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公开(公告)号：US12134167B2
公开(公告)日：2024-11-05
申请号：US18316190
申请日：2023-05-11
Applicant: Applied Materials, Inc.
Inventor： Shantanu Rajiv Gadgil , Sumit Subhash Patankar , Nathan Arron Davis , Michael J. Coughlin , Allen L D'Ambra
IPC: B24B53/017
Abstract: A method of cleaning a conditioner head includes bringing two clamps of a cleaning tool inward toward a disk-shaped pad conditioner head to press a sponge against an outer surface of the disk-shaped pad conditioner head, and creating relative motion between the cleaning tool and the pad conditioner head to wipe the sponge against the pad conditioner head.
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