公开(公告)号：US10598696B2

公开(公告)日：2020-03-24

申请号：US15083082

申请日：2016-03-28

Applicant: INTEL CORPORATION

Inventor： Joseph D. Stanford ,  David Craig ,  Todd P. Albertson ,  Mohit Mamodia ,  Dingying Xu

IPC: G01R1/067 ,  G01R1/073 ,  G01R3/00

Abstract: A prober head to interface an E-testing apparatus to a device under test, which may be an unpackaged die, for example. In some embodiments, the prober head includes an array of conductive pins, each of the pins extending outwardly from a first pin end anchored to a substrate. At least a partial length of each of the pins is coated with a hydrophobic monolayer. The conductive pins may be composite metal wires including a core metal encased by one or more peripheral metal. At a tip of the pins, opposite the first pin end anchored to the substrate, the peripheral metals are recessed from the core metal. In further embodiments, the hydrophobic monolayer is disposed on an outer surface of the peripheral metals, but is substantially absent from a surface of the core metal exposed at the tip.

公开(公告)号：US09977054B2

公开(公告)日：2018-05-22

申请号：US14739241

申请日：2015-06-15

Applicant: INTEL CORPORATION

Inventor： Todd P. Albertson ,  David M. Craig ,  David Shia ,  Joseph D. Stanford

IPC: G01R1/073 ,  G01R1/067

CPC classification number: G01R1/07314 ,  G01R1/06755

Abstract: Etching for probe wire tip is described particularly well suited to microelectronic device test. In one example, wires of a probe head are covered with an encapsulation material, the wires being attached to a test probe head substrate, each of the wires having two ends, the first end being attached to the substrate and the second end being opposite the substrate, each wire having an outer coating around a core. The wires are etched to remove the outer coating at the second end of the wires. The encapsulation material is then removed.

公开(公告)号：US11340258B2

公开(公告)日：2022-05-24

申请号：US16817480

申请日：2020-03-12

Applicant: INTEL CORPORATION

Inventor： Joseph D. Stanford ,  David Craig ,  Todd P. Albertson ,  Mohit Mamodia ,  Dingying Xu

IPC: G01R1/067 ,  G01R1/073 ,  G01R3/00

Abstract: A prober head to interface an E-testing apparatus to a device under test, which may be an unpackaged die, for example. In some embodiments, the prober head includes an array of conductive pins, each of the pins extending outwardly from a first pin end anchored to a substrate. At least a partial length of each of the pins is coated with a hydrophobic monolayer. The conductive pins may be composite metal wires including a core metal encased by one or more peripheral metal. At a tip of the pins, opposite the first pin end anchored to the substrate, the peripheral metals are recessed from the core metal. In further embodiments, the hydrophobic monolayer is disposed on an outer surface of the peripheral metals, but is substantially absent from a surface of the core metal exposed at the tip.

公开(公告)号：US20200209280A1

公开(公告)日：2020-07-02

申请号：US16817480

申请日：2020-03-12

Applicant: INTEL CORPORATION

Inventor： Joseph D. Stanford ,  David Craig ,  Todd P. Albertson ,  Mohit Mamodia ,  Dingying Xu

IPC: G01R1/073 ,  G01R1/067 ,  G01R3/00

Abstract: A prober head to interface an E-testing apparatus to a device under test, which may be an unpackaged die, for example. In some embodiments, the prober head includes an array of conductive pins, each of the pins extending outwardly from a first pin end anchored to a substrate. At least a partial length of each of the pins is coated with a hydrophobic monolayer. The conductive pins may be composite metal wires including a core metal encased by one or more peripheral metal. At a tip of the pins, opposite the first pin end anchored to the substrate, the peripheral metals are recessed from the core metal. In further embodiments, the hydrophobic monolayer is disposed on an outer surface of the peripheral metals, but is substantially absent from a surface of the core metal exposed at the tip.