公开(公告)号：US09863896B2

公开(公告)日：2018-01-09

申请号：US14674133

申请日：2015-03-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshiki Matoba

IPC: G01B15/06 ,  G01N23/083 ,  G01N23/16 ,  G01N23/04

CPC classification number: G01N23/083 ,  G01N23/043 ,  G01N23/16 ,  G01N2223/04 ,  G01N2223/505 ,  G01N2223/642 ,  G01N2223/652

Abstract: An X-ray transmission inspection apparatus includes: an X-ray source configured to irradiate a sample with an X-ray; a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor; a shield member configured to be arranged to face a detection surface of the detector and to block a part of X-rays to partially form a shield area from the X-rays on the detection surface; and a shield moving mechanism configured to move the shield member relative to the detector to enable change of a position of the shield area.

公开(公告)号：US09213007B2

公开(公告)日：2015-12-15

申请号：US14224437

申请日：2014-03-25

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshiki Matoba

IPC: G01N23/223

CPC classification number: G01N23/223

Abstract: A foreign matter detector includes an X-ray source which irradiates a sample moving in a constant direction with primary X-rays, a parallel two-dimensional slit which includes a plurality of slits arranged in at least a moving direction of the sample and emits parallel secondary X-rays by extracting a parallel component of secondary X-rays generated from the sample, a dispersing element which disperses the parallel secondary X-rays to obtain a specific X-ray fluorescence, a TDI sensor which receives the X-ray fluorescence, and a control unit which controls the TDI sensor to detect a foreign matter corresponding to the X-ray fluorescence. The control unit integrates a luminance value of the X-ray fluorescence received by the TDI sensor while matching a direction and a speed of charge transfer of the TDI sensor to a direction and a speed of movement of the sample.

Abstract translation: 异物检测器包括：X射线源，其照射沿着恒定方向移动的样品与初级X射线;平行二维狭缝，其包括沿着样品的至少移动方向排列的多个狭缝，并且发射平行 通过提取从样品产生的二次X射线的平行分量的二次X射线，分散平行二次X射线以获得特定X射线荧光的分散元件，接收X射线荧光的TDI传感器， 以及控制单元，其控制TDI传感器来检测与X射线荧光相对应的异物。 控制单元将TDI传感器接收的X射线荧光的亮度值与TDI传感器的电荷转移方向和速度与样品的移动方向和速度进行匹配。

公开(公告)号：US10651018B2

公开(公告)日：2020-05-12

申请号：US16244359

申请日：2019-01-10

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masahiro Sakuta ,  Yoshiki Matoba

IPC: H01J49/00 ,  H01J49/34 ,  H01J49/02 ,  H01J49/04

Abstract: Disclosed is an apparatus for and a method of mass analysis, the apparatus and the method being capable of improving a detection accuracy of a target substance including impurities, without increasing a size of the apparatus, and shortening measuring time. The apparatus analyzing a sample containing a target substance and one or more interfering substances, which have a peak of a mass spectrum overlapping that of the target substance includes: a peak correction unit calculating an intensity of net peak D of the mass spectrum of the target substance by subtracting a total sum of estimated intensities of the peak B, which are calculated every predetermined time interval according to the intensity of the peak A and a nonlinear relation F between the peak A and the peak B, from an intensity of peak C of a mass spectrum of the target substance of the sample.

公开(公告)号：US20150276626A1

公开(公告)日：2015-10-01

申请号：US14674133

申请日：2015-03-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshiki Matoba

IPC: G01N23/083 ,  G01N23/16

CPC classification number: G01N23/083 ,  G01N23/043 ,  G01N23/16 ,  G01N2223/04 ,  G01N2223/505 ,  G01N2223/642 ,  G01N2223/652

Abstract: An X-ray transmission inspection apparatus includes: an X-ray source configured to irradiate a sample with an X-ray; a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor; a shield member configured to be arranged to face a detection surface of the detector and to block a part of X-rays to partially form a shield area from the X-rays on the detection surface; and a shield moving mechanism configured to move the shield member relative to the detector to enable change of a position of the shield area.

Abstract translation: X射线透射检查装置包括：X射线源，被配置为用X射线照射样品; 检测器，被配置为相对于样品设置在与所述X射线源相对的一侧，并且检测通过使用荧光体透射的样品的X射线; 屏蔽构件，被配置为面对检测器的检测表面并阻挡X射线的一部分以部分地形成与检测表面上的X射线的屏蔽区域; 以及屏蔽移动机构，其构造成相对于所述检测器移动所述屏蔽构件以能够改变所述屏蔽区域的位置。

公开(公告)号：US20140294144A1

公开(公告)日：2014-10-02

申请号：US14224437

申请日：2014-03-25

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshiki Matoba

IPC: G01N23/223

CPC classification number: G01N23/223

Abstract: A foreign matter detector includes an X-ray source which irradiates a sample moving in a constant direction with primary X-rays, a parallel two-dimensional slit which includes a plurality of slits arranged in at least a moving direction of the sample and emits parallel secondary X-rays by extracting a parallel component of secondary X-rays generated from the sample, a dispersing element which disperses the parallel secondary X-rays to obtain a specific X-ray fluorescence, a TDI sensor which receives the X-ray fluorescence, and a control unit which controls the TDI sensor to detect a foreign matter corresponding to the X-ray fluorescence. The control unit integrates a luminance value of the X-ray fluorescence received by the TDI sensor while matching a direction and a speed of charge transfer of the TDI sensor to a direction and a speed of movement of the sample.

Abstract translation: 异物检测器包括：X射线源，其照射沿着恒定方向移动的样品与初级X射线;平行二维狭缝，其包括沿着样品的至少移动方向排列的多个狭缝，并且发射平行 通过提取从样品产生的二次X射线的平行分量的二次X射线，分散平行二次X射线以获得特定X射线荧光的分散元件，接收X射线荧光的TDI传感器， 以及控制单元，其控制TDI传感器来检测与X射线荧光相对应的异物。 控制单元将TDI传感器接收的X射线荧光的亮度值与TDI传感器的电荷转移方向和速度与样品的移动方向和速度进行匹配。

公开(公告)号：US20140286474A1

公开(公告)日：2014-09-25

申请号：US14222778

申请日：2014-03-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masahiro Sakuta ,  Kiyoshi Hasegawa ,  Yoshiki Matoba

IPC: G01N21/64

CPC classification number: G01N23/223 ,  G01N2223/317 ,  G01N2223/652

Abstract: An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

Abstract translation: 一种X射线荧光分析装置，其具有在X射线照射位置具有开口的样品台，将来自下方的主X射线照射在开口上的样品的X射线源，检测器， 从样品产生的射线荧光，支撑在开口正下方前进和后退的透明防滴板，使防滴板前进和后退的驱动机构，观察位于开口正下方的防滴板的观察照相机， 以及操作单元，其处理由观察摄像机捕获的防滴板的图像。 操作单元基于在驱动机构移动之前和之后的图像之间的图像差异来检测防滴落板上的异物，或者在观察相机的观察范围内使防滴板振动。

公开(公告)号：US10823686B2

公开(公告)日：2020-11-03

申请号：US15744223

申请日：2016-05-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yuta Urano ,  Kaifeng Zhang ,  Yoshiki Matoba ,  Akihiro Takeda

IPC: G01N23/10 ,  G01N23/18 ,  G01N23/083 ,  G01N23/16 ,  G01N23/04

Abstract: Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.

公开(公告)号：US09410906B2

公开(公告)日：2016-08-09

申请号：US14221535

申请日：2014-03-21

Applicant: Hitachi High-Tech Science Corporation

Inventor： Ryusuke Hirose ,  Haruo Takahashi ,  Yoshiki Matoba ,  Koichi Tamura

IPC: G01N23/223 ,  H05G1/02

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/31 ,  H05G1/025

Abstract: An X-ray fluorescence spectrometer includes: an X-ray source which irradiates a sample with primary X-rays; a light condensing device which condenses the primary X-rays to reduce an irradiation area on the sample; a detector which detects fluorescent X-rays produced from the sample irradiated with the primary X-rays; a housing which accommodates the X-ray source and the light condensing device; a temperature sensor which is disposed in at least one of the X-ray source and the periphery of the X-ray source; at least one external-air fan which is disposed on the housing, and which can exchange internal air with external air; and a control section which drives the external-air fan based on temperature information detected by the temperature sensor, to adjust the ambient temperature around the X-ray source to a constant temperature.

Abstract translation: X射线荧光光谱仪包括：用X射线照射样品的X射线源; 聚光装置，其冷凝初级X射线以减少样品上的照射面积; 检测器，其检测由所述主X射线照射的样品产生的荧光X射线; 容纳X射线源和聚光装置的壳体; 温度传感器，其设置在所述X射线源和所述X射线源的周围中的至少一个中; 至少一个外部空气风扇，其设置在壳体上，并且可以与外部空气交换内部空气; 以及控制部，其基于由所述温度传感器检测出的温度信息来驱动所述外部风扇，以将所述X射线源周围的环境温度调整为恒定温度。

公开(公告)号：US09188553B2

公开(公告)日：2015-11-17

申请号：US14222778

申请日：2014-03-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masahiro Sakuta ,  Kiyoshi Hasegawa ,  Yoshiki Matoba

IPC: G01N21/64 ,  G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/317 ,  G01N2223/652

Abstract: An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

Abstract translation: 一种X射线荧光分析装置，其具有在X射线照射位置具有开口的样品台，将来自下方的主X射线照射在开口上的样品的X射线源，检测器， 从样品产生的射线荧光，支撑在开口正下方前进和后退的透明防滴板，使防滴板前进和后退的驱动机构，观察位于开口正下方的防滴板的观察照相机， 以及操作单元，其处理由观察摄像机捕获的防滴板的图像。 操作单元基于在驱动机构移动之前和之后的图像之间的图像差异来检测防滴落板上的异物，或者在观察相机的观察范围内使防滴板振动。

公开(公告)号：US20140294145A1

公开(公告)日：2014-10-02

申请号：US14221535

申请日：2014-03-21

Applicant: Hitachi High-Tech Science Corporation

Inventor： Ryusuke Hirose ,  Haruo Takahashi ,  Yoshiki Matoba ,  Koichi Tamura

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/31 ,  H05G1/025

Abstract: An X-ray fluorescence spectrometer includes: an X-ray source which irradiates a sample with primary X-rays; a light condensing device which condenses the primary X-rays to reduce an irradiation area on the sample; a detector which detects fluorescent X-rays produced from the sample irradiated with the primary X-rays; a housing which accommodates the X-ray source and the light condensing device; a temperature sensor which is disposed in at least one of the X-ray source and the periphery of the X-ray source; at least one external-air fan which is disposed on the housing, and which can exchange internal air with external air; and a control section which drives the external-air fan based on temperature information detected by the temperature sensor, to adjust the ambient temperature around the X-ray source to a constant temperature.

Abstract translation: X射线荧光光谱仪包括：用X射线照射样品的X射线源; 聚光装置，其冷凝初级X射线以减少样品上的照射面积; 检测器，其检测由所述主X射线照射的样品产生的荧光X射线; 容纳X射线源和聚光装置的壳体; 温度传感器，其设置在所述X射线源和所述X射线源的周围中的至少一个中; 至少一个外部空气风扇，其设置在壳体上，并且可以与外部空气交换内部空气; 以及控制部，其基于由所述温度传感器检测出的温度信息来驱动所述外部风扇，以将所述X射线源周围的环境温度调整为恒定温度。