Frequency mismatch detection method for mode matching in gyroscopes

    公开(公告)号:US10852136B2

    公开(公告)日:2020-12-01

    申请号:US15690504

    申请日:2017-08-30

    Abstract: A method for detecting frequency mismatch in microelectromechanical systems (MEMS) gyroscopes is described. Detection of the frequency mismatch between a drive signal and a sense signal may be performed by generating an output signal whose spectrum reflects the physical characteristics of the gyroscope, and using the output signal to determine the frequency fC of the sense signal. The output signal may be generated by cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal can be obtained by allowing the noise signal to pass through a system designed to have a noise transfer function that mimics the frequency response of the gyroscope. Since the noise signal is random or pseudo-random, cross-correlating the noise signal with the response signal reveals spectral characteristics of the gyroscope. To improve computational efficiency, the cross-correlation can be performed on demodulated versions of the noise signal and the response signal.

    FREQUENCY MISMATCH DETECTION METHOD FOR MODE MATCHING IN GYROSCOPES

    公开(公告)号:US20190063923A1

    公开(公告)日:2019-02-28

    申请号:US15690504

    申请日:2017-08-30

    Abstract: A method for detecting frequency mismatch in microelectromechanical systems (MEMS) gyroscopes is described. Detection of the frequency mismatch between a drive signal and a sense signal may be performed by generating an output signal whose spectrum reflects the physical characteristics of the gyroscope, and using the output signal to determine the frequency fC of the sense signal. The output signal may be generated by cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal can be obtained by allowing the noise signal to pass through a system designed to have a noise transfer function that mimics the frequency response of the gyroscope. Since the noise signal is random or pseudo-random, cross-correlating the noise signal with the response signal reveals spectral characteristics of the gyroscope. To improve computational efficiency, the cross-correlation can be performed on demodulated versions of the noise signal and the response signal.

    Mode-matching of MEMS resonators
    4.
    发明授权

    公开(公告)号:US10247600B2

    公开(公告)日:2019-04-02

    申请号:US15348521

    申请日:2016-11-10

    Abstract: Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.

    MODE-MATCHING OF MEMS RESONATORS
    5.
    发明申请

    公开(公告)号:US20180128674A1

    公开(公告)日:2018-05-10

    申请号:US15348521

    申请日:2016-11-10

    Abstract: Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.

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