公开(公告)号：US09688863B2

公开(公告)日：2017-06-27

申请号：US15182729

申请日：2016-06-15

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D173/00 ,  C09D5/00 ,  G02B1/11 ,  C03C17/30 ,  C09D183/08 ,  G02B1/111 ,  G02B1/12 ,  H01L31/0216 ,  H01L31/18 ,  H01L33/00 ,  H01L33/44 ,  C09D183/04 ,  C09D7/12 ,  G02B5/02 ,  C08K3/36 ,  G02B1/14

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si—OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

公开(公告)号：US09314811B1

公开(公告)日：2016-04-19

申请号：US14709031

申请日：2015-05-11

Applicant: Enki Technology, Inc.

Inventor： Brenor L. Brophy ,  Peter R. Gonsalves ,  Sina Maghsoodi ,  Thomas E. Colson ,  Yu S. Yang ,  Ze'ev R. Abrams

IPC: B05C1/08 ,  B05C11/02 ,  B05C11/10 ,  B05C9/14

CPC classification number: B05C9/14 ,  B05C1/08 ,  B05C1/0817 ,  B05C1/083 ,  B05C1/0856 ,  B05C1/0865 ,  B05C5/007 ,  B05C5/0254 ,  B05C11/025 ,  B05C11/08 ,  B05C11/1005 ,  B05C11/1039 ,  C23C18/1254 ,  C23C18/22 ,  H01L31/18

Abstract: Disclosed is a coating apparatus including flow coating and roll-coating that may be used for uniform sol-gel coating of substrates such as glass, solar panels, windows or part of an electronic display. Also disclosed are methods for substrate preparation, flow coating and roll coating. Lastly, systems and methods for curing sol-gel coatings deposited onto the surface of glass substrates using high temperature air-knives, infrared emitters and direct heat applicators are disclosed.

Abstract translation: 公开了一种涂布设备，其包括流涂和辊涂，其可用于诸如玻璃，太阳能电池板，窗户或电子显示器的一部分的基底的均匀溶胶 - 凝胶涂覆。 还公开了用于底物制备，流涂和辊涂的方法。 最后，公开了使用高温空气刀，红外线发射器和直接加热器来固化沉积在玻璃基底表面上的溶胶 - 凝胶涂层的系统和方法。

公开(公告)号：US20160289457A1

公开(公告)日：2016-10-06

申请号：US15182729

申请日：2016-06-15

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D5/00 ,  G02B1/111 ,  C03C17/30 ,  C09D183/08 ,  C09D7/12

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si—OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

Abstract translation: 本文公开了基于聚倍半硅氧烷的抗反射涂层（ARC）组合物，制备方法和沉积在基材上的方法。 在一个实施方案中，本公开的聚倍半硅氧烷是以有机烷氧基硅烷的酸催化水解的两步法制备的，然后加入基于Si-NMR产生具有> 40mol％硅烷醇的硅氧烷聚合物的四氢化烷氧基硅烷。 这些高硅烷醇硅氧烷聚合物是稳定的，并且在室温下在极性有机溶剂中具有长的保质期。 还公开了由具有和不具有添加剂的这些组合物制成的低折射率ARC，例如致孔剂，模板，热自由基引发剂，光自由基引发剂，交联剂，Si-OH缩合催化剂和纳米填料。 还公开了用于将涂层施加到平面基板上的方法和装置，包括基板预处理工艺，涂覆工艺和涂层固化工艺，包括使用热风刀的皮肤固化。 还公开了用于高度可调，耐用，高耐磨性的功能化抗反射涂层的涂料组合物和制剂。

公开(公告)号：US09399720B2

公开(公告)日：2016-07-26

申请号：US14799507

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D183/00 ,  C09D173/00 ,  C09D5/00 ,  G02B1/11 ,  C03C17/30 ,  C09D183/08 ,  G02B1/111 ,  G02B1/12 ,  H01L31/0216 ,  H01L31/18 ,  H01L33/00 ,  H01L33/44

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si—OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

Abstract translation: 本文公开了基于聚倍半硅氧烷的抗反射涂层（ARC）组合物，制备方法和沉积在基材上的方法。 在一个实施方案中，本公开的聚倍半硅氧烷是以有机烷氧基硅烷的酸催化水解的两步法制备的，然后加入基于Si-NMR产生具有> 40mol％硅烷醇的硅氧烷聚合物的四氢化烷氧基硅烷。 这些高硅烷醇硅氧烷聚合物是稳定的，并且在室温下在极性有机溶剂中具有长的保质期。 还公开了由具有和不具有添加剂的这些组合物制成的低折射率ARC，例如致孔剂，模板，热自由基引发剂，光自由基引发剂，交联剂，Si-OH缩合催化剂和纳米填料。 还公开了用于将涂层施加到平面基板上的方法和装置，包括基板预处理工艺，涂覆工艺和涂层固化工艺，包括使用热风刀的皮肤固化。 还公开了用于高度可调，耐用，高耐磨性的功能化抗反射涂层的涂料组合物和制剂。

公开(公告)号：US09376593B2

公开(公告)日：2016-06-28

申请号：US14856601

申请日：2015-09-17

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Ze'ev R. Abrams ,  Peter R. Gonsalves

IPC: B32B17/06 ,  C03C17/30 ,  C09D183/04 ,  C03C17/34 ,  C09D5/00 ,  C09D7/12 ,  C03C17/00 ,  C09D5/16 ,  C09D183/08 ,  C08G77/24 ,  C08K3/36

CPC classification number: C09D183/04 ,  C03C17/007 ,  C03C17/3405 ,  C03C17/42 ,  C03C2203/27 ,  C03C2217/425 ,  C03C2217/73 ,  C03C2217/732 ,  C03C2217/76 ,  C03C2217/78 ,  C03C2218/113 ,  C03C2218/34 ,  C08G77/24 ,  C08K3/36 ,  C09D5/006 ,  C09D5/1662 ,  C09D7/61 ,  C09D7/63 ,  C09D183/08 ,  Y10T428/265 ,  Y10T428/31612

Abstract: Disclosed herein are coating materials and methods for applying a top-layer coating that is durable, abrasion resistant, highly transparent, hydrophobic, low-friction, moisture-sealing, anti-soiling, and self-cleaning to an existing conventional high temperature anti-reflective coating. The top coat imparts superior durability performance and new properties to the under-laying conventional high temperature anti-reflective coating without reducing the anti-reflectiveness of the coating. Methods and data for optimizing the relative thickness of the under-layer high temperature anti-reflective coating and the top-layer thickness for optimizing optical performance are also disclosed.

Abstract translation: 本文公开了用于将耐用，耐磨，高度透明，疏水，低摩擦，湿气密封，防污染和自清洁的顶层涂层施加到现有常规高温抗蚀剂的涂料和方法， 反光涂层。 顶层涂层赋予了低成本的常规高温抗反射涂层优异的耐久性能和新特性，而不会降低涂层的抗反射性。 还公开了用于优化底层高温抗反射涂层的相对厚度和优化光学性能的顶层厚度的方法和数据。

公开(公告)号：US09376589B2

公开(公告)日：2016-06-28

申请号：US14799479

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D173/00 ,  C09D5/00 ,  G02B1/11

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are single layer transparent coatings with an anti-reflective property, a hydrophobic property, and that are highly abrasion resistant. The single layer transparent coatings contain a plurality of oblate voids. At least 1% of the oblate voids are open to a surface of the single layer transparent coatings.

Abstract translation: 本文公开了具有抗反射性，疏水性，并且具有高耐磨性的单层透明涂层。 单层透明涂层含有多个扁圆形的空隙。 至少1％的扁圆形空隙对单层透明涂层的表面开放。

公开(公告)号：US20160032147A1

公开(公告)日：2016-02-04

申请号：US14799507

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D183/08 ,  G02B1/12 ,  C03C17/30 ,  H01L33/00 ,  H01L31/0216 ,  H01L31/18 ,  G02B1/111 ,  H01L33/44

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si—OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

公开(公告)号：US20160032141A1

公开(公告)日：2016-02-04

申请号：US14799479

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D173/00 ,  G02B1/11 ,  C09D5/00

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are single layer transparent coatings with an anti-reflective property, a hydrophobic property, and that are highly abrasion resistant. The single layer transparent coatings contain a plurality of oblate voids. At least 1% of the oblate voids are open to a surface of the single layer transparent coatings.

Abstract translation: 本文公开了具有抗反射性，疏水性，并且具有高耐磨性的单层透明涂层。 单层透明涂层含有多个扁圆形的空隙。 至少1％的扁圆形空隙对单层透明涂层的表面开放。

公开(公告)号：US20160002498A1

公开(公告)日：2016-01-07

申请号：US14856601

申请日：2015-09-17

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Ze'ev R. Abrams ,  Peter R. Gonsalves

IPC: C09D183/04 ,  C09D5/00 ,  C09D7/12 ,  C03C17/34

CPC classification number: C09D183/04 ,  C03C17/007 ,  C03C17/3405 ,  C03C17/42 ,  C03C2203/27 ,  C03C2217/425 ,  C03C2217/73 ,  C03C2217/732 ,  C03C2217/76 ,  C03C2217/78 ,  C03C2218/113 ,  C03C2218/34 ,  C08G77/24 ,  C08K3/36 ,  C09D5/006 ,  C09D5/1662 ,  C09D7/61 ,  C09D7/63 ,  C09D183/08 ,  Y10T428/265 ,  Y10T428/31612

Abstract: Disclosed herein are coating materials and methods for applying a top-layer coating that is durable, abrasion resistant, highly transparent, hydrophobic, low-friction, moisture-sealing, anti-soiling, and self-cleaning to an existing conventional high temperature anti-reflective coating. The top coat imparts superior durability performance and new properties to the under-laying conventional high temperature anti-reflective coating without reducing the anti-reflectiveness of the coating. Methods and data for optimizing the relative thickness of the under-layer high temperature anti-reflective coating and the top-layer thickness for optimizing optical performance are also disclosed.

Abstract translation: 本文公开了用于将耐用，耐磨，高度透明，疏水，低摩擦，湿气密封，防污染和自清洁的顶层涂层施加到现有常规高温抗蚀剂的涂料和方法， 反光涂层。 顶层涂层赋予了低成本的常规高温抗反射涂层优异的耐久性能和新特性，而不会降低涂层的抗反射性。 还公开了用于优化底层高温抗反射涂层的相对厚度和优化光学性能的顶层厚度的方法和数据。