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公开(公告)号：US09586188B2
公开(公告)日：2017-03-07
申请号：US14703467
申请日：2015-05-04
Applicant: ENTEGRIS, INC.
Inventor： Steven M. Lurcott , John E. Q. Hughes , Peter Wrschka , Thomas H. Baum , Donald D. Ware , Peng Zou
CPC classification number: B01F15/0203 , B01F3/0861 , B01F15/0258 , B01F2003/0896 , B65B3/14 , B67D7/025 , B67D7/0261 , B67D7/0283 , B67D7/741
Abstract: Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
Abstract translation: 公开了用于将含流体的进料传送到加工设备的系统和方法。 基于衬管的压力分配容器通过在衬套和外包装之间施加真空而进行填充。 不同校准流量范围的多个进料流量控制器可以针对单个进料进行选择性并行操作。 用于放大的进料混合和测试可以通过由多个基于衬管的压力分配容器供应的进料进行。 重量分析系统可用于测定多组分溶液或混合物中至少一种组分的浓度。
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公开(公告)号：US09695985B2
公开(公告)日：2017-07-04
申请号：US14380646
申请日：2013-02-22
Applicant: ENTEGRIS, INC.
Inventor： Jordan Hodges , Richard D. Chism , Mitchell W. McFeron , Donald D. Ware , Glenn M. Tom
CPC classification number: F17C9/00 , B67D7/00 , B67D7/02 , B67D7/025 , B67D7/0272 , B67D7/0283 , F17C7/00
Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
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公开(公告)号：US10676341B2
公开(公告)日：2020-06-09
申请号：US15897206
申请日：2018-02-15
Applicant: Entegris, Inc.
Inventor： Glenn M. Tom , Joseph Patrick Menning , Matthew Kusz , Amy Koland , Donald D. Ware , Richard D. Chism
Abstract: A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel.
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Patent Agency Ranking
4.发明申请公开(公告)号：US20180029865A1
公开(公告)日：2018-02-01
申请号：US15728076
申请日：2017-10-09
Applicant: Entegris, Inc.
Inventor： Donald D. Ware , Glenn M. Tom , Amy Koland , Dale Gene Mowrey , Bruce Musolf
Abstract: A liner-based pressure dispensing container includes a connector-mounted probe arranged to seat a dip tube against an inner surface of a liner fitment for sealing utility. A dip tube and probe may include increased and/or matched flow area. A reverse flow prevention element can be arranged proximate to a liquid extraction opening to inhibit reverse flow of liquid from a dip tube into a container. A liner-less container may include a reduce diameter lower portion arranged to receive a dip tube, with at least one associated sensor to sense a condition indicative of depletion of liquid from the lower portion. A shipping cap can be included for removing headspace gas from the liner. In one embodiment, the shipping cap is suitable for direct connection to a dispensing process.
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公开(公告)号：US09802749B2
公开(公告)日：2017-10-31
申请号：US14688778
申请日：2015-04-16
Applicant: ENTEGRIS, INC
Inventor： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
CPC classification number: B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
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公开(公告)号：US20190039875A1
公开(公告)日：2019-02-07
申请号：US16153149
申请日：2018-10-05
Applicant: Entegris, Inc.
Inventor： Donald D. Ware , Amy Koland , Richard Lee Wilson
Abstract: A shippable liquid storage and dispensing apparatus includes a collapsible liner arranged within a container, with a dispense head coupled to the container, suitable for handling oxygen- and moisture-sensitive materials. The dispense head includes a pressurization gas passage, a pressurization gas valve, a liquid passage, a liquid valve, a liner gas passage, and a liner gas valve, wherein each valve may have an associated quick connect fitting. The dispense head remains attached to the container during inert gas purging, liner filling, container shipment, and liquid dispensing. Pressurized inert gas may be maintained in the liner overlying liquid-containing material during shipment of the coupled dispense head and container. The container may have an extended chime to provide a protective zone that contains the entirety of the dispense head.
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7.发明授权公开(公告)号：US09802807B2
公开(公告)日：2017-10-31
申请号：US15023231
申请日：2014-09-17
Applicant: ENTEGRIS, INC.
Inventor： Donald D. Ware , Glenn M. Tom , Amy Koland , Dale Gene Mowrey , Bruce Musolf
CPC classification number: B67D7/0261 , B65D25/14 , B65D77/06 , B65D81/3233 , B67D7/06
Abstract: A liner-based pressure dispensing container includes a connector-mounted probe arranged to seat a dip tube against an inner surface of a liner fitment for sealing utility. A dip tube and probe may include increased and/or matched flow area. A reverse flow prevention element can be arranged proximate to a liquid extraction opening to inhibit reverse flow of liquid from a dip tube into a container. A liner-less container may include a reduce diameter lower portion arranged to receive a dip tube, with at least one associated sensor to sense a condition indicative of depletion of liquid from the lower portion. A shipping cap can be included for removing headspace gas from the liner. In one embodiment, the shipping cap is suitable for direct connection to a dispensing process.
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公开(公告)号：USD766720S1
公开(公告)日：2016-09-20
申请号：US29534705
申请日：2015-07-30
Applicant: Entegris, Inc.
Designer： Donald D. Ware , Greg Nelson , Amy Koland , Bruce Musolf , Michael S. Allen , John Leys , James Linder , Richard L. Wilson , Royce Richter , Brenna Brosch
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