Method of manufacturing a microphone

    公开(公告)号:US09866970B2

    公开(公告)日:2018-01-09

    申请号:US14853507

    申请日:2015-09-14

    Inventor: Ilseon Yoo

    Abstract: A method of manufacturing a microphone includes preparing a substrate and forming an oxide layer pattern on the substrate and an oxide layer on a rear side of the substrate. The vibration membrane is formed over the substrate by injecting conductive ions into the substrate. A sacrificial layer and a fixed electrode are sequentially formed on the substrate and the vibration membrane by removing the oxide layer pattern. A first photoresist layer pattern is formed on the fixed electrode, and an air inlet is formed by patterning the fixed electrode. A second photoresist layer pattern is formed on a rear side of the oxide layer, and a penetration hole, through which a portion of the vibration membrane is exposed, is formed by etching the oxide layer and the rear side of the substrate. An air layer is formed between the fixed electrode and the vibration membrane.

    Microphone and method of manufacturing the same

    公开(公告)号:US09749752B2

    公开(公告)日:2017-08-29

    申请号:US14883527

    申请日:2015-10-14

    Inventor: Ilseon Yoo

    Abstract: A microphone includes: a first substrate having one or more first penetration holes; a vibrating membrane disposed on the first substrate and covering the first penetration holes; a fixed membrane disposed at a predetermined distance over the vibration membrane and having a plurality of air intake holes; and a phase delay unit bonded by a bonding pad on the fixed membrane, having a plurality of second penetration holes connected to the one or more first penetration holes, and having a phase delay material in the second penetration holes. A method of manufacturing a microphone including a phase delay unit is also disclosed.

    MICROPHONE MANUFACTURING METHOD, MICROPHONE, AND CONTROL METHOD
    7.
    发明申请
    MICROPHONE MANUFACTURING METHOD, MICROPHONE, AND CONTROL METHOD 有权
    麦克风制造方法,麦克风和控制方法

    公开(公告)号:US20160157012A1

    公开(公告)日:2016-06-02

    申请号:US14798716

    申请日:2015-07-14

    Inventor: Ilseon Yoo

    CPC classification number: H04R3/00 H04R1/20 H04R31/00 H04R2201/003

    Abstract: A method of manufacturing a microphone, a microphone, and a method of controlling the microphone are provided. The method includes forming a sound sensing module on a mainboard having a first sound aperture, to be connected with the first sound aperature and forming a cover having a second sound aperature that corresponds to the first sound aperature, mounted on the mainboard, and housing the sound sensing module. A first and second sound delay filters are formed in a space defined by the cover, to be connected with the second sound hole and thermal actuators are disposed at both sides of the first sound delay filter and move the first sound delay filter based on whether power is supplied. A semiconductor chip is electrically connected with the sound sensing module in the space and selectively operates the thermal actuators in response to signals from the sound sensing module.

    Abstract translation: 提供一种麦克风的制造方法,麦克风和麦克风的控制方法。 该方法包括在具有第一声孔的主板上形成声音传感模块,以与第一声音温度相连,并形成具有安装在主板上的具有对应于第一声音的第二声音的盖子,并且将 声音传感模块。 第一和第二声音延迟滤波器形成在由盖限定的空间中,以与第二声孔连接,并且热致动器设置在第一声音延迟滤波器的两侧,并且基于电源是否移动第一声音延迟滤波器 被提供。 半导体芯片与空间中的声音传感模块电连接,响应于来自声音传感模块的信号选择性地操作热致动器。

    MICROPHONE AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    MICROPHONE AND METHOD OF MANUFACTURING THE SAME 有权
    麦克风及其制造方法

    公开(公告)号:US20160112785A1

    公开(公告)日:2016-04-21

    申请号:US14791449

    申请日:2015-07-05

    Abstract: A microphone includes a substrate including a penetration hole; a vibration membrane disposed over the substrate and covering the penetration hole; a fixed electrode disposed over the vibration membrane and spaced apart from the vibration membrane; a fixed plate disposed over the fixed electrode; and a plurality of air inlets disposed in the fixed electrode and the fixed plate. The vibration membrane includes a plurality of slots positioned over the penetration hole, and an entire area of the plurality of slots is approximately 8% to approximately 19% of an entire area of the vibration membrane.

    Abstract translation: 麦克风包括:基底,包括穿透孔; 设置在所述基板上并覆盖所述贯通孔的振动膜; 固定电极,设置在振动膜上方并与振膜隔开; 设置在固定电极上的固定板; 以及设置在固定电极和固定板中的多个空气入口。 振动膜包括位于穿透孔上方的多个槽,并且多个槽的整个区域是振动膜的整个面积的约8%至约19%。

    METHOD OF JOINING SEMICONDUCTOR SUBSTRATE
    9.
    发明申请
    METHOD OF JOINING SEMICONDUCTOR SUBSTRATE 有权
    接合半导体基板的方法

    公开(公告)号:US20150187604A1

    公开(公告)日:2015-07-02

    申请号:US14319324

    申请日:2014-06-30

    CPC classification number: H01L21/50 H01L21/185 H01L21/30604 H01L21/308

    Abstract: A method of joining semiconductor substrates includes: forming an alignment key on a first semiconductor substrate; forming a first protrusion and a second protrusion, and an alignment recess positioned between the first protrusion and the second protrusion on a second semiconductor substrate; forming a first metal layer and a second metal layer on the first protrusion and the second protrusion, respectively; and joining the first semiconductor substrate and the second semiconductor substrate, in which the alignment key is positioned at the alignment recess when the first semiconductor substrate and the second semiconductor substrate are joined.

    Abstract translation: 一种接合半导体衬底的方法包括:在第一半导体衬底上形成对准键; 形成第一突起和第二突起,以及位于第二半导体衬底上的第一突起和第二突起之间的对准凹槽; 在所述第一突起和所述第二突起上分别形成第一金属层和第二金属层; 并且当所述第一半导体衬底和所述第二半导体衬底接合时,所述第一半导体衬底和所述第二半导体衬底接合所述对准键位于所述对准凹槽处。

    Microphone and method for manufacturing the same

    公开(公告)号:US10313799B2

    公开(公告)日:2019-06-04

    申请号:US15824321

    申请日:2017-11-28

    Inventor: Ilseon Yoo

    Abstract: A microphone includes: a vibration electrode disposed in an upper portion of a substrate which has an acoustic hole; a fixed electrode separated from the upper portion of the vibration electrode by a reference distance and having an insulation membrane on each of an upper surface and a lower surface of the fixed electrode; and a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage.

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