公开(公告)号：US09785047B2

公开(公告)日：2017-10-10

申请号：US14754759

申请日：2015-06-30

Applicant: Huazhong University of Science and Technology

Inventor： Shiyuan Liu ,  Weichao Du ,  Chuanwei Zhang ,  Yinyin Tan

IPC: G03F7/00 ,  G01B11/06 ,  G01B11/24 ,  G01N21/21

CPC classification number: G03F7/00 ,  G01B11/0641 ,  G01B11/24 ,  G01B2210/56 ,  G01N2021/214 ,  G03F7/70625

Abstract: A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.