公开(公告)号：US09658247B2

公开(公告)日：2017-05-23

申请号：US14634859

申请日：2015-03-01

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01Q20/02 ,  G01N21/47

CPC classification number: G01Q60/18 ,  G01N21/47 ,  G01Q20/02

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

公开(公告)号：US20180120344A1

公开(公告)日：2018-05-03

申请号：US15348848

申请日：2016-11-10

Applicant: Anasys Instruments

Inventor： Craig Prater ,  Kevin Kjoller

IPC: G01Q30/02 ,  G01Q60/34 ,  G01N21/35

CPC classification number: G01Q30/02 ,  G01N21/35 ,  G01N21/3563 ,  G01N2201/0612 ,  G01N2201/12 ,  G01Q60/34

Abstract: Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.

公开(公告)号：US20170219622A1

公开(公告)日：2017-08-03

申请号：US15488240

申请日：2017-04-14

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/35 ,  G01N21/47

CPC classification number: G01Q60/18 ,  G01N21/35 ,  G01N21/39 ,  G01N21/47 ,  G01N21/4738 ,  G01N2201/0612 ,  G01N2201/10 ,  G01Q30/02 ,  G01Q60/22

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

公开(公告)号：US20170003316A1

公开(公告)日：2017-01-05

申请号：US14634859

申请日：2015-03-01

Applicant: ANASYS INSTRUMENTS

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/47

CPC classification number: G01Q60/18 ,  G01N21/47 ,  G01Q20/02

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

Abstract translation: 本发明涉及通过近场光学显微镜（s-SNOM）附近的红外散射扫描测量具有亚微米空间分辨率的材料的光学性质。 具体地，本发明通过实现高信噪比，高测量速度和高的光学幅度和相位精度来提供比现有技术更大的改进。 另外，在一些实施例中，它消除了对原位参考以计算光学相位或吸收光谱的波长相关光谱的需要。 这些目标通过改进的不对称干涉测量来实现，其中近场散射光被干涉仪中的参考光束干扰。 本发明通过布置比背景散射辐射强得多的参考光束来实现背景抑制的显着改进。 结合频率选择解调技术，可以高效，准确地区分近场散射光与背景散射光。 这些目标通过一系列改进实现，包括大型动态范围检测器，仔细控制相对光束强度和高带宽解调技术。 在其他实施例中，利用新颖的s-SNOM配置来提高相位和幅度稳定性。 在其它实施方案中，可以通过比较来自样品的已知和未知区域的性质作为照明中心波长的函数来直接获得吸收光谱。

公开(公告)号：US20180203039A1

公开(公告)日：2018-07-19

申请号：US15693204

申请日：2017-08-31

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/35 ,  G01N21/47

CPC classification number: G01Q60/18 ,  G01N21/35 ,  G01N21/39 ,  G01N21/47 ,  G01N21/4738 ,  G01N2201/0612 ,  G01N2201/10 ,  G01Q30/02 ,  G01Q60/22

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

公开(公告)号：US09778282B2

公开(公告)日：2017-10-03

申请号：US15488240

申请日：2017-04-14

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/47 ,  G01N21/35

CPC classification number: G01Q60/18 ,  G01N21/35 ,  G01N21/39 ,  G01N21/47 ,  G01N21/4738 ,  G01N2201/0612 ,  G01N2201/10 ,  G01Q30/02 ,  G01Q60/22

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

公开(公告)号：US10082523B2

公开(公告)日：2018-09-25

申请号：US15693204

申请日：2017-08-31

Applicant: Anasys Instruments

Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/47 ,  G01N21/35

CPC classification number: G01Q60/18 ,  G01N21/35 ,  G01N21/39 ,  G01N21/47 ,  G01N21/4738 ,  G01N2201/0612 ,  G01N2201/10 ,  G01Q30/02 ,  G01Q60/22

Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.