MITIGATING MENISCUS EFFECTS IN VERTICALLY ORIENTED CIRCULAR DICHROISM SPECTROMETERY

    公开(公告)号:US20180283948A1

    公开(公告)日:2018-10-04

    申请号:US15765698

    申请日:2016-10-06

    Inventor: Baoliang Wang

    Abstract: Example embodiments of methods, apparatus, and systems for measuring polarimetric parameters using spectroscopy are disclosed herein. Particular embodiments concern circular dichroism (CD) spectrometers that use a vertically aligned beam. In such embodiments, the solution being analyzed may have a top surface that forms a convex or concave meniscus, creating a surface through which the measuring beam passes that may refract the beam in undesirable ways. Accordingly, particular embodiments of the disclosed technology include one or more meniscus-compensating (meniscus-effect-reducing) components or subsystems. These components and/or subsystems can be used alone or in combination with one another to reduce the undesirable refractive effects caused by the meniscus at the solution's surface, thereby improving the resulting quality of the spectroscopy measurement and potentially improving the speed with which CD spectroscopy can be performed.

    Unambiguous retardance measurement

    公开(公告)号:US09841372B2

    公开(公告)日:2017-12-12

    申请号:US14866612

    申请日:2015-09-25

    CPC classification number: G01N21/21 G01N21/23

    Abstract: This invention is directed to methods of unambiguously measuring the absolute retardance, δA of an optical sample. A method for measuring absolute retardance of an optical sample includes directing light comprising a plurality of wavelengths through a polarization state generator source, the optical sample, and a polarization state analyzer, detecting, at an imaging device, retardance measurement light emanating from the optical sample after also passing through the polarization state analyzer at the plurality of wavelengths, determining a measurement retardance associated with the detected retardance measurement light at each of the wavelengths, and determining an absolute retardance associated with the optical sample based on the measurement retardances determined at each of the wavelengths.

    POLARIZATION PROPERTIES IMAGING SYSTEMS
    3.
    发明申请
    POLARIZATION PROPERTIES IMAGING SYSTEMS 有权
    偏振特性成像系统

    公开(公告)号:US20160116397A1

    公开(公告)日:2016-04-28

    申请号:US14893157

    申请日:2014-05-20

    Abstract: This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one example, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. An example spatially resolved imaging approach described herein is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.

    Abstract translation: 本公开一般涉及用于对光学材料样品的偏振特性进行成像的系统。 作为一个示例,提供了一种用于在宽范围的入射角下精确地同时成像样品材料的面内和平面外双折射性质的系统的系统。 除了作为优选实施例讨论的平面内和平面外双折射度量之外,本文描述的示例性空间分辨成像方法适于确定宽范围的偏振特性。

    Birefringence measurement of polycrystalline silicon samples or the like
    4.
    发明授权
    Birefringence measurement of polycrystalline silicon samples or the like 有权
    多晶硅样品的双折射测量等

    公开(公告)号:US09228936B2

    公开(公告)日:2016-01-05

    申请号:US14095833

    申请日:2013-12-03

    Inventor: Baoliang Wang

    CPC classification number: G01N21/23

    Abstract: A birefringence measurement system includes a lens mounted for selective movement into and out of use in the optical setup so that a wide range of sample types can be handled by the system without reconfiguring the primary components of the optical setup of the system (moving the detector, changing the light source power, etc.) in a manner that would sacrifice the cost effectiveness, efficiency, mechanical reliability and repeatability of measurements for such systems.

    Abstract translation: 双折射测量系统包括安装用于在光学设置中选择性地移入和移出使用的透镜,使得可以由系统处理大范围的采样类型,而不重新配置系统的光学设置的主要部件(移动检测器 ,改变光源功率等),以牺牲这种系统的成本效益,效率,机械可靠性和测量重复性。

    Mitigating meniscus effects in vertically oriented circular dichroism spectrometery

    公开(公告)号:US10436644B2

    公开(公告)日:2019-10-08

    申请号:US15765698

    申请日:2016-10-06

    Inventor: Baoliang Wang

    Abstract: Example embodiments of methods, apparatus, and systems for measuring polarimetric parameters using spectroscopy are disclosed herein. Particular embodiments concern circular dichroism (CD) spectrometers that use a vertically aligned beam. In such embodiments, the solution being analyzed may have a top surface that forms a convex or concave meniscus, creating a surface through which the measuring beam passes that may refract the beam in undesirable ways. Accordingly, particular embodiments of the disclosed technology include one or more meniscus-compensating (meniscus-effect-reducing) components or subsystems. These components and/or subsystems can be used alone or in combination with one another to reduce the undesirable refractive effects caused by the meniscus at the solution's surface, thereby improving the resulting quality of the spectroscopy measurement and potentially improving the speed with which CD spectroscopy can be performed.

    UNAMBIGUOUS RETARDANCE MEASUREMENT
    7.
    发明申请
    UNAMBIGUOUS RETARDANCE MEASUREMENT 审中-公开
    不可逾越的测量

    公开(公告)号:US20160091416A1

    公开(公告)日:2016-03-31

    申请号:US14866612

    申请日:2015-09-25

    CPC classification number: G01N21/21 G01N21/23

    Abstract: This invention is directed to methods of unambiguously measuring the absolute retardance, δA of an optical sample. A method for measuring absolute retardance of an optical sample includes directing light comprising a plurality of wavelengths through a polarization state generator source, the optical sample, and a polarization state analyzer, detecting, at an imaging device, retardance measurement light emanating from the optical sample after also passing through the polarization state analyzer at the plurality of wavelengths, determining a measurement retardance associated with the detected retardance measurement light at each of the wavelengths, and determining an absolute retardance associated with the optical sample based on the measurement retardances determined at each of the wavelengths.

    Abstract translation: 本发明涉及明确测量光学样品的绝对延迟δA的方法。 用于测量光学样本的绝对延迟的方法包括通过偏振态发生器源,光学样本和偏振状态分析器引导包括多个波长的光,在成像装置处检测从光学样本发出的延迟测量光 在通过多个波长的偏振状态分析器之后,确定与每个波长处的检测到的延迟测量光相关联的测量延迟,并且基于在每个波长处确定的测量阻抗来确定与光学样本相关联的绝对延迟 波长。

    Dual transducer photoelastic modulator

    公开(公告)号:US11054672B2

    公开(公告)日:2021-07-06

    申请号:US16206398

    申请日:2018-11-30

    Abstract: An apparatus includes a photoelastic modulator (PEM) optical element including a first driving axis and a second driving axis arranged at a selected angle with respect to each other and perpendicular to an optical axis, wherein the first driving axis and the second driving axis extend respective predetermined non-equal lengths that correspond to respective predetermined non-equal natural first and second PEM frequencies f1 and f2. Methods of manufacture and operation are also disclosed.

    DUAL TRANSDUCER PHOTOELASTIC MODULATOR
    9.
    发明申请

    公开(公告)号:US20190171042A1

    公开(公告)日:2019-06-06

    申请号:US16206398

    申请日:2018-11-30

    Abstract: An apparatus includes a photoelastic modulator (PEM) optical element including a first driving axis and a second driving axis arranged at a selected angle with respect to each other and perpendicular to an optical axis, wherein the first driving axis and the second driving axis extend respective predetermined non-equal lengths that correspond to respective predetermined non-equal natural first and second PEM frequencies f1 and f2. Methods of manufacture and operation are also disclosed.

    Polarization properties imaging systems

    公开(公告)号:US10168274B2

    公开(公告)日:2019-01-01

    申请号:US15612564

    申请日:2017-06-02

    Abstract: This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one aspect, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. The spatially resolved imaging approach described here is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.

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