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    Laser system and laser light generation method
    3.
    发明授权
    Laser system and laser light generation method 有权
    激光系统和激光产生方法

    公开(公告)号：US09184555B2

    公开(公告)日：2015-11-10

    申请号：US14298563

    申请日：2014-06-06

    Applicant: Gigaphoton Inc.

    Inventor： Masaya Yoshino ,  Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/23 ,  H01S3/00 ,  H01S3/13 ,  H01S3/134 ,  H01S3/10 ,  H01S3/11 ,  H01S3/225 ,  H01S3/16

    CPC classification number: H01S3/2308 ,  H01S3/0057 ,  H01S3/0092 ,  H01S3/10023 ,  H01S3/11 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/1636 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/2366

    Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.

    Abstract translation: 激光系统可以包括：主振荡器，被配置为输出脉冲激光; 用于放大来自主振荡器的脉冲激光的放大装置; 第一定时检测器，被配置为检测主振荡器输出脉冲激光的第一定时; 第二定时检测器，被配置为检测放大装置放电的第二定时; 以及控制器，被配置为基于所述第一定时检测器和所述第二定时检测器的检测结果，控制所述第一定时和所述第二定时中的至少一个，使得当所述脉冲激光通过放电空间时所述放大装置放电 的放大装置。

    Laser system
    4.
    发明授权
    Laser system 有权

    公开(公告)号：US11025026B2

    公开(公告)日：2021-06-01

    申请号：US16429434

    申请日：2019-06-03

    Applicant: Gigaphoton Inc.

    Inventor： Takashi Onose

    IPC: H01S3/23 ,  H01S3/00 ,  G02B27/09 ,  G02B27/10 ,  H01S5/00 ,  H01S3/10 ,  H01S3/225

    Abstract: A laser system including: A. a laser apparatus configured to output a pulse laser beam; B. an optical pulse stretcher including a delay optical path for expanding a pulse width of the pulse laser beam; and C. a phase optical element included in the delay optical path and having a function of spatially and randomly shifting a phase of the pulse laser beam. The phase optical element includes a plurality of types of cells providing different amounts of phase shift to the pulse laser beam and arranged irregularly in any direction.

    Solid-state laser system
    5.
    发明授权
    Solid-state laser system 有权

    公开(公告)号：US10256594B2

    公开(公告)日：2019-04-09

    申请号：US15616163

    申请日：2017-06-07

    Applicant: GIGAPHOTON INC.

    Inventor： Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/091 ,  G02F1/37 ,  G02F1/355 ,  H01S3/06 ,  H01S3/067 ,  H01S3/094 ,  H01S3/0941 ,  H01S3/107 ,  H01S3/109 ,  H01S3/16 ,  G02F1/35 ,  G03F7/20 ,  H01S3/23 ,  H01S3/00 ,  H01S3/10 ,  H01S3/225

    Abstract: A solid-state laser system may include first and second solid-state laser units, a wavelength conversion system, an optical shutter, and a controller. The first solid-state laser unit and the second solid-state laser unit may output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength, respectively. The controller may perform first control and second control. The first control may cause the first and second pulsed laser light to enter the wavelength conversion system at a substantially coincidental timing, thereby causing the wavelength conversion system to output third pulsed laser light with a third wavelength converted from the first wavelength and the second wavelength, and the second control may prevent the first and second pulsed laser light from entering the wavelength conversion system at the coincidental timing, thereby preventing the wavelength conversion system from outputting the third pulsed laser light.

    Solid-state laser apparatus and laser system
    6.
    发明授权
    Solid-state laser apparatus and laser system 有权
    固态激光装置和激光系统

    公开(公告)号：US08625645B2

    公开(公告)日：2014-01-07

    申请号：US13671657

    申请日：2012-11-08

    Applicant: Gigaphoton Inc.

    Inventor： Osamu Wakabayashi ,  Takashi Onose ,  Shinji Ito

    IPC: H01S3/13

    CPC classification number: H01S5/0085 ,  G02F1/37 ,  G02F2001/3507 ,  G02F2001/354 ,  H01S3/005 ,  H01S3/0092 ,  H01S3/0602 ,  H01S3/08027 ,  H01S3/0812 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2308 ,  H01S3/2375 ,  H01S3/2383

    Abstract: A solid-state laser apparatus may include: a master oscillator configured to output laser light having at least one longitudinal mode, the master oscillator being capable of changing the spectral linewidth of the laser light output therefrom; at least one amplifier located downstream of the master oscillator on an optical path; a wavelength converter located downstream of the amplifier on the optical path; a detector configured to detect the spectrum of the laser light; and a controller configured to control the spectral linewidth of the laser light output from the master oscillator based on a detection result of the detector.

    Abstract translation: 固态激光装置可以包括：主振荡器，被配置为输出具有至少一个纵向模式的激光，所述主振荡器能够改变从其输出的激光的谱线宽度; 位于主振荡器的下游的至少一个放大器在光路上; 位于光路上的放大器下游的波长转换器; 检测器，被配置为检测激光的光谱; 以及控制器，被配置为基于检测器的检测结果来控制从主振荡器输出的激光的谱线宽度。

    LASER APPARATUS
    7.
    发明申请
    LASER APPARATUS 有权
    激光装置

    公开(公告)号：US20130315270A1

    公开(公告)日：2013-11-28

    申请号：US13895524

    申请日：2013-05-16

    Applicant: Gigaphoton Inc.

    Inventor： Takahito KUMAZAKI ,  Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/10

    CPC classification number: H01S3/10069 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0805 ,  H01S3/0811 ,  H01S3/0812 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/1306 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.

    Abstract translation: 激光装置可以包括光学谐振器，激光室，光学损失调整机构和光谱线宽度调节机构。 光学谐振器包括被配置为反射一部分光和光栅的反射镜。 激光室设置在光学谐振器中并且包含被配置为发射激光束的激光增益介质。 光损耗调整机构设置在光谐振器中并且被配置为调整激光束的光损失。 光谱线宽度调节机构设置在光学谐振器中并且被配置为调整激光束的谱线宽度。

    Exposure apparatus
    8.
    发明授权
    Exposure apparatus 有权

    公开(公告)号：US09791780B2

    公开(公告)日：2017-10-17

    申请号：US14983962

    申请日：2015-12-30

    Applicant: Gigaphoton Inc.

    Inventor： Takashi Onose ,  Kouji Kakizaki ,  Osamu Wakabayashi ,  Akiyoshi Suzuki

    IPC: G03B27/42 ,  G03B27/54 ,  G03F7/20

    CPC classification number: G03F7/70058 ,  G03F7/7035 ,  G03F7/70408 ,  G03F7/70575

    Abstract: An exposure apparatus may include a laser light source capable of varying a wavelength of a laser beam that is emitted from the laser light source, a mask on which a pattern is formed, the pattern being configured to generate diffracted light by being irradiated with the laser beam, and a controller configured to control, in accordance with a distance between the mask and a substrate, the wavelength of the laser beam that is emitted from the laser light source, wherein the mask is irradiated with the laser beam emitted from the laser light source to perform proximity exposure on a surface of the substrate.

    LASER SYSTEM AND LASER LIGHT GENERATION METHOD
    9.
    发明申请
    LASER SYSTEM AND LASER LIGHT GENERATION METHOD 审中-公开
    激光系统和激光发光方法

    公开(公告)号：US20140341239A1

    公开(公告)日：2014-11-20

    申请号：US14298563

    申请日：2014-06-06

    Applicant: Gigaphoton Inc.

    Inventor： Masaya Yoshino ,  Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/11 ,  H01S3/225 ,  H01S3/13 ,  H01S3/10 ,  H01S3/134

    CPC classification number: H01S3/2308 ,  H01S3/0057 ,  H01S3/0092 ,  H01S3/10023 ,  H01S3/11 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/1636 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/2366

    Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.

    Abstract translation: 激光系统可以包括：主振荡器，被配置为输出脉冲激光; 用于放大来自主振荡器的脉冲激光的放大装置; 第一定时检测器，被配置为检测主振荡器输出脉冲激光的第一定时; 第二定时检测器，被配置为检测放大装置放电的第二定时; 以及控制器，被配置为基于所述第一定时检测器和所述第二定时检测器的检测结果，控制所述第一定时和所述第二定时中的至少一个，使得当所述脉冲激光通过放电空间时所述放大装置放电 的放大装置。

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