公开(公告)号：US09890255B2

公开(公告)日：2018-02-13

申请号：US14429512

申请日：2013-07-15

Applicant: CHEIL INDUSTRIES INC.

Inventor： Hyun-Ji Song ,  Eun-Su Park ,  Sang-Hak Lim ,  Taek-Soo Kwak ,  Go-Un Kim ,  Mi-Young Kim ,  Bo-Sun Kim ,  Bong-Hwan Kim ,  Yoong-Hee Na ,  Jin-Hee Bae ,  Jin-Woo Seo ,  Hui-Chan Yun ,  Han-Song Lee ,  Jong-Dae Jeon ,  Kwen-Woo Han ,  Seung-Hee Hong ,  Byeong-Gyu Hwang

IPC: C08G77/54 ,  H01B3/46 ,  C09D183/16 ,  H01B3/30 ,  H01B3/02 ,  H01L21/02 ,  C09D183/02 ,  C09D183/14 ,  C08G77/60 ,  C08G77/62

CPC classification number: C08G77/54 ,  C08G77/60 ,  C08G77/62 ,  C09D183/02 ,  C09D183/14 ,  C09D183/16 ,  H01B3/02 ,  H01B3/303 ,  H01B3/46 ,  H01L21/02164 ,  H01L21/02211 ,  H01L21/02222 ,  H01L21/02255 ,  H01L21/0229 ,  H01L21/02326

Abstract: Disclosed is modified hydrogenated polysiloxazane prepared by reacting hydrogenated polysiloxazane with a silane compound selected from polysilane, polycyclosilane, and a silane oligomer. The modified hydrogenated polysiloxazane has a small mole ratio of nitrogen atoms relative to silicon atoms and may remarkably deteriorate a film shrinkage ratio when included in a composition for forming a silica-based insulation layer to form a silica-based insulation layer.

公开(公告)号：US20150225508A1

公开(公告)日：2015-08-13

申请号：US14429512

申请日：2013-07-15

Applicant: CHEIL INDUSTRIES INC.

Inventor： Hyun-Ji Song ,  Eun-Su Park ,  Sang-Hak Lim ,  Taek-Soo Kwak ,  Go-Un Kim ,  Mi-Young Kim ,  Bo-Sun Kim ,  Bong-Hwan Kim ,  Yoong-Hee Na ,  Jin-Hee Bae ,  Jin-Woo Seo ,  Hui-Chan Yun ,  Han-Song Lee ,  Jong-Dae Jeon ,  Kwen-Woo Han ,  Seung-Hee Hong ,  Byeong-Gyu Hwang

IPC: C08G77/54 ,  H01L21/02 ,  H01B3/02

CPC classification number: C08G77/54 ,  C08G77/60 ,  C08G77/62 ,  C09D183/02 ,  C09D183/14 ,  C09D183/16 ,  H01B3/02 ,  H01B3/303 ,  H01B3/46 ,  H01L21/02164 ,  H01L21/02211 ,  H01L21/02222 ,  H01L21/02255 ,  H01L21/0229 ,  H01L21/02326

Abstract: Disclosed is modified hydrogenated polysiloxazane prepared by reacting hydrogenated polysiloxazane with a silane compound selected from polysilane, polycyclosilane, and a silane oligomer. The modified hydrogenated polysiloxazane has a small mole ratio of nitrogen atoms relative to silicon atoms and may remarkably deteriorate a film shrinkage ratio when included in a composition for forming a silica-based insulation layer to form a silica-based insulation layer.

Abstract translation: 公开了通过氢化聚硅氧氮烷与选自聚硅烷，聚环硅烷和硅烷低聚物的硅烷化合物反应制备的改性氢化聚硅氧氮烷。 改性氢化聚硅氧氮烷相对于硅原子具有小的氮原子摩尔比，并且当包含在用于形成二氧化硅基绝缘层的二氧化硅基绝缘层形成用组合物中时，膜收缩率显着劣化。