公开(公告)号：US10854483B2

公开(公告)日：2020-12-01

申请号：US16157808

申请日：2018-10-11

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Robert Brent Vopat ,  Charles T. Carlson ,  Jeffrey Charles Blahnik ,  Timothy J. Franklin ,  David Blahnik ,  Aaron Webb

IPC: F27D1/18 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

Abstract: Apparatuses for annealing semiconductor substrates, such as a batch processing chamber, are provided herein. The batch processing chamber includes a chamber body enclosing an internal volume, a cassette moveably disposed within the internal volume and a plug coupled to a bottom wall of the cassette. The chamber body has a hole through a bottom wall of the chamber body and is interfaced with one or more heaters operable to maintain the chamber body at a temperature of greater than 290° C. The cassette is configured to be raised to load a plurality of substrates thereon and lowered to seal the internal volume. The plug is configured to move up and down within the internal volume. The plug includes a downward-facing seal configured to engage with a top surface of the bottom wall of the chamber body and close the hole through the bottom wall of the chamber body.

公开(公告)号：US11306824B2

公开(公告)日：2022-04-19

申请号：US16642827

申请日：2018-09-28

Applicant: Applied Materials, Inc.

Inventor： Benjamin B. Riordon ,  Charles T. Carlson ,  Aaron Webb ,  Gary Wyka

IPC: F16K1/20 ,  F16K49/00 ,  F16K51/02 ,  H01J37/32

Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

公开(公告)号：US10969029B2

公开(公告)日：2021-04-06

申请号：US16341703

申请日：2017-12-01

Applicant: Applied Materials, Inc.

Inventor： Charles T. Carlson ,  Tammy Jo Pride ,  Benjamin B. Riordon ,  Aaron Webb

IPC: F16K27/02 ,  F16K1/20 ,  F16K11/10 ,  F16K1/22 ,  H01L21/67

Abstract: Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.