公开(公告)号：US09249008B2

公开(公告)日：2016-02-02

申请号：US14094568

申请日：2013-12-02

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yu Wen Hsu ,  Chin Fu Kuo ,  Chao Ta Huang ,  Chun Kai Mao ,  Chin Hung Wang

IPC: A61B19/00 ,  B81B3/00 ,  G01L9/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: B81B3/0086 ,  A61B2562/028 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L9/0073 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0837

Abstract: A MEMS device with a first electrode, a second electrode and a third electrode is disclosed. These electrodes are disposed on a substrate in such a manner that (1) a pointing direction of the first electrode is in parallel with a normal direction of the substrate, (2) a pointing direction of the third electrode is perpendicular to the pointing direction of the first electrode, (3) the second electrode includes a sensing portion and a stationary portion, (4) the first electrode and the sensing portion are configured to define a sensing capacitor, and (5) the third electrode and the stationary portion are configured to define a reference capacitor. This arrangement facilitates the MEMS device such as a differential pressure sensor, differential barometer, differential microphone and decoupling capacitor to be miniaturized.

Abstract translation: 公开了具有第一电极，第二电极和第三电极的MEMS器件。 这些电极以这样的方式设置在基板上：（1）第一电极的指向方向与基板的法线方向平行，（2）第三电极的指向方向垂直于 第一电极，（3）第二电极包括感测部分和静止部分，（4）第一电极和感测部分被配置为限定感测电容器，以及（5）第三电极和固定部分被配置 以定义参考电容器。 这种布置方便MEMS器件如差压传感器，差分气压计，差分麦克风和去耦电容器小型化。