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公开(公告)号:US20230114881A1
公开(公告)日:2023-04-13
申请号:US17938838
申请日:2022-10-07
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sam A. Keo , Arezou Khoshakhlagh , Alexander Soibel , Sarath D. Gunapala
IPC: H01L27/146
Abstract: Disclosed herein is an infrared detector. The detector includes a plurality of pixels. Each pixel includes an n-type semiconductor top contact layer, a p-type semiconductor layer electrically connected to the n-type top contact layer to form a top p-n junction, a unipolar electron barrier electrically connected to the p-type semiconductor layer, a bottom absorber, and an n-type semiconductor bottom contact layer electrically connected to the bottom absorber. The unipolar electron barrier is positioned between the p-type semiconductor layer and the bottom absorber.
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公开(公告)号:US08928029B2
公开(公告)日:2015-01-06
申请号:US13712122
申请日:2012-12-12
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sarath D. Gunapala , Alexander Soibel , Jean Nguyen , Arezou Khoshakhlagh
IPC: H01L29/74 , H01L31/02 , H01L31/109
CPC classification number: H01L31/109 , H01L31/02016 , H01L31/02019 , H01L31/101 , H01L31/1013
Abstract: Bias-switchable dual-band infrared detectors and methods of manufacturing such detectors are provided. The infrared detectors are based on a back-to-back heterojunction diode design, where the detector structure consists of, sequentially, a top contact layer, a unipolar hole barrier layer, an absorber layer, a unipolar electron barrier, a second absorber, a second unipolar hole barrier, and a bottom contact layer. In addition, by substantially reducing the width of one of the absorber layers, a single-band infrared detector can also be formed.
Abstract translation: 提供了可偏压切换的双频带红外探测器和制造这种探测器的方法。 红外检测器基于背对背异质结二极管设计,其中检测器结构依次由顶部接触层,单极性空穴阻挡层,吸收层,单极电子势垒,第二吸收体, 第二单极孔阻挡层和底部接触层。 此外,通过显着减小吸收层之一的宽度,也可以形成单频带红外检测器。
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公开(公告)号:US20150145091A1
公开(公告)日:2015-05-28
申请号:US14516359
申请日:2014-10-16
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sarath D. Gunapala , Alexander Soibel , Jean Nguyen , Arezou Khoshakhlagh
IPC: H01L31/109 , H01L31/02
CPC classification number: H01L31/109 , H01L31/02016 , H01L31/02019 , H01L31/101 , H01L31/1013
Abstract: Bias-switchable dual-band infrared detectors and methods of manufacturing such detectors are provided. The infrared detectors are based on a back-to-back heterojunction diode design, where the detector structure consists of, sequentially, a top contact layer, a unipolar hole barrier layer, an absorber layer, a unipolar electron barrier, a second absorber, a second unipolar hole barrier, and a bottom contact layer. In addition, by substantially reducing the width of one of the absorber layers, a single-band infrared detector can also be formed.
Abstract translation: 提供了可偏压切换的双频带红外探测器和制造这种探测器的方法。 红外检测器基于背对背异质结二极管设计,其中检测器结构依次由顶部接触层,单极性空穴阻挡层,吸收层,单极电子势垒,第二吸收体, 第二单极孔阻挡层和底部接触层。 此外,通过显着减小吸收层之一的宽度,也可以形成单频带红外检测器。
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公开(公告)号:US20130146998A1
公开(公告)日:2013-06-13
申请号:US13712122
申请日:2012-12-12
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sarath D. Gunapala , Alexander Soibel , Jean Nguyen , Arezo Khoshakhlagh
IPC: H01L31/02
CPC classification number: H01L31/109 , H01L31/02016 , H01L31/02019 , H01L31/101 , H01L31/1013
Abstract: Bias-switchable dual-band infrared detectors and methods of manufacturing such detectors are provided. The infrared detectors are based on a back-to-back heterojunction diode design, where the detector structure consists of, sequentially, a top contact layer, a unipolar hole barrier layer, an absorber layer, a unipolar electron barrier, a second absorber, a second unipolar hole barrier, and a bottom contact layer. In addition, by substantially reducing the width of one of the absorber layers, a single-band infrared detector can also be formed.
Abstract translation: 提供了可偏压切换的双频带红外探测器和制造这种探测器的方法。 红外检测器基于背对背异质结二极管设计,其中检测器结构依次由顶部接触层,单极性空穴阻挡层,吸收层,单极电子势垒,第二吸收体, 第二单极孔阻挡层和底部接触层。 此外,通过显着减小吸收层之一的宽度,也可以形成单频带红外检测器。
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公开(公告)号:US20190013427A1
公开(公告)日:2019-01-10
申请号:US15530294
申请日:2016-12-12
Applicant: California Institute of Technology
Inventor: David Z. Ting , Alexander Soibel , Arezou Khoshakhlagh , Sarath D. Gunapala
IPC: H01L31/0352 , H01L31/102 , H01L27/146
Abstract: Barrier infrared detectors having structures configured to enhance the quantum efficiency, and methods of their manufacture are provided. In particular, device structures for constructing high-performance barrier infrared detectors using novel combinations of p-type and n-type absorber regions and contact regions are provided. The infrared detectors generally incorporate a “p+Bpnn+” structure. The detectors generally comprise, in sequence, a highly p-doped contact layer “p+”, an electron unipolar barrier “B”, a p-type absorber section “p”, and n-type absorber section “n”, and a highly n-doped contact layer “n+”.
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公开(公告)号:US09831372B2
公开(公告)日:2017-11-28
申请号:US15154704
申请日:2016-05-13
Applicant: California Institute of Technology
Inventor: Arezou Khoshakhlagh , David Z. Ting , Sarath D. Gunapala
IPC: H01L27/148 , H01L31/09 , H01L31/0304 , H01L31/0352
CPC classification number: H01L31/09 , H01L31/03042 , H01L31/03046 , H01L31/035236 , H01L31/105
Abstract: Barrier infrared detectors configured to operate in the long-wave (LW) infrared regime are provided. The barrier infrared detector systems may be configured as pin, pbp, barrier and double heterostructrure infrared detectors incorporating optimized p-doped absorbers capable of taking advantage of high mobility (electron) minority carriers. The absorber may be a p-doped Ga-free InAs/InAsSb material. The p-doping may be accomplished by optimizing the Be doping levels used in the absorber material. The barrier infrared detectors may incorporate individual superlattice layers having narrower periodicity and optimization of Sb composition to achieve cutoff wavelengths of ˜10 μm.
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公开(公告)号:US09647164B2
公开(公告)日:2017-05-09
申请号:US14516359
申请日:2014-10-16
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sarath D. Gunapala , Alexander Soibel , Jean Nguyen , Arezou Khoshakhlagh
IPC: H01L31/109 , H01L31/02 , H01L31/101
CPC classification number: H01L31/109 , H01L31/02016 , H01L31/02019 , H01L31/101 , H01L31/1013
Abstract: Bias-switchable dual-band infrared detectors and methods of manufacturing such detectors are provided. The infrared detectors are based on a back-to-back heterojunction diode design, where the detector structure consists of, sequentially, a top contact layer, a unipolar hole barrier layer, an absorber layer, a unipolar electron barrier, a second absorber, a second unipolar hole barrier, and a bottom contact layer. In addition, by substantially reducing the width of one of the absorber layers, a single-band infrared detector can also be formed.
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8.
公开(公告)号:US20160336476A1
公开(公告)日:2016-11-17
申请号:US15154704
申请日:2016-05-13
Applicant: California Institute of Technology
Inventor: Arezou Khoshakhlagh , David Z. Ting , Sarath D. Gunapala
IPC: H01L31/09 , H01L31/0352 , H01L31/0304
CPC classification number: H01L31/09 , H01L31/03042 , H01L31/03046 , H01L31/035236 , H01L31/105
Abstract: Barrier infrared detectors configured to operate in the long-wave (LW) infrared regime are provided. The barrier infrared detector systems may be configured as pin, pbp, barrier and double heterostructrure infrared detectors incorporating optimized p-doped absorbers capable of taking advantage of high mobility (electron) minority carriers. The absorber may be a p-doped Ga-free InAs/InAsSb material. The p-doping may be accomplished by optimizing the Be doping levels used in the absorber material. The barrier infrared detectors may incorporate individual superlattice layers having narrower periodicity and optimization of Sb composition to achieve cutoff wavelengths of ˜10 μm.
Abstract translation: 提供了配置为在长波(LW)红外区域中工作的阻挡红外探测器。 屏障红外检测器系统可以被配置为引脚,pbp,势垒和双异质结构红外检测器,其结合优化的p掺杂吸收剂,其能够利用高迁移率(电子)少数载流子。 吸收体可以是p掺杂的不含Ga的InAs / InAsSb材料。 p掺杂可以通过优化吸收材料中使用的Be掺杂水平来实现。 屏障红外检测器可以包含具有较窄周期性的单个超晶格层和Sb组分的优化以实现〜10μm的截止波长。
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9.
公开(公告)号:US20140225064A1
公开(公告)日:2014-08-14
申请号:US14178133
申请日:2014-02-11
Applicant: California Institute of Technology
Inventor: Arezou Khoshakhlagh , David Z. Ting , Sarath D. Gunapala , Cory J. Hill
IPC: H01L31/0352 , H01L31/18 , H01L31/0304
CPC classification number: H01L31/035236 , H01L21/0237 , H01L21/02395 , H01L21/02463 , H01L21/02466 , H01L21/02507 , H01L21/02546 , H01L21/02549 , H01L31/03046 , H01L31/101 , H01L31/1844 , H01L31/1852 , Y02E10/544
Abstract: Systems and methods of implementing barrier infrared detectors on lattice mismatched substrates are provided. The barrier infrared detector systems combine an active detector structure (e.g., contact/barrier/absorber pairs) with a non-lattice matched substrate through a multi-layered transitional structure that forms a virtual substrate that can be strain balanced with the detector structure. The transitional metamorphic layer may include one or both of at least one graded metamorphic buffer layer or interfacial misfit array (IMF). A further interfacial layer may be interposed within the transitional structure, in some embodiments this interfacial layer includes at least one layer of AlSb.
Abstract translation: 提供了在晶格失配衬底上实施屏障红外探测器的系统和方法。 屏障红外探测器系统通过形成可与检测器结构应变平衡的虚拟衬底的多层过渡结构将活性检测器结构(例如,接触/阻挡/吸收体对)与非晶格匹配衬底组合。 过渡变质层可以包括至少一个梯度变质缓冲层或界面失配阵列(IMF)中的一个或两个。 在过渡结构中可以插入另外的界面层,在一些实施例中,该界面层包括至少一层AlSb。
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公开(公告)号:US12300712B2
公开(公告)日:2025-05-13
申请号:US17938838
申请日:2022-10-07
Applicant: California Institute of Technology
Inventor: David Z. Ting , Sam A. Keo , Arezou Khoshakhlagh , Alexander Soibel , Sarath D. Gunapala
IPC: H01L27/146
Abstract: Disclosed herein is an infrared detector. The detector includes a plurality of pixels. Each pixel includes an n-type semiconductor top contact layer, a p-type semiconductor layer electrically connected to the n-type top contact layer to form a top p-n junction, a unipolar electron barrier electrically connected to the p-type semiconductor layer, a bottom absorber, and an n-type semiconductor bottom contact layer electrically connected to the bottom absorber. The unipolar electron barrier is positioned between the p-type semiconductor layer and the bottom absorber.
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