-
公开(公告)号：US10468230B2
公开(公告)日：2019-11-05
申请号：US15949166
申请日：2018-04-10
Inventor： Eugene M. Lavely , Adam J. Marcinuk , Amrita V. Masurkar , Paul R. Moffitt , Michael S. Richman , Jonathan R. Takahashi , Jonathan K. Tong , Chris L. Willis
Abstract: A system and method for imaging a sample having a complex structure (such as an integrated circuit) implements two modes of operation utilizing a common electron beam generator that produces an electron beam within a chamber. In the first mode, the electron beam interacts directly with the sample, and backscattered electrons, secondary electrons, and backward propagating fluorescent X-rays are measured. In the second mode, the electron beam interrogates the sample via X-rays generated by the electron beam within a target that is positioned between the electron beam generator and the sample. Transmitted X-rays are measured by a detector within the vacuum chamber. The sample is placed on a movable platform to precisely position the sample with respect to the electron beam. Interferometric and/or capacitive sensors are used to measure the position of the sample and movable platform to provide high accuracy metadata for performing high resolution three-dimensional sample reconstruction.
-
Patent Agency Ranking
公开(公告)号：US20220137401A1
公开(公告)日：2022-05-05
申请号：US17090317
申请日：2020-11-05
Inventor： Michael E. Knotts , Adam J. Marcinuk , Chris L. Willis
Abstract: A multi-axis rotary actuator includes a payload support configured to be rotatable about a first axis, a disk surrounding at least a portion of the payload support, and an elevation wheel rotatably coupled to the payload support. The disk is configured to be rotatable about the first axis. The elevation wheel is configured to be in contact with the disk and to be rotatable about a second axis perpendicular to the first axis. The actuator can include a mirror or other device coupled to the elevation wheel. The mirror or other device is configured to be rotatable about the first axis and the second axis as the payload support and the elevation wheel rotate about the first axis and the second axis, respectively.
-
公开(公告)号：US10535495B2
公开(公告)日：2020-01-14
申请号：US15949168
申请日：2018-04-10
Inventor： Chris L. Willis , Eugene M. Lavely , Adam J. Marcinuk , Paul R. Moffitt , Jonathan R. Takahashi
IPC: H01J37/20 , H01J37/24 , H01J37/244
Abstract: A system and method for imaging a sample having a complex structure (such as an integrated circuit). The sample is placed on a motion system that moves the sample with respect to an electron beam generator that is used in imaging the sample. The motion system affords thirteen degrees-of-freedom for movement of the sample, by providing a rotation stage, a fine 6-axis piezoelectric-driven stage, and a coarse 6-axis hexapod stage. Various detectors gather information to image the sample. Interferometric and/or capacitive sensors are used to measure the position of the sample and motion system.
-
公开(公告)号：US11747613B2
公开(公告)日：2023-09-05
申请号：US17090317
申请日：2020-11-05
Inventor： Michael E. Knotts , Adam J. Marcinuk , Chris L. Willis
CPC classification number: G02B26/105 , F16H48/00 , F16M11/00 , G02B7/1821
Abstract: A multi-axis rotary actuator includes a payload support configured to be rotatable about a first axis, a disk surrounding at least a portion of the payload support, and an elevation wheel rotatably coupled to the payload support. The disk is configured to be rotatable about the first axis. The elevation wheel is configured to be in contact with the disk and to be rotatable about a second axis perpendicular to the first axis. The actuator can include a mirror or other device coupled to the elevation wheel. The mirror or other device is configured to be rotatable about the first axis and the second axis as the payload support and the elevation wheel rotate about the first axis and the second axis, respectively.
-
公开(公告)号：US20190311881A1
公开(公告)日：2019-10-10
申请号：US15949166
申请日：2018-04-10
Inventor： Eugene M. Lavely , Adam J. Marcinuk , Amrita V. Masurkar , Paul R. Moffitt , Michael S. Richman , Jonathan R. Takahashi , Jonathan K. Tong , Chris L. Willis
IPC: H01J37/244 , H01J37/20 , H01J37/28 , H01J37/22
Abstract: A system and method for imaging a sample having a complex structure (such as an integrated circuit) implements two modes of operation utilizing a common electron beam generator that produces an electron beam within a chamber. In the first mode, the electron beam interacts directly with the sample, and backscattered electrons, secondary electrons, and backward propagating fluorescent X-rays are measured. In the second mode, the electron beam interrogates the sample via X-rays generated by the electron beam within a target that is positioned between the electron beam generator and the sample. Transmitted X-rays are measured by a detector within the vacuum chamber. The sample is placed on a movable platform to precisely position the sample with respect to the electron beam. Interferometric and/or capacitive sensors are used to measure the position of the sample and movable platform to provide high accuracy metadata for performing high resolution three-dimensional sample reconstruction.
-
公开(公告)号：US20190311877A1
公开(公告)日：2019-10-10
申请号：US15949168
申请日：2018-04-10
Inventor： Chris L. Willis , Eugene M. Lavely , Adam J. Marcinuk , Paul R. Moffitt , Jonathan R. Takahashi
IPC: H01J37/20 , H01J37/244
Abstract: A system and method for imaging a sample having a complex structure (such as an integrated circuit). The sample is placed on a motion system that moves the sample with respect to an electron beam generator that is used in imaging the sample. The motion system affords thirteen degrees-of-freedom for movement of the sample, by providing a rotation stage, a fine 6-axis piezoelectric-driven stage, and a coarse 6-axis hexapod stage. Various detectors gather information to image the sample. Interferometric and/or capacitive sensors are used to measure the position of the sample and motion system.
-
-
-
-
-
Search Results
6
records
(took 0.018 seconds)
