Solid-state laser apparatus and laser system
    1.
    发明授权
    Solid-state laser apparatus and laser system 有权
    固态激光装置和激光系统

    公开(公告)号:US08625645B2

    公开(公告)日:2014-01-07

    申请号:US13671657

    申请日:2012-11-08

    Abstract: A solid-state laser apparatus may include: a master oscillator configured to output laser light having at least one longitudinal mode, the master oscillator being capable of changing the spectral linewidth of the laser light output therefrom; at least one amplifier located downstream of the master oscillator on an optical path; a wavelength converter located downstream of the amplifier on the optical path; a detector configured to detect the spectrum of the laser light; and a controller configured to control the spectral linewidth of the laser light output from the master oscillator based on a detection result of the detector.

    Abstract translation: 固态激光装置可以包括:主振荡器,被配置为输出具有至少一个纵向模式的激光,所述主振荡器能够改变从其输出的激光的谱线宽度; 位于主振荡器的下游的至少一个放大器在光路上; 位于光路上的放大器下游的波长转换器; 检测器,被配置为检测激光的光谱; 以及控制器,被配置为基于检测器的检测结果来控制从主振荡器输出的激光的谱线宽度。

    Solid-state laser system and excimer laser system

    公开(公告)号:US10095084B2

    公开(公告)日:2018-10-09

    申请号:US15912004

    申请日:2018-03-05

    Abstract: A solid-state laser system may include: a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength; a first solid-state amplifier configured to receive the first pulsed laser light, and output third pulsed laser light with the first wavelength; a wavelength converter configured to receive the third pulsed laser light, and output harmonic light with a third wavelength; a second solid-state amplifier configured to receive the second pulsed laser light, and output fourth pulsed laser light with the second wavelength; a Raman laser unit configured to receive the fourth pulsed laser light, and output Stokes light with a fourth wavelength; and a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength.

    LASER APPARATUS
    3.
    发明申请
    LASER APPARATUS 审中-公开
    激光装置

    公开(公告)号:US20130279526A1

    公开(公告)日:2013-10-24

    申请号:US13863472

    申请日:2013-04-16

    Abstract: A laser apparatus may include a first laser light source configured to emit light with a first wavelength, a second laser light source including a titanium-sapphire laser device and a plurality of wavelength conversion elements and being configured to emit light with a second wavelength being one-fourth of a wavelength of light emitted from the titanium-sapphire laser device, and a wavelength conversion element configured in such a manner that the light with the first wavelength and the light with the second wavelength are incident thereon to emit light with a wavelength of about 193 nm corresponding to a sub frequency of the light with the first wavelength and the light with the second wavelength.

    Abstract translation: 激光装置可以包括配置为发射具有第一波长的光的第一激光光源,包括钛蓝宝石激光装置的第二激光光源和多个波长转换元件,并且被配置为发射具有第二波长的光 - 从钛蓝宝石激光装置发射的光的波长的第一和波长转换元件,其被配置为使得具有第一波长的光和具有第二波长的光入射到其上以发射波长为 约193nm对应于具有第一波长的光和具有第二波长的光的子频率。

    SOLID-STATE LASER APPARATUS AND LASER SYSTEM
    4.
    发明申请
    SOLID-STATE LASER APPARATUS AND LASER SYSTEM 有权
    固态激光装置和激光系统

    公开(公告)号:US20130064259A1

    公开(公告)日:2013-03-14

    申请号:US13671657

    申请日:2012-11-08

    Abstract: A solid-state laser apparatus may include: a master oscillator configured to output laser light having at least one longitudinal mode, the master oscillator being capable of changing the spectral linewidth of the laser light output therefrom; at least one amplifier located downstream of the master oscillator on an optical path; a wavelength converter located downstream of the amplifier on the optical path; a detector configured to detect the spectrum of the laser light; and a controller configured to control the spectral linewidth of the laser light output from the master oscillator based on a detection result of the detector.

    Abstract translation: 固态激光装置可以包括:主振荡器,被配置为输出具有至少一个纵向模式的激光,所述主振荡器能够改变从其输出的激光的谱线宽度; 位于主振荡器的下游的至少一个放大器在光路上; 位于光路上的放大器下游的波长转换器; 检测器,被配置为检测激光的光谱; 以及控制器,被配置为基于检测器的检测结果来控制从主振荡器输出的激光的谱线宽度。

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