SWIMMING AID DEVICE
    3.
    发明申请
    SWIMMING AID DEVICE 审中-公开
    游泳设备

    公开(公告)号:US20160367860A1

    公开(公告)日:2016-12-22

    申请号:US15257848

    申请日:2016-09-06

    Applicant: Andrew Nguyen

    Inventor: Andrew Nguyen

    CPC classification number: A63B31/11 A63B2209/00 A63B2210/50

    Abstract: A swimming aid device in the form of a monofi is contemplated. The swimming aid device may include first and second fins formed of a resilient material, each fin including an elongated internal space within a fin body, an opening leading to the elongated internal space, a fin blade coupled to and extending away from the elongated internal space, a first and second side heel connectors on opposing sides of the opening leading to the elongated internal space and sized and shaped to mate with each other, a fin blade connector and a fin blade connector receiver on the fin blade and sized and shaped to mate with each other, the combination of the first and second fins forming a monofin.

    Abstract translation: 考虑到单体形式的游泳辅助装置。 游泳辅助装置可以包括由弹性材料形成的第一和第二鳍片,每个翼片包括翅片体内的细长内部空间,通向细长内部空间的开口,联接到并延伸远离细长内部空间的翅片叶片 ,在所述开口的相对侧上的通向所述细长内部空间的第一和第二侧跟部连接器,其尺寸和形状相互配合,翅片叶片连接器和鳍片连接器接收器,其尺寸和形状适于配合 彼此之间形成单峰的第一和第二鳍片的组合。

    Apparatus for controlling the temperature uniformity of a substrate
    4.
    发明授权
    Apparatus for controlling the temperature uniformity of a substrate 有权
    用于控制基板的温度均匀性的装置

    公开(公告)号:US09267742B2

    公开(公告)日:2016-02-23

    申请号:US12886255

    申请日:2010-09-20

    CPC classification number: F28F3/12 F28F2013/001

    Abstract: Apparatus for controlling the thermal uniformity of a substrate. In some embodiments, the thermal uniformity of the substrate is controlled to be more uniform. In some embodiments, the thermal uniformity of the substrate is controlled to be non-uniform in a desired pattern. In some embodiments, an apparatus for controlling thermal uniformity of a substrate includes a substrate support having a support surface to support a substrate thereon. A plurality of flow paths having a substantially equivalent fluid conductance are disposed within the substrate support to flow a heat transfer fluid beneath the support surface.

    Abstract translation: 用于控制基板的热均匀性的装置。 在一些实施例中,将基板的热均匀性控制得更均匀。 在一些实施例中,基板的热均匀性被控制为以期望的图案不均匀。 在一些实施例中,用于控制衬底的热均匀性的装置包括具有用于在其上支撑衬底的支撑表面的衬底支撑件。 具有基本相当的流体电导的多个流动路径设置在基板支撑件内,以使传热流体在支撑表面下方流动。

    METHODS OF ATTACHING A MODULE ON WAFER SUBSTRATE
    5.
    发明申请
    METHODS OF ATTACHING A MODULE ON WAFER SUBSTRATE 有权
    连接晶片上的模块的方法

    公开(公告)号:US20140202267A1

    公开(公告)日:2014-07-24

    申请号:US13797112

    申请日:2013-03-12

    CPC classification number: H01L21/67248 Y10T29/53

    Abstract: Aspects of the present disclosure describe an attachment device for mounting a module to a substrate comprises a module leg with two ends and a module foot. One end of the module leg is configured to be attached to a bottom surface of the module and the other end of the module leg is configured to be attached to the module foot. At least a portion of the module foot is configured to be attached to the substrate. Also a portion of a surface area of the module foot is configured to be exposed outside of an area covered by the module. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    Abstract translation: 本公开的方面描述了用于将模块安装到基板的附接装置,包括具有两端的模块腿和模块脚。 模块腿的一端构造成附接到模块的底表面,并且模块腿的另一端构造成附接到模块脚。 模块脚的至少一部分被配置成附接到基底。 模块脚的表面区域的一部分也被配置为暴露在由模块覆盖的区域的外部。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。

    Gas flow equalizer plate suitable for use in a substrate process chamber
    9.
    发明授权
    Gas flow equalizer plate suitable for use in a substrate process chamber 失效
    气流平衡板,适用于衬底加工室

    公开(公告)号:US08075728B2

    公开(公告)日:2011-12-13

    申请号:US12038887

    申请日:2008-02-28

    CPC classification number: H01J37/32449 H01J37/3244

    Abstract: A flow equalizer plate is provided for use in a substrate process chamber. The flow equalizer plate has an annular shape with a flow obstructing inner region, and a perforated outer region that permits the passage of a processing gas, but retains specific elements in the processing gas, such as active radicals or ions. The inner and outer regions have varying radial widths so as to balance a flow of processing gas over a surface of a substrate. In certain embodiments, the flow equalizer plate may be utilized to correct chamber flow asymmetries due to a lateral offset of an exhaust port relative to a center line of a substrate support between the process volume and the exhaust port.

    Abstract translation: 提供流量均衡器板用于衬底处理室。 流量均衡器板具有流动阻挡内部区域的环形形状,以及允许处理气体通过但在处理气体中保留特定元素的穿孔外部区域,例如活性自由基或离子。 内部和外部区域具有变化的径向宽度,以平衡处理气体在衬底表面上的流动。 在某些实施例中,流量均衡器板可用于校正由于排气口相对于处理容积和排气口之间的衬底支撑件的中心线的横向偏移造成的室流动不对称性。

    Plasma immersion ion implantation reactor having multiple ion shower grids
    10.
    发明授权
    Plasma immersion ion implantation reactor having multiple ion shower grids 有权
    具有多个离子淋浴网格的等离子体浸没离子注入反应器

    公开(公告)号:US08058156B2

    公开(公告)日:2011-11-15

    申请号:US10895784

    申请日:2004-07-20

    Abstract: A plasma immersion ion implantation process for implanting a selected species at a desired ion implantation depth profile in a workpiece is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower process region, each of the ion shower grids having plural orifices in mutual registration from grid to grid, the plural orifices oriented in a non-parallel direction relative to a surface plane of the respective ion shower grid. The process includes placing a workpiece in the process region, the workpiece having a workpiece surface generally facing the surface plane of the closest one of the plural ion shower grids, and furnishing the selected species into the ion generation region. The process further includes evacuating the process region, and applying plasma source power to generate a plasma of the selected species in the ion generation region. The process also includes applying successive grid potentials to successive ones of the grids and applying a bias potential to the workpiece. The combination of the grid and bias potentials corresponds to the desired ion implantation depth profile in the workpiece.

    Abstract translation: 在具有一组多个并联离子淋浴网格的反应室中进行用于在工件中以期望的离子注入深度分布植入选定物种的等离子体浸没离子注入方法,该多个平行离子淋浴网将腔室分成上部离子产生区域和下部 处理区域,每个离子淋浴栅格具有从栅格到栅格相互配准的多个孔,多个孔相对于各个离子喷淋栅格的表面平行于非平行方向。 该工艺包括将工件放置在工艺区域中,工件具有大致面对多个离子淋浴栅格中最接近的一个的表面的工件表面,并将所选择的物质提供到离子产生区域中。 该方法还包括抽空处理区域,以及施加等离子体源功率以在离子产生区域中产生所选物种的等离子体。 该过程还包括将连续的栅格电势施加到连续的栅格并向工件施加偏置电位。 栅格和偏置电位的组合对应于工件中期望的离子注入深度分布。

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