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公开(公告)号:US11052348B2
公开(公告)日:2021-07-06
申请号:US15854375
申请日:2017-12-26
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Ta-Ching Hsiao , Chu-Pi Jeng , Kuo-Lun Huang , Mu-Hsi Sung , Keng-Yang Chen , Li-Duan Tsai
Abstract: A method for removing boron is provided, which includes (a) mixing a carbon source material and a silicon source material in a chamber to form a solid state mixture, (b) heating the solid state mixture to a temperature of 1000° C. to 1600° C., and adjusting the pressure of the chamber to 1 torr to 100 torr. The method also includes (c) conducting a gas mixture of a first carrier gas and water vapor into the chamber to remove boron from the solid state mixture, and (d) conducting a second carrier gas into the chamber.
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公开(公告)号:US11046582B2
公开(公告)日:2021-06-29
申请号:US16729065
申请日:2019-12-27
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Ta-Ching Hsiao , Chu-Pi Jeng , Mu-Hsi Sung , Kuo-Lun Huang
IPC: C01B32/05 , C01B32/963 , C01B32/97
Abstract: A method of purifying silicon carbide powder includes: providing a container with a surface coated by a nitrogen-removal metal layer, wherein the nitrogen-removal metal layer is tantalum, niobium, tungsten, or a combination thereof; putting a silicon carbide powder into the container to contact the nitrogen-removal metal layer; and heating the silicon carbide powder under an inert gas at a pressure of 400 torr to 760 torr at 1700° C. to 2300° C. for 2 to 10 hours, thereby reducing the nitrogen content of the silicon carbide powder.
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公开(公告)号:US11541351B2
公开(公告)日:2023-01-03
申请号:US17327131
申请日:2021-05-21
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Ta-Ching Hsiao , Chu-Pi Jeng , Kuo-Lun Huang , Mu-Hsi Sung , Keng-Yang Chen , Li-Duan Tsai
Abstract: A method for removing boron is provided, which includes (a) mixing a carbon source material and a silicon source material in a chamber to form a solid state mixture, (b) heating the solid state mixture to a temperature of 1000° C. to 1600° C., and adjusting the pressure of the chamber to 1 torr to 100 torr. The method also includes (c) conducting a gas mixture of a first carrier gas and water vapor into the chamber to remove boron from the solid state mixture, and (d) conducting a second carrier gas into the chamber.
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