公开(公告)号：US09244208B2

公开(公告)日：2016-01-26

申请号：US14094804

申请日：2013-12-03

Applicant: BIOZOOM TECHNOLOGIES, INC.

Inventor： Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

IPC: G01B9/02 ,  G02B5/28 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G02B5/20 ,  H01L27/146 ,  A61B5/00 ,  G01J3/44 ,  G01J3/51 ,  G03F7/00

CPC classification number: G02B5/284 ,  A61B5/0075 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/0259 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/4406 ,  G01J3/51 ,  G02B5/201 ,  G02B5/288 ,  G03F7/0002 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T29/49826

Abstract: An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR mirror and the second DBR mirror. Each of the first DBR mirror, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process.

Abstract translation: 光学滤波器阵列包括可透过要检测的电磁辐射的基底，布置在基底上的第一DBR镜，布置在第一DBR镜上方的第二DBR微镜，以及多个空腔部分。 空腔部分具有不同的各自的光学长度，并且被布置成在第一DBR反射镜和第二DBR反射镜之间在空间上彼此分离。 第一DBR镜，第二DBR镜和具有不同光学长度的多个空腔部分中的每一个形成过滤器的过滤器元件。 滤波器以由第一DBR镜和第二DBR镜确定的阻带反射。 每个滤光元件具有由其位于阻挡带内部的相应空腔部分的光学长度确定的至少一个窄透射带。 通过纳米压印工艺提供不同厚度的空腔部分。