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1.发明公开公开(公告)号：US20230335370A1
公开(公告)日：2023-10-19
申请号：US18213220
申请日：2023-06-22
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas
IPC: H01J37/22 , H01J37/28 , H01J37/305 , H01J37/26
CPC classification number: H01J37/222 , H01J37/28 , H01J37/3056 , H01J37/265 , H01J2237/31749 , H01J2237/2807 , H01J2237/2555 , H01J2237/2561
Abstract: A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
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公开(公告)号：US20230057148A1
公开(公告)日：2023-02-23
申请号：US17408876
申请日：2021-08-23
Applicant: Applied Materials Israel Ltd.
Inventor： Ilya Blayvas , Yehuda Zur
IPC: H01J37/302 , H01L21/66 , H01J37/28 , H01J37/305
Abstract: Analyzing a sidewall of a hole milled in a sample to determine thickness of a buried layer includes milling the hole in the sample using a charged particle beam of a focused ion beam (FIB) column to expose the buried layer along the sidewall of the hole. After milling, the sidewall of the hole has a known slope angle. From a perspective relative to a surface of the sample, a distance is measured between a first point on the sidewall corresponding to an upper surface of the buried layer and a second point on the sidewall corresponding to a lower surface of the buried layer. The thickness of the buried layer is determined using the known slope angle of the sidewall, the distance, and the angle relative to the surface of the sample.
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公开(公告)号：US20220415610A1
公开(公告)日：2022-12-29
申请号：US17357948
申请日：2021-06-24
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas
IPC: H01J37/28 , H01J37/20 , H01J37/22 , H01J37/304 , H01J37/305 , H01J37/26
Abstract: A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
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公开(公告)号：US11728126B2
公开(公告)日：2023-08-15
申请号：US17357948
申请日：2021-06-24
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas
IPC: H01J37/305 , H01J37/28 , H01J37/22 , H01J37/26
CPC classification number: H01J37/222 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/2555 , H01J2237/2561 , H01J2237/2807 , H01J2237/31749
Abstract: A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
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公开(公告)号：US11625820B2
公开(公告)日：2023-04-11
申请号：US16885763
申请日：2020-05-28
Applicant: Applied Materials Israel Ltd.
Inventor： Ilya Blayvas
Abstract: A method, a non-transitory computer readable medium, and a system for evaluating an inspection algorithm for inspecting a semiconductor specimen.
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Patent Agency Ranking
公开(公告)号：US20210374935A1
公开(公告)日：2021-12-02
申请号：US16885763
申请日：2020-05-28
Applicant: Applied Materials Israel Ltd.
Inventor： Ilya Blayvas
Abstract: A method, a non-transitory computer readable medium, and a system for evaluating an inspection algorithm for inspecting a semiconductor specimen.
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公开(公告)号：US20210335571A1
公开(公告)日：2021-10-28
申请号：US16859974
申请日：2020-04-27
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas , Gal Bruner , Yehuda Zur , Alexander Mairov , Ron Davidescu , Kfir Dotan , Alon Litman
IPC: H01J37/305 , G01N1/32
Abstract: A method of evaluating a region of a sample that includes alternating layers of different material. The method includes milling, with a focused ion beam, a portion of the sample that includes the alternating layers of different material; reducing the milling area; and repeating the milling and reducing steps multiple times during the delayering process until the process is complete.
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公开(公告)号：US12272518B2
公开(公告)日：2025-04-08
申请号：US18213220
申请日：2023-06-22
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas
IPC: H01J37/28 , H01J37/22 , H01J37/26 , H01J37/305
Abstract: A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column; generating an initial three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images on top of each other in an order in which they were acquired; identifying distortions within the initial three-dimensional data cube; and creating an updated three-dimensional data cube that includes corrections for the identified distortions.
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公开(公告)号：US12033831B2
公开(公告)日：2024-07-09
申请号：US17408876
申请日：2021-08-23
Applicant: Applied Materials Israel Ltd.
Inventor： Ilya Blayvas , Yehuda Zur
IPC: H01J37/302 , H01J37/28 , H01J37/305 , H01L21/66
CPC classification number: H01J37/3023 , H01J37/28 , H01J37/305 , H01L22/12 , H01J2237/24578 , H01J2237/24585 , H01J2237/2814 , H01J2237/31749
Abstract: Analyzing a sidewall of a hole milled in a sample to determine thickness of a buried layer includes milling the hole in the sample using a charged particle beam of a focused ion beam (FIB) column to expose the buried layer along the sidewall of the hole. After milling, the sidewall of the hole has a known slope angle. From a perspective relative to a surface of the sample, a distance is measured between a first point on the sidewall corresponding to an upper surface of the buried layer and a second point on the sidewall corresponding to a lower surface of the buried layer. The thickness of the buried layer is determined using the known slope angle of the sidewall, the distance, and the angle relative to the surface of the sample.
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公开(公告)号：US11315754B2
公开(公告)日：2022-04-26
申请号：US16859974
申请日：2020-04-27
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ilya Blayvas , Gal Bruner , Yehuda Zur , Alexander Mairov , Ron Davidescu , Kfir Dotan , Alon Litman
IPC: G01N1/32 , H01J37/305
Abstract: A method of evaluating a region of a sample that includes alternating layers of different material. The method includes milling, with a focused ion beam, a portion of the sample that includes the alternating layers of different material; reducing the milling area; and repeating the milling and reducing steps multiple times during the delayering process until the process is complete.
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