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公开(公告)号:US09694319B2
公开(公告)日:2017-07-04
申请号:US14377656
申请日:2013-02-08
Applicant: Entegris, Inc.
Inventor: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shogren , Daimhin Paul Murphy , Stenio da Costa Pereira
IPC: B01D53/86 , C01B21/04 , C01B3/56 , C01B3/58 , C01B23/00 , B01D53/28 , B01D53/75 , B01J29/14 , B01D53/26
CPC classification number: B01D53/869 , B01D53/261 , B01D53/28 , B01D53/75 , B01D53/8671 , B01D2253/108 , B01D2255/20753 , B01D2255/50 , B01D2256/10 , B01D2257/104 , B01D2257/80 , B01J29/143 , C01B3/56 , C01B3/58 , C01B21/0422 , C01B23/0026 , C01B2203/042 , C01B2203/0435 , C01B2203/0465 , C01B2203/0495 , C01B2203/146 , C01B2210/0031 , C01B2210/0034 , C01B2210/0042 , C01B2210/0045 , C01B2210/0062
Abstract: The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
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公开(公告)号:US11491435B2
公开(公告)日:2022-11-08
申请号:US16879444
申请日:2020-05-20
Applicant: ENTEGRIS, INC.
Inventor: Charles H. Applegarth , Rocky D. Gipson , Sarah Vogt , Joshua T. Cook , Matthew Browning , Marco Holzner
Abstract: Described are methods, devices, and systems useful for removing gaseous ammonia from a gas mixture at a pressure in an ambient pressure range by allowing the ammonia to adsorb onto a solid adsorbent, as well as related systems and methods.
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公开(公告)号:US20150056113A1
公开(公告)日:2015-02-26
申请号:US14377656
申请日:2013-02-08
Applicant: Entegris, Inc.
Inventor: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shogren , Daimhin Paul Murphy , Stenio da Costa Pereira
CPC classification number: B01D53/869 , B01D53/261 , B01D53/28 , B01D53/75 , B01D53/8671 , B01D2253/108 , B01D2255/20753 , B01D2255/50 , B01D2256/10 , B01D2257/104 , B01D2257/80 , B01J29/143 , C01B3/56 , C01B3/58 , C01B21/0422 , C01B23/0026 , C01B2203/042 , C01B2203/0435 , C01B2203/0465 , C01B2203/0495 , C01B2203/146 , C01B2210/0031 , C01B2210/0034 , C01B2210/0042 , C01B2210/0045 , C01B2210/0062
Abstract: The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
Abstract translation: 本发明涉及一种从惰性气体和还原性气体中除去水分和氧气的气体净化器,例如在低于大气压的压力下。 净化器可以将气流中的百万分之一的水分去除成小于每百兆体积百分之一百,并且具有低的压降和尖锐的穿透曲线。
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公开(公告)号:US11712653B2
公开(公告)日:2023-08-01
申请号:US16879514
申请日:2020-05-20
Applicant: ENTEGRIS, INC.
Inventor: Charles H. Applegarth , Rocky D. Gipson , Sarah Vogt , Joshua T. Cook , Matthew Browning , Marco Holzner
CPC classification number: B01D53/0438 , B01J20/08 , B01J20/103 , B01J20/20 , B01J20/2808 , B01J20/28061 , B01J20/28064 , B01J20/28066 , B01D2253/102 , B01D2253/104 , B01D2253/108 , B01D2253/306 , B01D2253/308 , B01D2257/706
Abstract: Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
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公开(公告)号:US12239935B2
公开(公告)日:2025-03-04
申请号:US18228298
申请日:2023-07-31
Applicant: ENTEGRIS, INC.
Inventor: Charles H. Applegarth , Rocky D. Gipson , Sarah Vogt , Joshua T. Cook , Matthew Browning , Marco Holzner
Abstract: Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
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公开(公告)号:US20230405510A1
公开(公告)日:2023-12-21
申请号:US18228298
申请日:2023-07-31
Applicant: ENTEGRIS, INC.
Inventor: Charles H. Applegarth , Rocky D. Gipson , Sarah Vogt , Joshua T. Cook , Matthew Browning , Marco Holzner
CPC classification number: B01D53/0438 , B01J20/28061 , B01J20/28064 , B01J20/28066 , B01J20/2808 , B01J20/20 , B01D2253/308 , B01J20/103 , B01D2257/706 , B01D2253/102 , B01D2253/108 , B01D2253/104 , B01D2253/306 , B01J20/08
Abstract: Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
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公开(公告)号:US20170333841A1
公开(公告)日:2017-11-23
申请号:US15614409
申请日:2017-06-05
Applicant: Entegris, Inc.
Inventor: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shorgen , Daimhin Paul Murphy , Stenio da Costa Pereira
IPC: B01D53/86 , B01D53/28 , B01D53/75 , C01B3/56 , C01B21/04 , C01B23/00 , C01B3/58 , B01J29/14 , B01D53/26
CPC classification number: B01D53/869 , B01D53/261 , B01D53/28 , B01D53/75 , B01D53/8671 , B01D2253/108 , B01D2255/20753 , B01D2255/50 , B01D2256/10 , B01D2257/104 , B01D2257/80 , B01J29/143 , C01B3/56 , C01B3/58 , C01B21/0422 , C01B23/0026 , C01B2203/042 , C01B2203/0435 , C01B2203/0465 , C01B2203/0495 , C01B2203/146 , C01B2210/0031 , C01B2210/0034 , C01B2210/0042 , C01B2210/0045 , C01B2210/0062
Abstract: The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
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公开(公告)号:US10245554B2
公开(公告)日:2019-04-02
申请号:US15614409
申请日:2017-06-05
Applicant: Entegris, Inc.
Inventor: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shorgen , Daimhin Paul Murphy , Stenio da Costa Pereira
IPC: B01D53/86 , C01B21/04 , C01B3/56 , C01B3/58 , C01B23/00 , B01D53/28 , B01D53/75 , B01J29/14 , B01D53/26
Abstract: The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
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