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公开(公告)号:US09785047B2
公开(公告)日:2017-10-10
申请号:US14754759
申请日:2015-06-30
Inventor: Shiyuan Liu , Weichao Du , Chuanwei Zhang , Yinyin Tan
CPC classification number: G03F7/00 , G01B11/0641 , G01B11/24 , G01B2210/56 , G01N2021/214 , G03F7/70625
Abstract: A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.
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公开(公告)号:US09103667B2
公开(公告)日:2015-08-11
申请号:US14341744
申请日:2014-07-25
Inventor: Shiyuan Liu , Honggang Gu , Xiuguo Chen , Chuanwei Zhang , Weiqi Li , Weichao Du
CPC classification number: G01B11/272 , G02B5/3083 , G02B27/62
Abstract: An alignment method for optical axes of a composite waveplate includes rotating a rotatable waveplate, which rotates about a central axis with respect to a fixed waveplate, and adjusting the rotation angle thereof until the differences between the spectral parameters of the composite waveplate and ideal spectral parameters are smaller than preset values.
Abstract translation: 复合波片的光轴的对准方法包括旋转相对于固定波片围绕中心轴旋转的可旋转波片,并且调整其旋转角度,直到复合波片的光谱参数和理想光谱参数之间的差异 小于预设值。
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