公开(公告)号：US09673019B2

公开(公告)日：2017-06-06

申请号：US14859391

申请日：2015-09-21

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amir Weingarten ,  Semyon Shofman

IPC: H01J37/00 ,  H01J37/147 ,  H01J37/285 ,  H01J37/08 ,  H01J37/244 ,  H01J37/317

CPC classification number: H01J37/1472 ,  H01J37/08 ,  H01J37/244 ,  H01J37/285 ,  H01J37/317 ,  H01J2237/15 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/31749

Abstract: An electron detection system for detecting secondary electrons emitted from a sample irradiated by a Focused Ion Beam (FIB). The FIB emanates from a FIB column and travels along a beam axis within a beam region, which extends from the FIB column to the sample. The system comprises an electron detector configured for detecting the secondary electrons, and a deflecting field configured to deflect a trajectory of the secondary electrons, which were propagating towards the FIB column, to propel away from the beam axis and towards the electron detector. The deflecting field may be configured to divert the trajectory of secondary electrons while the secondary electrons are generally within the beam region.

公开(公告)号：US11493383B2

公开(公告)日：2022-11-08

申请号：US16792263

申请日：2020-02-16

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Semyon Shofman ,  Alexander Kadyshevitch

IPC: G01J1/44 ,  H01J43/14 ,  H01J49/02 ,  H01J43/18

Abstract: A magnetic photomultiplier tube (PMT) system, including a PMT. The PMT including a photocathode for converting an impinging photon to a photoelectron, an anode, and at least two or a series of oppositely facing pairs of dynodes, wherein each pair is spaced apart from an adjacent pair, a first electric field being generated intermediate at least one pair of oppositely facing dynodes and a second electric field generated intermediate at least one adjacent pairs of dynodes. The PMT system includes a magnetic field generated by a magnetic system, the PMT being positioned within the magnetic field.

公开(公告)号：US10236155B2

公开(公告)日：2019-03-19

申请号：US15253905

申请日：2016-09-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shofman ,  Silviu Reinhorn

IPC: H01J37/24 ,  H01J37/244

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, comprising a scintillator including a scintillator layer, the scintillator layer emitting light signals corresponding to impingement of electrons thereupon, a light guide plate coupled to the scintillator layer and comprising a peripheral surface, and a single or plurality of silicon photomultiplier devices positioned upon the peripheral surface and arranged perpendicularly or obliquely relative to the scintillating surface, the silicon photomultiplier device being configured to yield an electrical signal from an electron impinging upon the scintillator layer.

公开(公告)号：US11656371B1

公开(公告)日：2023-05-23

申请号：US17342636

申请日：2021-06-09

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Jonathan Garel ,  Amit Weingarten ,  Semyon Shofman ,  Alexander Kadyshevitch

IPC: G01T1/20

CPC classification number: G01T1/20185

Abstract: An ion detection system for detecting incident ions including an ion-to-electron converter for converting incident ions to secondary electrons, an accelerating assembly including at least one of an electric field and a magnetic field for acceleration and transfer of the secondary electrons to a scintillator, the scintillator for converting the accelerated secondary electrons to an initial flux of photons, a photon channeling assembly including a first photon channel and a second photon channel, wherein the photon channeling assembly is configured for separating the initial flux of photons into at least a first photon flux channeled into the first photon channel and a second photon flux channeled into the second photon channel, and at least one photodetector for detecting at least one of a first optical signal generated at the first photon channel, and a second optical signal generated at the second photon channel.

公开(公告)号：US11587776B1

公开(公告)日：2023-02-21

申请号：US16888850

申请日：2020-06-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Semyon Shofman ,  Alexander Kadyshevitch

IPC: H01J49/02 ,  H01J49/20 ,  H01J49/40

Abstract: An ion detection system comprising an upper plate configured for propagation of ions therethrough, a lower plate comprising a converter configured for converting ions impinging thereon to secondary electrons, a secondary electron multiplication assembly configured for receiving the secondary electrons and comprising at least one or optionally a series of oppositely facing pairs of dynodes, wherein in the optional series of oppositely facing pairs of dynodes, each pair is spaced apart from an adjacent pair, and wherein a first electric field is created in between the oppositely facing pair of dynodes. A magnetic system is provided for generating a magnetic field.

公开(公告)号：US11536604B1

公开(公告)日：2022-12-27

申请号：US16888856

申请日：2020-06-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Jonathan Garel ,  Amit Weingarten ,  Semyon Shofman ,  Alexander Kadyshevitch

IPC: G01J1/44 ,  H01J43/08 ,  H01J43/28 ,  H01J37/244 ,  H01J37/28

Abstract: An in-vacuum light sensor system, including a light sensor assembly comprising a photocathode configured for converting an impinging photon to a photoelectron, a semiconductor diode configured for multiplying the photoelectron impinging thereon, and a housing including vacuum-compatible materials configured for being placed in a vacuum chamber. The housing is configured for housing the photocathode and the semiconductor diode and for propagation of the photoelectron from the photocathode to the semiconductor diode. An electrical biasing subassembly is configured for electrically biasing at least the photocathode and the semiconductor diode, and the vacuum chamber is configured for positioning the light sensor apparatus therein.