-
公开(公告)号:US11333882B2
公开(公告)日:2022-05-17
申请号:US16752941
申请日:2020-01-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Yuki Morinaga , Anna Yoshida , Yoshihisa Warashina
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
-
公开(公告)号:US09658166B2
公开(公告)日:2017-05-23
申请号:US15375720
申请日:2016-12-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama
CPC classification number: G01N21/658 , B82Y40/00 , G01J3/02 , G01J3/12 , G01J3/44 , G01N2201/02 , G01N2201/0227 , G01N2201/06113
Abstract: A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.
-
公开(公告)号:US09863884B2
公开(公告)日:2018-01-09
申请号:US14420510
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama , Takashi Kasahara , Toshimitsu Kawai , Toru Hirohata , Hiroki Kamei , Hiroki Oyama
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2021/651
Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part has a thickness greater than the height of the pillars.
-
公开(公告)号:US20150233830A1
公开(公告)日:2015-08-20
申请号:US14420483
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masashi Ito , Katsumi Shibayama , Toshimitsu Kawai , Kazuto Ofuji , Hiroki Oyama , Yoshihiro Maruyama , Takafumi Yokino , Masaki Hirose , Anna Yoshida
IPC: G01N21/65
Abstract: A SERS unit comprises an integrally formed handling board and a SERS element secured within a container space provided in the handling board so as to open to one side in a thickness direction of the handling board. The SERS element has a substrate arranged on an inner surface of the container space and an optical function part formed on the substrate, for generating surface-enhanced Raman scattering.
Abstract translation: SERS单元包括整体形成的处理板和固定在设置在处理板中的容器空间内以沿着处理板的厚度方向的一侧开口的SERS元件。 SERS元件具有布置在容器空间的内表面上的基板和形成在基板上的用于产生表面增强拉曼散射的光学功能部件。
-
公开(公告)号:US20230332952A1
公开(公告)日:2023-10-19
申请号:US18211018
申请日:2023-06-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takafumi YOKINO , Anna Yoshida , Katsuhiko Kato
CPC classification number: G01J3/28 , G01J3/0202 , G01J3/021 , G01J3/18
Abstract: A spectrometer includes a support having a bottom wall part and a side wall part arranged on one side of the bottom wall part, a light detection element supported by the support to face a surface of the bottom wall part on the one side through a spectroscopic space, a resin molded layer provided at least on the surface of the bottom wall part on the one side, and a reflecting layer provided on the resin molded layer and included in an optical function part on the bottom wall part. The resin molded layer has a first part having a shape corresponding to the optical function part and a second part which surrounds the first part and is thinner than the first part.
-
公开(公告)号:US11725986B2
公开(公告)日:2023-08-15
申请号:US17426145
申请日:2020-01-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takafumi Yokino , Anna Yoshida , Katsuhiko Kato
CPC classification number: G01J3/28 , G01J3/021 , G01J3/0202 , G01J3/18
Abstract: A spectrometer includes a support having a bottom wall part and a side wall part arranged on one side of the bottom wall part, a light detection element supported by the support to face a surface of the bottom wall part on the one side through a spectroscopic space, a resin molded layer provided at least on the surface of the bottom wall part on the one side, and a reflecting layer provided on the resin molded layer and included in an optical function part on the bottom wall part. The resin molded layer has a first part having a shape corresponding to the optical function part and a second part which surrounds the first part and is thinner than the first part.
-
公开(公告)号:US09863883B2
公开(公告)日:2018-01-09
申请号:US14420502
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama , Takashi Kasahara , Toshimitsu Kawai , Toru Hirohata , Hiroki Kamei , Hiroki Oyama
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2201/068
Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part is formed with a plurality of grooves surrounding the respective pillars when seen in the projecting direction of the pillars, while an end part of the protrusion is located within the groove corresponding thereto.
-
8.
公开(公告)号:US08742320B2
公开(公告)日:2014-06-03
申请号:US13964472
申请日:2013-08-12
Applicant: Hamamatsu Photonics K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Anna Yoshida
CPC classification number: G01J3/0205 , G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/04 , G01J3/18 , G01J3/2803 , G02B7/027 , H01L31/18
Abstract: The present invention provides a highly reliable spectral module. When light L1 proceeding to a spectroscopic unit (4) passes through a light transmitting hole (50) in the spectral module (1) in accordance with the present invention, only the light having passed through a light entrance side unit (51) formed such as to become narrower toward a substrate (2) and entered a light exit side unit (52) formed such as to oppose a bottom face (51b) of the light entrance side unit (51) is emitted from a light exit opening (52a). Therefore, stray light M incident on a side face (51c) or bottom face (51b) of the light entrance side unit (51) is reflected to the side opposite to the light exit side unit (52) and thus is inhibited from entering the light exit side unit (52). Therefore, the reliability of the spectral module (1) can be improved.
Abstract translation: 本发明提供了一种高度可靠的光谱模块。 当进入分光单元(4)的光L1穿过根据本发明的光谱模块(1)中的透光孔(50)时,仅通过形成光入射侧单元(51)的光 朝向基板(2)变窄并且进入与光入射侧单元(51)的底面(51b)相对形成的光出射侧单元(52)从光出射开口(52a)射出, 。 因此,入射到光入射单元(51)的侧面(51c)或底面(51b)的杂散光M被反射到与光出射单元(52)相反的一侧,因此被禁止进入 光出射侧单元(52)。 因此,可以提高光谱模块(1)的可靠性。
-
公开(公告)号:US10184895B2
公开(公告)日:2019-01-22
申请号:US15499244
申请日:2017-04-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama
Abstract: A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.
-
公开(公告)号:US20150212003A1
公开(公告)日:2015-07-30
申请号:US14420502
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama , Takashi Kasahara , Toshimitsu Kawai , Toru Hirohata , Hiroki Kamei , Hiroki Oyama
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2201/068
Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part is formed with a plurality of grooves surrounding the respective pillars when seen in the projecting direction of the pillars, while an end part of the protrusion is located within the groove corresponding thereto.
Abstract translation: SERS元件包括具有正面的基板; 形成在前表面上并具有多个支柱的精细结构部件; 以及形成在微细结构部分上并构成用于产生表面增强拉曼散射的光学功能部分的导体层。 导体层具有沿着前表面形成的基部和在与支柱对应的各个位置处从基部突出的多个突起。 当沿柱的突出方向观察时,基部形成有围绕相应柱的多个槽,而突起的端部位于与其对应的槽内。
-
-
-
-
-
-
-
-
-