548

申请日：2012-03-29

Applicant: Akinori Hashimura ,  Liang Tang ,  David R. Evans

Inventor： Akinori Hashimura ,  Liang Tang ,  David R. Evans

IPC: B05D5/12 ,  G02F1/1343

CPC classification number: G02F1/167 ,  B05D5/12 ,  G02F1/1334 ,  G02F1/13439 ,  G02F1/23 ,  G02F2202/36 ,  G02F2203/10 ,  G02F2203/34

Abstract: A method is provided for improving metallic nanostructure stability. The method provides a substrate, and using a physical vapor deposition (PVD) process for example, deposits metallic nanostructures having a first diameter overlying the substrate. Some examples of metallic nanostructures include Ag, Au, and Al. The metallic nanostructures are annealed in an atmosphere including an inert gas and H2. The annealing temperature is less than the melting temperature the metal material in bulk form. In response to the annealing, stabilized metallic nanostructures are formed. If the stabilized metallic nanostructures are exposed to an ambient air environment the stabilized metallic nanostructure maintain the first diameter. Typically, the metallic nanostructures are initially formed having a rectangular shape with corners. After annealing, the stabilized metallic nanostructures have a dome shape.

Abstract translation: 提供了一种提高金属纳米结构稳定性的方法。 该方法提供基底，并且例如使用物理气相沉积（PVD）工艺沉积具有覆盖在基底上的第一直径的金属纳米结构。 金属纳米结构的一些实例包括Ag，Au和Al。 金属纳米结构在包括惰性气体和H 2的气氛中退火。 退火温度小于块状形式的金属材料的熔融温度。 响应于退火，形成稳定的金属纳米结构。 如果稳定的金属纳米结构暴露于环境空气环境，则稳定的金属纳米结构保持第一直径。 通常，金属纳米结构最初形成为具有角部的矩形形状。 退火后，稳定的金属纳米结构具有圆顶形状。

公开(公告)号：US20120200817A1

公开(公告)日：2012-08-09

申请号：US13449370

申请日：2012-04-18

Applicant: Douglas J. Tweet ,  Akinori Hashimura ,  Paul J. Schuele ,  Apostolos T. Voutsas

Inventor： Douglas J. Tweet ,  Akinori Hashimura ,  Paul J. Schuele ,  Apostolos T. Voutsas

IPC: G02F1/1343 ,  H01B13/00 ,  B82Y40/00

CPC classification number: G02F1/133553 ,  G02F1/19 ,  G02F2201/124 ,  G02F2203/10

Abstract: A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.

Abstract translation: 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻，停留在电介质层。 在去除硬掩模之后，导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中，形成覆盖在介电层上的金属纳米颗粒图案。 然后，去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜，形成多孔阳极氧化Al氧化物（AAO）膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。