公开(公告)号：US11715655B1

公开(公告)日：2023-08-01

申请号：US18062025

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Xin Chen ,  Zhihang Lin ,  Hui Tang ,  Hongcheng Li ,  Jian Gao ,  Qiang Liu ,  Xun Chen

IPC: H01L21/67 ,  H01L33/00

CPC classification number: H01L21/67144 ,  H01L33/0093

Abstract: A flexure-based continuous ejector pin mechanism for Mini/Micro chip mass transfer includes a first drive frame, a second drive frame, a mounting base, a first thorn die attach drive device, a second thorn die attach drive device, first flexible hinges, second flexible hinges, and a pricking pin. The second drive frame and the first drive frame are connected through the first flexible hinge. The mounting base is connected to a left side and a right side of the second drive frame through the second flexible hinges. Compared with a laser transfer technology, the flexible movable thorn die attach device has lower cost and higher accuracy; compared with a vacuum nozzle transfer technology, the flexible movable thorn die attach device has higher transfer efficiency and quality; and compared with a conventional thorn die attach device, the flexible movable thorn die attach device has higher transfer efficiency and precision.

公开(公告)号：US11791178B1

公开(公告)日：2023-10-17

申请号：US18062026

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Hui Tang ,  Zhishen Liao ,  Xin Chen ,  Zhihang Lin ,  Jian Gao ,  Qiang Liu ,  Xun Chen

IPC: H01L21/67

CPC classification number: H01L21/67144 ,  H01L21/67259

Abstract: A compliant mechanical system for Mini/Micro chip mass transfer and packaging comprises a flexure-based continuous ejector pin mechanism including a drive support plate, a mounting base, first thorn die attach drive devices, second thorn die attach drive devices, first flexible hinges, second flexible hinges, and a pricking pin. The first thorn die attach drive devices and the second thorn die attach drive devices are mounted on the drive support plate. A drive end of the first thorn die attach drive device horizontally passes rightward through the first flexible hinge at a corresponding position; a drive end of the second thorn die attach drive device horizontally passes leftward through the first flexible hinge at a corresponding position; and the mounting base is hinged to the drive ends of the two thorn die attach drive devices through the second flexible hinges.

公开(公告)号：US10239167B2

公开(公告)日：2019-03-26

申请号：US15114090

申请日：2014-09-24

Applicant: Guangdong University of Technology

Inventor： Zhijun Yang ,  Youdun Bai ,  Xin Chen ,  Jian Gao ,  Haidong Yang ,  Meng Wang ,  Hui Tang

IPC: B23Q1/34 ,  B23Q1/62 ,  B23Q5/28

Abstract: The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

公开(公告)号：US20170001275A1

公开(公告)日：2017-01-05

申请号：US15114090

申请日：2014-09-24

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Zhijun Yang ,  Youdun Bai ,  Xin Chen ,  Jian Gao ,  Haidong Yang ,  Meng Wang ,  Hui Tang

IPC: B23Q1/34 ,  B23Q5/28 ,  B23Q1/62

CPC classification number: B23Q1/34 ,  B23Q1/62 ,  B23Q5/28 ,  B23Q2210/002 ,  B23Q2230/004

Abstract: The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

Abstract translation: 本公开涉及发生精确二维运动的场合，并且适用于用于精确位移补偿的XY运动台。 本公开特别涉及基于应力硬化的刚度 - 频率可调XY微动平台，其包括X方向和Y方向运动子级以及相应的驱动器和微动作工作台。 微动阶段使用具有通过螺栓调节的张力水平的膜组作为柔性铰链，以便实现XY微动阶段的振动频率的独立调整。 本公开实现了基于预应力膜的上述构造，因此频率是可调节的。 可以根据各种工作条件和驱动频率在操作前或操作期间调整微动阶段的固有频率。 两个进给运动方向是垂直的，以防止微动工作台在二维运动期间耦合。