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    System and method for variable dispense position
    2.
    发明授权
    System and method for variable dispense position 有权

    公开(公告)号：US09617988B2

    公开(公告)日：2017-04-11

    申请号：US14466115

    申请日：2014-08-22

    Applicant: Entegris, Inc.

    Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

    IPC: F04B43/02 ,  F04B13/00 ,  F04B49/06

    CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

    Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

    SYSTEM AND METHOD FOR A PUMP WITH ONBOARD ELECTRONICS
    3.
    发明申请
    SYSTEM AND METHOD FOR A PUMP WITH ONBOARD ELECTRONICS 有权
    带有电源的泵的系统和方法

    公开(公告)号：US20140044570A1

    公开(公告)日：2014-02-13

    申请号：US14019163

    申请日：2013-09-05

    Applicant: Entegris, Inc.

    Inventor： James Cedrone ,  George Gonnella ,  Iraj Gashgaee

    IPC: F04B43/04

    CPC classification number: F04B43/04 ,  F04B7/0076 ,  F04B9/02 ,  F04B13/00 ,  F04B23/06 ,  F04B49/065 ,  F04B53/06 ,  F04B53/16 ,  F04B53/22 ,  F04B2201/0201 ,  F04B2201/0601 ,  F04B2205/03 ,  Y10T29/49236 ,  Y10T137/87885

    Abstract: Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having onboard electronics and features to prevent heat from the onboard electronics from degrading process fluid or otherwise negatively impacting pump performance. Embodiments may also include features for reducing the likelihood that fluid will enter an electronics housing.

    Abstract translation: 本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。 此外，本发明的实施例提供了用于温和流体处理特性的特征。 本发明的实施例可以包括具有车载电子设备和特征的泵，其特征在于防止车载电子器件的热量降解过程流体或以其他方式不利地影响泵的性能。 实施例还可以包括用于降低流体进入电子设备壳体的可能性的特征。

    I/O systems, methods and devices for interfacing a pump controller
    5.
    发明授权
    I/O systems, methods and devices for interfacing a pump controller 有权

    公开(公告)号：US09262361B2

    公开(公告)日：2016-02-16

    申请号：US14663721

    申请日：2015-03-20

    Applicant: Entegris, Inc.

    Inventor： James Cedrone ,  Robert F. McLoughlin ,  George Gonnella

    IPC: H04L29/08 ,  G06F13/40 ,  F04B49/06 ,  G05B19/042 ,  G06F13/42

    CPC classification number: G06F13/4027 ,  F04B49/065 ,  G05B19/042 ,  G05B2219/25204 ,  G06F13/4282 ,  H04L67/12 ,  Y02D10/14 ,  Y02D10/151

    Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.

    SYSTEM AND METHOD FOR VARIABLE DISPENSE POSITION
    6.
    发明申请
    SYSTEM AND METHOD FOR VARIABLE DISPENSE POSITION 有权
    用于可变征税位置的系统和方法

    公开(公告)号：US20140361046A1

    公开(公告)日：2014-12-11

    申请号：US14466115

    申请日：2014-08-22

    Applicant: Entegris, Inc.

    Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

    IPC: F04B43/02

    CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

    Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

    Abstract translation: 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。

    SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP
    7.
    发明申请
    SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP 有权
    泵中压力补偿的系统和方法

    公开(公告)号：US20140322032A1

    公开(公告)日：2014-10-30

    申请号：US14329707

    申请日：2014-07-11

    Applicant: Entegris, Inc.

    Inventor： James Cedrone ,  George L. Gonnella

    IPC: F04B49/08 ,  F04B49/06

    CPC classification number: F04B49/08 ,  F04B13/00 ,  F04B49/065 ,  F04B51/00 ,  F04B2205/03

    Abstract: Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

    Abstract translation: 公开了用于在泵送装置的腔室中基本维持基线压力的系统和方法。 本发明的实施例可以用于控制电动机以补偿或解释可能在泵送装置的腔室中发生的压力漂移。 更具体地，可以控制分配马达，以在基于在分配室中感测到的压力的分配之前基本维持分配室中的基准压力。 在一个实施例中，在分配开始之前，可以利用控制回路，使得重复地确定分配室中的压力是否高于期望的压力，并且如果是，调节泵送装置的运动以维持基本上所需的 在分配室内的压力直到开始分配流体。

    System and method for pressure compensation in a pump
    8.
    发明授权
    System and method for pressure compensation in a pump 有权

    公开(公告)号：US09816502B2

    公开(公告)日：2017-11-14

    申请号：US14329707

    申请日：2014-07-11

    Applicant: Entegris, Inc.

    Inventor： James Cedrone ,  George L. Gonnella

    IPC: F04B49/06 ,  F04B49/08 ,  F04B13/00 ,  F04B51/00

    CPC classification number: F04B49/08 ,  F04B13/00 ,  F04B49/065 ,  F04B51/00 ,  F04B2205/03

    Abstract: Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

    System and method for position control of a mechanical piston in a pump
    10.
    发明授权
    System and method for position control of a mechanical piston in a pump 有权
    泵中机械活塞的位置控制系统和方法

    公开(公告)号：US09309872B2

    公开(公告)日：2016-04-12

    申请号：US14152866

    申请日：2014-01-10

    Applicant: Entegris, Inc.

    Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

    IPC: F04B13/00 ,  F04B17/03 ,  F04B25/00 ,  F04B49/06

    CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

    Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

    Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

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