Charge neutralizer for glass substrate
    1.
    发明授权
    Charge neutralizer for glass substrate 失效
    玻璃基板电荷中和剂

    公开(公告)号:US07529074B2

    公开(公告)日:2009-05-05

    申请号:US11443246

    申请日:2006-05-31

    CPC classification number: H05F3/06 B65G49/061 B65G2249/02 H05K9/0067

    Abstract: The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up.A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.

    Abstract translation: 本发明提供一种电荷中和剂,用于在将玻璃基板提起之后将软X射线精确地照射到窄间隙中。 软X射线从软X射线电荷中和器14引入间隙“d”,软X射线由软X射线光轴监视器16检测。安装位置调整装置15通过来自 所述软X射线光轴监视器和光轴对准被执行。 接下来,根据来自数据库19的信息,控制单元17控制间隙调节装置13,并执行电荷中和。 还可以通过间隙调节装置13控制间隙“d”,同时判断由静电计18测量的带电电位是否在控制单元17的允许值内的中和条件来执行电荷中和。

    Charge neutralizer for glass substrate
    2.
    发明申请
    Charge neutralizer for glass substrate 失效
    玻璃基板电荷中和剂

    公开(公告)号:US20070188970A1

    公开(公告)日:2007-08-16

    申请号:US11443246

    申请日:2006-05-31

    CPC classification number: H05F3/06 B65G49/061 B65G2249/02 H05K9/0067

    Abstract: The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.

    Abstract translation: 本发明提供一种电荷中和剂,用于在将玻璃基板提起之后将软X射线精确地照射到窄间隙中。 软X射线从软X射线电荷中和器14引入间隙“d”,软X射线由软X射线光轴监视器16检测。安装位置调整装置15通过来自 所述软X射线光轴监视器和光轴对准被执行。 接下来,根据来自数据库19的信息,控制单元17控制间隙调节装置13,并执行电荷中和。 还可以通过间隙调节装置13控制间隙“d”,同时判断由静电计18测量的带电电位是否在控制单元17的允许值内的中和条件来执行电荷中和。

    Electrified object contact component
    4.
    发明授权
    Electrified object contact component 失效
    电气化接触部件

    公开(公告)号:US5645943A

    公开(公告)日:1997-07-08

    申请号:US546192

    申请日:1995-10-20

    CPC classification number: H01L21/68707 Y10S148/118 Y10T428/31678

    Abstract: An electrified object contact material characterized in that an oxide film formed in a high purity oxidizing atmosphere with a thickness from several tens to 100 .ANG. is formed at least in a section directly contacting an electrified object. By using the contact component according to the present invention, the electric potential of a wafer can always be suppressed to 50 V or less, and moreover, contamination of a wafer (especially by a metallic material) can completely be eliminated.

    Abstract translation: 一种带电的物体接触材料,其特征在于至少在直接接触带电物体的部分中形成厚度为几十至100埃的高纯度氧化气氛中的氧化膜。 通过使用本发明的接触部件,可以将晶片的电位总是抑制在50V以下,此外,可以完全消除晶片(特别是金属材料)的污染。

    Soft X-Ray Generation Apparatus and Static Elimination Apparatus
    7.
    发明申请
    Soft X-Ray Generation Apparatus and Static Elimination Apparatus 有权
    软X射线发生装置和静电消除装置

    公开(公告)号:US20090272915A1

    公开(公告)日:2009-11-05

    申请号:US12226077

    申请日:2007-04-10

    CPC classification number: H05F3/06 H01J35/06 H01J2235/062 H01J2235/081

    Abstract: The present invention aims to suppress calorific value and prolong a lifetime of an apparatus that generates soft X-rays. Thus, the present invention provides a static elimination apparatus that includes an emitter as an electron emitting portion and a target, in which a thin film formed of diamond particles each having a particle size of 2 nm to 100 nm is formed on a surface of the emitter. The thin film has a diamond XRD pattern in an XRD measurement and, in a Raman spectroscopic measurement, a ratio of an sp3 bonding component to an sp2 bonding component within the film of 2.5 to 2.7:1. When a DC voltage is applied to the emitter, with a threshold electric field intensity of 1 V/μm or less, electrons larger in number than the prior art are emitted from the emitter and moreover, a temperature of the emitter is hardly increased, thus obtaining a longer lifetime.

    Abstract translation: 本发明旨在抑制产生软X射线的装置的发热量并延长其使用寿命。 因此,本发明提供了一种静电消除装置,其包括作为电子发射部分的发射体和靶,其中形成有粒径为2nm至100nm的金刚石颗粒的薄膜在其表面上形成 发射器。 该薄膜在XRD测量中具有菱形XRD图案,并且在拉曼光谱测量中,膜中的sp3键合成分与sp2键合成分的比例为2.5〜2.7:1。 当发射极施加直流电压时,阈值电场强度为1 V / mum以下,从发射极发射的数量比现有技术大,而发射极的温度几乎不增加,因此, 获得更长的使用寿命。

    Apparatus for neutralizing charged body
    8.
    发明授权
    Apparatus for neutralizing charged body 失效
    用于中和带电体的装置

    公开(公告)号:US5596478A

    公开(公告)日:1997-01-21

    申请号:US185829

    申请日:1994-01-24

    CPC classification number: H05F3/06 G21K1/14

    Abstract: An apparatus which can neutralize charge bodies such as processed substrates for semiconductor device and for flat display, free from electromagnetic noise, impurity contamination, and residual potentials. To process in a prescribed way a wafer(5) to be processed, the wafer(5) is, for example, moved from a pretreatment chamber(2) to a low pressure reaction chamber(3). In this case, a gas, which does not react on the wafer, such as nitrogen and argon, is introduced into the pretreatment chamber(2), and is kept under a predetermined pressure by a vacuum pump(15). Then, ultraviolet rays are projected in the pretreatment chamber(2) from an ultraviolet rays lamp(11) constituting a means for generating neutralization charge, and positive and negative floating charged particles(electrons and positive ions) are generated by exiting the atmosphere in the chamber(2). Since the charges are removed by projecting the ultraviolet rays from the outside of a case(1) and the case(2) and moreover in a non-contact way, no electromagnetic noise is generated and the residual potentials are vanished too.

    Abstract translation: PCT No.PCT / JP92 / 00948 Sec。 371日期:1994年1月24日 102(e)日期1994年1月24日PCT提交1992年7月24日PCT公布。 出版物WO93 / 02467 日期:1993年2月4日,一种可以中和电荷体的装置,例如半导体器件的处理衬底和平面显示器,没有电磁噪声,杂质污染和残留电位。 为了以规定的方式处理要处理的晶片(5),晶片(5)例如从预处理室(2)移动到低压反应室(3)。 在这种情况下,将不与晶圆反应的气体(例如氮气和氩气)引入预处理室(2),并通过真空泵(15)保持在预定压力下。 然后,紫外线从构成产生中和电荷的装置的紫外线灯(11)投射到预处理室(2)中,并且通过离开空气中的气氛而产生正,负浮动带电粒子(电子和正离子) 室(2)。 由于通过从壳体(1)和壳体(2)的外部投射紫外线而且以非接触方式移除电荷,因此不会产生电磁噪声并且剩余电位也消失。

    Video displaying apparatus capable of displaying a video while forming a
blanking region
    9.
    发明授权
    Video displaying apparatus capable of displaying a video while forming a blanking region 失效
    能够在形成消隐区域的同时显示视频的视频显示装置

    公开(公告)号:US5471251A

    公开(公告)日:1995-11-28

    申请号:US74441

    申请日:1993-06-10

    CPC classification number: H04N7/0122 H04N5/265

    Abstract: A television receiver has a video muting processing function wherein a blanking added video signal is produced by superimposing on a video signal a blanking signal gradually varying in the width in the time direction and consists of a composite signal in which blanking signals are superimposed respectively on the front edge and rear edge of the video signal part.

    Abstract translation: 电视接收机具有视频静噪处理功能,其中通过在视频信号上叠加在时间方向上宽度逐渐变化的消隐信号来产生消隐添加的视频信号,并且包括分别叠加消隐信号的复合信号 视频信号部分的前沿和后沿。

    Video muting apparatus
    10.
    发明授权
    Video muting apparatus 失效
    视频静音设备

    公开(公告)号:US5382981A

    公开(公告)日:1995-01-17

    申请号:US74442

    申请日:1993-06-10

    CPC classification number: H04N5/57 H04N3/24

    Abstract: The video muting apparatus is provided with a controlling apparatus which calculates the video muting time TM from the correlation between the power feeding time T1 counted by the first counter and the power feed stopping time T2 counted by the second counter and controls the operation of the switch on the basis of the calculated video muting TM. The switch will operate to be opened on the basis of the controlling signal from the controlling apparatus during the period from the starting time point when the power feed by the power supply circuit is started until the video muting time TM elapses and will operate to be closed on the basis of the controlling signal from the controlling apparatus immediately after the the video muting time TM elapses.

    Abstract translation: 视频静音装置设置有控制装置,其根据由第一计数器计数的供电时间T1和由第二计数器计数的供电停止时间T2之间的相关性来计算视频静音时间TM,并且控制开关的操作 在计算的视频静音TM的基础上。 在从供电电路的供电开始直到视频静音时间TM经过并且将被操作为闭合的开始时间点的期间,开关将基于来自控制装置的控制信号而被操作 基于来自控制装置的控制信号,紧接在视频静音时间TM之后。

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