公开(公告)号：US11014853B2

公开(公告)日：2021-05-25

申请号：US16279247

申请日：2019-02-19

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  David Fenwick

IPC: H01J37/32 ,  C04B35/505 ,  C04B35/638 ,  C04B35/622 ,  H01L21/67 ,  H01L21/683 ,  C04B35/645 ,  H01L21/687 ,  C23C30/00 ,  C04B41/00

Abstract: A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.

公开(公告)号：US11008653B2

公开(公告)日：2021-05-18

申请号：US15844335

申请日：2017-12-15

Applicant: Applied Materials, Inc.

Inventor： David Fenwick ,  Xiaowei Wu ,  Jennifer Y. Sun

IPC: B32B18/00 ,  C23C16/455 ,  C23C16/40 ,  C23C14/06 ,  C23C14/08 ,  C23C16/34

Abstract: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.

公开(公告)号：US20210123143A1

公开(公告)日：2021-04-29

申请号：US17072301

申请日：2020-10-16

Applicant: APPLIED MATERIALS, INC.

Inventor： David Fenwick ,  Jennifer Y. Sun ,  Cheng-Hsuan Chou ,  Xiao-Ming He

IPC: C23F11/02 ,  C23C16/40 ,  C23C16/505 ,  C23C16/455 ,  C23F11/18

Abstract: Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.

公开(公告)号：US20180112311A1

公开(公告)日：2018-04-26

申请号：US15844335

申请日：2017-12-15

Applicant: Applied Materials, Inc.

Inventor： David Fenwick ,  Xiaowei Wu ,  Jennifer Y. Sun

IPC: C23C16/455 ,  C23C16/40 ,  C23C16/34 ,  C23C14/08 ,  C23C14/06

CPC classification number: C23C16/45525 ,  C23C14/0641 ,  C23C14/08 ,  C23C16/34 ,  C23C16/40 ,  C23C16/405

Abstract: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.

公开(公告)号：US12104246B2

公开(公告)日：2024-10-01

申请号：US17718205

申请日：2022-04-11

Applicant: Applied Materials, Inc.

Inventor： David Fenwick ,  Jennifer Y. Sun

IPC: C23C16/44 ,  C23C16/40 ,  C23C16/455 ,  C23C28/04

CPC classification number: C23C16/4404 ,  C23C16/40 ,  C23C16/403 ,  C23C16/405 ,  C23C16/4408 ,  C23C16/45529 ,  C23C16/45531 ,  C23C28/042

Abstract: A method comprises depositing a first layer of aluminum oxide onto a surface of a chamber component via atomic layer deposition (ALD). The method further comprises depositing a second layer of yttrium oxide onto a surface of the chamber component via ALD, depositing a third layer of zirconium oxide onto the surface of the chamber component via ALD, and forming a corrosion and erosion resistant coating comprising a YZrxOy solid state phase of the second layer and the third layer, wherein x and y have values that are based on a number of repetitions of the atomic layer deposition process that are used to deposit the second layer and a number of repetitions of the atomic layer deposition process that are used to deposit the third layer.

公开(公告)号：US20240284650A1

公开(公告)日：2024-08-22

申请号：US18648278

申请日：2024-04-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/20 ,  H01J37/32 ,  H01L21/687 ,  H05F1/02

CPC classification number: H05K9/0064 ,  H01J37/20 ,  H01J37/32477 ,  H01J37/32495 ,  H01L21/68707 ,  H01L21/68757 ,  H05F1/02

Abstract: A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.

公开(公告)号：US20230077895A1

公开(公告)日：2023-03-16

申请号：US17985065

申请日：2022-11-10

Applicant: Applied Materials, Inc.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/32 ,  H01J37/20 ,  B25J18/00 ,  H01L21/687 ,  H05F1/02 ,  B65G49/07

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

公开(公告)号：US11540432B2

公开(公告)日：2022-12-27

申请号：US16890336

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/32 ,  H01J37/20 ,  B25J1/00 ,  H01L21/687 ,  H05F1/02 ,  B65G49/07

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

公开(公告)号：US20220235458A1

公开(公告)日：2022-07-28

申请号：US17718205

申请日：2022-04-11

Applicant: Applied Materials, Inc.

Inventor： David Fenwick ,  Jennifer Y. Sun

IPC: C23C16/44 ,  C23C16/40 ,  C23C16/455 ,  C23C28/04

Abstract: A method comprises depositing a first layer of aluminum oxide onto a surface of a chamber component via atomic layer deposition (ALD). The method further comprises depositing a second layer of yttrium oxide onto a surface of the chamber component via ALD, depositing a third layer of zirconium oxide onto the surface of the chamber component via ALD, and forming a corrosion and erosion resistant coating comprising a YZrxOy solid state phase of the second layer and the third layer, wherein x and y have values that are based on a number of repetitions of the atomic layer deposition process that are used to deposit the second layer and a number of repetitions of the atomic layer deposition process that are used to deposit the third layer.

公开(公告)号：US20210100087A1

公开(公告)日：2021-04-01

申请号：US16890346

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05F1/02 ,  H01L21/687 ,  H01J37/32 ,  B25J18/00

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.