Fabrication method of multi-core fiber Bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique

    公开(公告)号:US10481325B2

    公开(公告)日:2019-11-19

    申请号:US15503836

    申请日:2016-03-02

    Abstract: A fabrication method of a multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part based on the capillary self-assembly technique, wherein the diameter of the fiber (6) inscribed with FBG is reduced using a mechanical method or an etch method by the hydrofluoric acid; the fibers (6) inscribed with FBG, whose diameter has been reduced, are inserted into a tube (7) through its terminal with an inner taper angle; the FBG terminals of these fibers (6) are immersed into the UV adhesive (10) of a low viscosity and the UV adhesive (10) is raised in the gaps between the fibers (6); or the UV adhesive is dropped on these fibers (6) and the capillary bridge between the fibers (6) is formed; a most compact structure of the fiber bundle is formed as a result of the capillary self-assembly; the fiber bundle is cured using a UV light and the multi-core FBG (11) is therefore formed; the terminal of the multi-core FBG (11) is polished with an optic fiber polishing machine and then a spherical tip is fabricated with the melting fiber method or the installation method of a micro ball; therefore, a multi-core FBG (11) probe can be achieved. The method features low crosstalk between signal of FBG, inexpensive and low insertion loss.

    Method And Equipment Based On Detecting The Polarization Property Of A Polarization Maintaining Fiber Probe For Measuring Structures Of A Micro Part
    2.
    发明申请
    Method And Equipment Based On Detecting The Polarization Property Of A Polarization Maintaining Fiber Probe For Measuring Structures Of A Micro Part 有权
    基于检测微零件测量结构的偏振维持光纤探头的极化性能的方法和设备

    公开(公告)号:US20160305764A1

    公开(公告)日:2016-10-20

    申请号:US15101905

    申请日:2014-12-31

    CPC classification number: G01B11/007 G01B5/012 G01B11/18

    Abstract: A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

    Abstract translation: 提供了一种基于检测用于测量微型部件的结构的偏振保持光纤(PMF)探针的偏振特性的方法和设备。 提供的方法涉及如何通过将二维或三维接触位移转换为PMF探针的偏振特性变化以及如何重建微型部件的结构几何形状来实现微型部件的测量结构。 所提供的设备可用于使PMF探针的球形尖端与微型部件接触,以确定接触点的坐标,并重建微型部件的结构几何形状。 提供的方法和设备具有灵敏度高,探测力低,检测宽高比和对环境干扰的抵抗能力。

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