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公开(公告)号：US11143804B2
公开(公告)日：2021-10-12
申请号：US16162382
申请日：2018-10-16
Inventor： Honggang Gu , Shiyuan Liu , Xiuguo Chen , Hao Jiang , Chuanwei Zhang
Abstract: The present invention belongs to the field of optical detection devices, and specifically discloses a polarization modulator and a polarization measurement system, comprising a rotating compensator and a polarizer, in which the rotating compensator is a continuously rotating composite waveplate, the composite waveplate is composed of a plurality of single-waveplates of the same material, and the overall structure of the composite waveplate is determined by thicknesses and fast axis intersection angles of the respective single-waveplates according to the optimization design of the polarization characteristic transfer matrix of the polarization modulator. The polarization modulator of the invention has the advantages of simple structure, easy processing and a wide applicable wavelength range, and a wide-waveband polarization measurement system can be designed based on the polarization modulator, which is adapted to the requirements of wide-waveband precision polarization measurement.
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公开(公告)号：US09103667B2
公开(公告)日：2015-08-11
申请号：US14341744
申请日：2014-07-25
Inventor： Shiyuan Liu , Honggang Gu , Xiuguo Chen , Chuanwei Zhang , Weiqi Li , Weichao Du
CPC classification number: G01B11/272 , G02B5/3083 , G02B27/62
Abstract: An alignment method for optical axes of a composite waveplate includes rotating a rotatable waveplate, which rotates about a central axis with respect to a fixed waveplate, and adjusting the rotation angle thereof until the differences between the spectral parameters of the composite waveplate and ideal spectral parameters are smaller than preset values.
Abstract translation: 复合波片的光轴的对准方法包括旋转相对于固定波片围绕中心轴旋转的可旋转波片，并且调整其旋转角度，直到复合波片的光谱参数和理想光谱参数之间的差异 小于预设值。
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公开(公告)号：US09785047B2
公开(公告)日：2017-10-10
申请号：US14754759
申请日：2015-06-30
Inventor： Shiyuan Liu , Weichao Du , Chuanwei Zhang , Yinyin Tan
CPC classification number: G03F7/00 , G01B11/0641 , G01B11/24 , G01B2210/56 , G01N2021/214 , G03F7/70625
Abstract: A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.
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公开(公告)号：US09070091B2
公开(公告)日：2015-06-30
申请号：US13754925
申请日：2013-01-31
Inventor： Shiyuan Liu , Jinlong Zhu , Chuanwei Zhang , Xiuguo Chen
CPC classification number: G06N99/005
Abstract: A method for extracting a critical dimension of a semiconductor nanostructure. The method includes: 1) determining a value range for each parameter to be extracted, whereby generating an electronic spectra database, and employing training spectra and support vector machine (SVM) training networks for training of SVMs; 2) employing the SVMs after training to map measured spectra to yield a corresponding electronic spectra database; and 3) employing a searching algorithm to search for an optimum simulation spectrum in the corresponding electronic spectra database, simulation parameters corresponding to the simulation spectrum being the critical dimension of the semiconductor nanostructure to be extracted.
Abstract translation: 一种用于提取半导体纳米结构的临界尺寸的方法。 该方法包括：1）确定要提取的每个参数的值范围，从而生成电子光谱数据库，并使用训练光谱和支持向量机（SVM）训练网络进行训练; 2）训练后采用SVM映射测得的光谱，得到相应的电子光谱数据库; 和3）采用搜索算法在对应的电子光谱数据库中搜索最佳模拟光谱，对应于模拟光谱的模拟参数是要提取的半导体纳米结构的临界尺寸。
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