公开(公告)号：US20210381833A1

公开(公告)日：2021-12-09

申请号：US17341258

申请日：2021-06-07

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra

IPC: G01C19/5712

Abstract: A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.

公开(公告)号：US10816569B2

公开(公告)日：2020-10-27

申请号：US16125604

申请日：2018-09-07

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra

IPC: G01P15/125 ,  G01P15/08

Abstract: Z-axis microelectromechanical systems (MEMS) accelerometers are described. The z-axis MEMS accelerometers are of a teeter-totter type, having a pivoting beam suspended above a substrate. A non-uniform gap distance between the pivoting beam and the substrate is provided to increase the sensitivity of the accelerometer to z-axis acceleration. In some embodiments, the non-uniform gap distance is created by one or more substrate layers, such as one or more layers of polysilicon on the substrate above which the pivoting beam is suspended. In some embodiments, the non-uniform gap distance is created by the use of one or more bumps on the beam. In some embodiments, both substrate layers and bumps are used to provide a non-uniform gap distance for different electrodes of the accelerometer. The non-uniform gap distance may include a gap of reduced height, resulting in increased sensitivity of the accelerometer to z-axis accelerations.

公开(公告)号：US20150128701A1

公开(公告)日：2015-05-14

申请号：US14080370

申请日：2013-11-14

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  John A. Geen

IPC: G01C19/5698

CPC classification number: G01P15/097 ,  G01C19/5684 ,  G01P15/125 ,  G01P15/18

Abstract: A method of detecting motion provides a resonator having a mass, moves the mass in a translational mode, and actuates the mass in a given bulk mode. The mass moves in the translational and given bulk modes at substantially the same time and, accordingly, the resonator is configured to detect linear and rotational movement when moving and actuating the mass in the translational and given bulk modes. The method produces one or more movement signals representing the detected linear and rotational movement.

Abstract translation: 检测运动的方法提供具有质量的谐振器，以平移模式移动质量，并且以给定的体模式致动质量。 质量在基本上相同的时间在平移和给定的体模式中移动，因此，谐振器被配置为在平移和给定的体模式中移动和致动质量时检测线性和旋转运动。 该方法产生表示检测到的线性和旋转运动的一个或多个运动信号。

公开(公告)号：US20250164246A1

公开(公告)日：2025-05-22

申请号：US18944411

申请日：2024-11-12

Applicant: Analog Devices, Inc.

Inventor： Tyler Dunn ,  Gaurav Vohra ,  William Clark ,  Xin Zhang ,  Carey Merritt

IPC: G01C19/5712

Abstract: Gyroscopes with electrodes for tuning cross-axis sensitivity are disclosed. In certain embodiments, a MEMS gyroscope includes a resonator mass that moves in a first direction (for instance, x-direction), a sensing structure that detects a Coriolis effect in a second direction (for instance, y-direction), and a plurality of electrodes that control a cross-axis stiffness of the MEMS gyroscope by controlling motion of the resonator mass in a third direction (for instance, z-direction). For example, the electrodes can be used to reduce or eliminate cross-axis sensitivity arising from cross-axis stiffnesses, such as kxz (resonator-to-orthogonal) and/or kyz (Coriolis-to-orthogonal).

公开(公告)号：US20240300808A1

公开(公告)日：2024-09-12

申请号：US18596223

申请日：2024-03-05

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Gaurav Vohra ,  Xin Zhang ,  Christine H. Tsau ,  Chen Yang ,  Andrew Proudman ,  Matthew Kent Emsley ,  George M. Molnar, II ,  Nikolay Pokrovskiy ,  Ali Mohammed Shakir ,  Michael Judy

IPC: B81C1/00 ,  B81B3/00

CPC classification number: B81C1/00666 ,  B81B3/0072 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/0315 ,  B81C2201/0111 ,  B81C2201/019

Abstract: Described herein are manufacturing techniques for achieving stress isolation in microelectromechanical systems (MEMS) devices that involve isolation trenches formed from the backside of the substrate. The techniques described herein involve etching a trench in the bottom side of the substrate subsequent to forming a MEMS platform, and processing the MEMS platform to form a MEMS device on the top side of the substrate subsequent to etching the trench.

公开(公告)号：US20230288204A1

公开(公告)日：2023-09-14

申请号：US18320793

申请日：2023-05-19

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.

公开(公告)号：US20200081028A1

公开(公告)日：2020-03-12

申请号：US16125604

申请日：2018-09-07

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra

IPC: G01P15/125

Abstract: Z-axis microelectromechanical systems (MEMS) accelerometers are described. The z-axis MEMS accelerometers are of a teeter-totter type, having a pivoting beam suspended above a substrate. A non-uniform gap distance between the pivoting beam and the substrate is provided to increase the sensitivity of the accelerometer to z-axis acceleration. In some embodiments, the non-uniform gap distance is created by one or more substrate layers, such as one or more layers of polysilicon on the substrate above which the pivoting beam is suspended. In some embodiments, the non-uniform gap distance is created by the use of one or more bumps on the beam. In some embodiments, both substrate layers and bumps are used to provide a non-uniform gap distance for different electrodes of the accelerometer. The non-uniform gap distance may include a gap of reduced height, resulting in increased sensitivity of the accelerometer to z-axis accelerations.

公开(公告)号：US20190078912A1

公开(公告)日：2019-03-14

申请号：US16184664

申请日：2018-11-08

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  William A. Clark ,  Mehrnaz Motiee

IPC: G01D21/00 ,  H03L7/00 ,  H03L7/18 ,  H03L7/14 ,  G01D18/00

CPC classification number: G01D21/00 ,  G01D18/00 ,  H03L7/00 ,  H03L7/141 ,  H03L7/18

Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.

公开(公告)号：US20160153779A1

公开(公告)日：2016-06-02

申请号：US14531123

申请日：2014-11-03

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Jeffrey A. Gregory

IPC: G01C19/5698

CPC classification number: G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.

Abstract translation: 用于单独使用MEMS谐振器质量感测线性加速度的方法和装置，或与感测转速相同。 谐振器块可以是盘或环形结构，以共振器质量的振动模式之一的谐振频率被驱动。 该模式的振动的振幅由布置在谐振器块的相对位置处的至少两个驱动感测电极的集合来感测。 至少基于相对电极的信号之间的差异导出线性加速度。 可以使用多对相对电极在多个正交维度上感测线性加速度。 可以通过感测耦合到谐振器质量的正交模式中的能量同时导出旋转速率。

公开(公告)号：US11543402B2

公开(公告)日：2023-01-03

申请号：US16757202

申请日：2018-05-04

Applicant: Analog Devices, Inc.

Inventor： Thomas G. O'Dwyer ,  Gaurav Vohra ,  Xin Zhang ,  YounJae Kook ,  Isaac Chase Novet ,  Venugopal Gopinathan

IPC: G01R33/09 ,  G01N33/487 ,  G01N27/02 ,  G01N33/49 ,  G01N33/493 ,  G01N27/12 ,  G01N27/22

Abstract: An impedance measurement system for detecting an analyte in a sample is disclosed. The system includes first, second, and third electrodes, wherein at least a portion of the third electrode is positioned between the first and second electrodes, means for generating an electromagnetic field between the first and second electrodes, means for electrically controlling the third electrode, wherein the third electrode modifies the electromagnetic field, and a processor for detecting a presence of the analyte in the sample, based at least in part on a property of the electromagnetic field.