公开(公告)号：US10707137B2

公开(公告)日：2020-07-07

申请号：US16405506

申请日：2019-05-07

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Thomas G. Miller

IPC: H01L21/66 ,  G01N9/24 ,  G01N1/28 ,  G03F7/20 ,  G01N23/20025 ,  G01N23/2204 ,  G01N1/32

Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.

公开(公告)号：US20170363549A1

公开(公告)日：2017-12-21

申请号：US15615494

申请日：2017-06-06

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Tom Miller

IPC: G01N23/04 ,  G01N23/20 ,  G01N1/28 ,  G01N9/24 ,  H01L21/66 ,  G03F7/20

CPC classification number: H01L22/12 ,  G01N1/28 ,  G01N1/32 ,  G01N9/24 ,  G01N23/20025 ,  G01N23/2204 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/7075

Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.

公开(公告)号：US20250155847A1

公开(公告)日：2025-05-15

申请号：US18510047

申请日：2023-11-15

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Alan S. Bahm

IPC: G03H1/16 ,  G02B27/58

Abstract: Embodiments herein relate to apodization of a hologram. A system can comprise a memory that stores, and a processor that executes, computer executable components. The computer executable components can comprise an obtaining component that obtains a signal of an energy-based initial hologram, an expansion component that expands the initial hologram at a boundary of the initial hologram, resulting in an expanded hologram having an expanded portion at the boundary, and a filter application component that, based on the expanded hologram, applies an apodization filter to overlap the expanded portion of the expanded hologram.

公开(公告)号：US10312162B2

公开(公告)日：2019-06-04

申请号：US15615494

申请日：2017-06-06

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Tom Miller

IPC: H01L21/66 ,  G01N9/24 ,  G01N1/28 ,  G03F7/20 ,  G01N23/20025 ,  G01N23/2204

Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.