公开(公告)号：USD992611S1

公开(公告)日：2023-07-18

申请号：US29859229

申请日：2022-11-08

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
FIG. 2 is a side view thereof.
FIG. 3 is a side view thereof.
FIG. 4 is a front view thereof.
FIG. 5 is a rear view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：USD991994S1

公开(公告)日：2023-07-11

申请号：US29859227

申请日：2022-11-08

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
FIG. 2 is a side view thereof.
FIG. 3 is a side view thereof.
FIG. 4 is a front view thereof.
FIG. 5 is a rear view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：US10381247B2

公开(公告)日：2019-08-13

申请号：US15238604

申请日：2016-08-16

Applicant: Applied Materials, Inc.

Inventor： Nagendra V. Madiwal ,  Robert Irwin Decottignies ,  Andrew Nguyen ,  Paul B. Reuter ,  Angela R. Sico ,  Michael Kuchar ,  Travis Morey ,  Mitchell DiSanto

IPC: H01L21/67 ,  C23C14/56 ,  C23C16/44 ,  C23C16/455

Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

公开(公告)号：US10278501B2

公开(公告)日：2019-05-07

申请号：US14689342

申请日：2015-04-17

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: H01L21/67 ,  A47B96/00

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

公开(公告)号：US20240213056A1

公开(公告)日：2024-06-27

申请号：US18389664

申请日：2023-12-19

Applicant: Applied Materials, Inc.

Inventor： Angela Rose Sico ,  Travis Morey ,  Michael C. Kuchar ,  Sushant S. Koshti

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/68707

Abstract: A mainframe of a device fabrication system includes a base, a plurality of facets on the base, and a lid over the plurality of facets. A first facet of the plurality of facets includes a frame. The base, the lid and the plurality of facets together define an interior volume that includes a robot arm. A first replaceable interface plate is attached to the first frame of the first facet. The first replaceable interface plate includes a plurality of replaceable chamber ports. A first replaceable camber port of the plurality of replaceable chamber ports is configured to provide access for the robot arm to a first process chamber. A second replaceable chamber port of the plurality of replaceable chamber ports is configured to provide access for the robot arm to a second process chamber.

公开(公告)号：USD973116S1

公开(公告)日：2022-12-20

申请号：US29758664

申请日：2020-11-17

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

公开(公告)号：US20170356085A1

公开(公告)日：2017-12-14

申请号：US15177183

申请日：2016-06-08

Applicant: Applied Materials, Inc.

Inventor： Travis Morey

IPC: C23C16/44

CPC classification number: C23C16/4408 ,  C23C14/566 ,  H01J37/00

Abstract: Porous diffuser assemblies including multiple diffuser elements. The porous diffuser assemblies include a diffuser body, a diffuser base coupled to the diffuser body and forming a plenum there between, the diffuser base including a plurality of openings formed therein, and a porous diffuser element disposed in each of the plurality of openings wherein surfaces of the porous diffuser elements are exposed to the plenum. Gas purged chambers and methods of purging a chamber are disclosed, as are numerous other aspects.

公开(公告)号：USD1029066S1

公开(公告)日：2024-05-28

申请号：US29830396

申请日：2022-03-11

Applicant: APPLIED MATERIALS, INC.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a front, top perspective view of a mainframe for a dual-robot substrate processing system in accordance with the present design.
FIG. 2 is a left side elevational view of the present design.
FIG. 3 is a right side elevational view of the present design.
FIG. 4 is a front elevational view of the present design.
FIG. 5 is a rear elevational view of the present design.
FIG. 6 is a top plan view of the present design.
FIG. 7 is a bottom plan view of the second embodiment of the present design; and,
FIG. 8 is a front, top perspective view of the present design, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：US20160314997A1

公开(公告)日：2016-10-27

申请号：US14693386

申请日：2015-04-22

Applicant: Applied Materials, Inc.

Inventor： Paul B. Reuter ,  Travis Morey

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67109 ,  H01L21/67201

Abstract: A loadlock apparatus including a lower disc diffuser is provided. The loadlock apparatus includes a loadlock body containing a lower loadlock chamber and an upper load loadlock chamber, a lower cooling plate in the lower loadlock chamber, and an upper cooling plate in the upper loadlock chamber. The lower disc diffuser may be centrally located above the lower cooling plate. An upper disc diffuser may be centrally located above the upper cooling plate. Systems including the loadlock apparatus and methods of operating the loadlock apparatus are provided. A cooling plate assembly that is readily removable for cleaning is also provided, as are numerous other aspects.

Abstract translation: 提供了包括下盘扩散器的装载锁定装置。 负载锁定装置包括：负载锁体，该负载锁体包含下负荷锁定室和上负荷负荷锁定室，下负荷锁定室中的下冷却板和上负荷锁定室中的上冷却板。 下盘扩散器可以位于下冷却板上方的中心。 上盘式扩散器可以位于上部冷却板上方的中心。 提供了包括负载锁定装置和操作负载锁定装置的方法的系统。 如许多其它方面，还提供了易于拆卸以进行清洁的冷却板组件。

公开(公告)号：US20150311102A1

公开(公告)日：2015-10-29

申请号：US14689342

申请日：2015-04-17

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: H01L21/677 ,  A47B96/00 ,  E06B7/18

CPC classification number: A47B96/00 ,  H01L21/67126 ,  H01L21/67201

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

Abstract translation: 公开了具有侧面致动的装载锁门组件。 装载锁门组件包括一个装载锁门和一个与其连接的门支撑组件。 门支撑组件包括相对于负载锁定体的一个或多个侧面可枢转的一个或多个枢轴构件，联接到负载锁定门的门支撑支架，联接在门支撑支架之间的一个或多个分离器侧致动器，其可致动以将 加载锁定门从密封表面，以及一个或多个枢转侧致动器，其可操作以使加载锁定门在加载锁定入口上方或下方枢转。 具有侧面致动的装载锁定装置，包括具有侧面致动的一个或多个装载锁定门组件的系统，以及操作负载锁定门组件的方法也是如许多其它方面一样。