Four-way valve, valve unit, temperature control system

    公开(公告)号:US12188566B2

    公开(公告)日:2025-01-07

    申请号:US18446479

    申请日:2023-08-09

    Abstract: A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

    Electromagnetic actuator
    2.
    发明授权

    公开(公告)号:US11268628B2

    公开(公告)日:2022-03-08

    申请号:US16905632

    申请日:2020-06-18

    Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.

    Liquid control apparatus
    4.
    发明授权
    Liquid control apparatus 有权
    液体控制装置

    公开(公告)号:US09266130B2

    公开(公告)日:2016-02-23

    申请号:US13752232

    申请日:2013-01-28

    CPC classification number: B05B9/03 B01B1/005 B01D1/14

    Abstract: A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 woven in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.

    Abstract translation: 液体控制装置30控制液体的扩散模式。 液体控制装置30包括具有供给液体的上表面31c的主体31和网状47,网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。

    Linear actuator and vacuum control device
    10.
    发明授权
    Linear actuator and vacuum control device 有权
    线性致动器和真空控制装置

    公开(公告)号:US09234586B2

    公开(公告)日:2016-01-12

    申请号:US14519426

    申请日:2014-10-21

    Abstract: A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.

    Abstract translation: 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件,构造成使移动构件往复移动的驱动部分,覆盖移动构件的盖 以及滑动密封部分,其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围,移动部件移动到真空室的内部和外部,同时移动部件通过驱动部分往复运动,并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。

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