公开(公告)号：US20220091515A1

公开(公告)日：2022-03-24

申请号：US17457514

申请日：2021-12-03

Applicant: Gigaphoton Inc.

Inventor： Makoto TANAKA ,  Yosuke Fujimaki ,  Takashi Ito ,  Yousuke Kawagoe

IPC: G03F7/20 ,  H01S3/036 ,  F04D23/00 ,  F04D29/66

Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

公开(公告)号：US11947263B2

公开(公告)日：2024-04-02

申请号：US17457514

申请日：2021-12-03

Applicant: Gigaphoton Inc.

Inventor： Makoto Tanaka ,  Yosuke Fujimaki ,  Takashi Ito ,  Yousuke Kawagoe

IPC: G03F7/20 ,  F04D23/00 ,  F04D29/66 ,  G03F7/00 ,  H01S3/036 ,  H01S3/225

CPC classification number: G03F7/70025 ,  F04D23/00 ,  F04D29/667 ,  H01S3/036 ,  H01S3/225

Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

公开(公告)号：US11588291B2

公开(公告)日：2023-02-21

申请号：US17372210

申请日：2021-07-09

Applicant: Gigaphoton Inc.

Inventor： Takuya Ishii ,  Takashi Ito ,  Ryota Kujira

IPC: G03F7/20 ,  H01S3/038 ,  H01S3/034 ,  H01S3/225

Abstract: A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.