公开(公告)号：US10854732B2

公开(公告)日：2020-12-01

申请号：US16908468

申请日：2020-06-22

Applicant: Intel Corporation

Inventor： Jeffrey S. Leib ,  Jenny Hu ,  Anindya Dasgupta ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L27/24 ,  G11C13/00 ,  H01L45/00 ,  G11C7/04 ,  H01L29/66 ,  H01L29/78 ,  H01L27/088 ,  H01L21/762 ,  H01L29/06 ,  H01L21/8234 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L29/165 ,  H01L29/417 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L21/8238 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11 ,  H01L49/02 ,  H01L29/08 ,  H01L29/51 ,  H01L27/02 ,  H01L21/02 ,  H01L29/167 ,  H01L23/00

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a semiconductor substrate comprising an N well region having a semiconductor fin protruding therefrom. A trench isolation layer is on the semiconductor substrate around the semiconductor fin, wherein the semiconductor fin extends above the trench isolation layer. A gate dielectric layer is over the semiconductor fin. A conductive layer is over the gate dielectric layer over the semiconductor fin, the conductive layer comprising titanium, nitrogen and oxygen. A P-type metal gate layer is over the conductive layer over the semiconductor fin.

公开(公告)号：US10741669B2

公开(公告)日：2020-08-11

申请号：US15859355

申请日：2017-12-30

Applicant: Intel Corporation

Inventor： Jeffrey S. Leib ,  Jenny Hu ,  Anindya Dasgupta ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L29/66 ,  H01L29/78 ,  H01L27/088 ,  H01L21/762 ,  H01L29/06 ,  H01L21/8234 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L29/165 ,  H01L29/417 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L21/8238 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11 ,  H01L49/02 ,  H01L29/08 ,  H01L29/51 ,  H01L27/02 ,  H01L21/02 ,  H01L29/167 ,  H01L23/00

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. A gate dielectric layer is over a top of the fin and laterally adjacent sidewalls of the fin. An N-type gate electrode is over the gate dielectric layer over the top of the fin and laterally adjacent the sidewalls of the fin, the N-type gate electrode comprising a P-type metal layer on the gate dielectric layer, and an N-type metal layer on the P-type metal layer. A first N-type source or drain region is adjacent a first side of the gate electrode. A second N-type source or drain region is adjacent a second side of the gate electrode, the second side opposite the first side.

公开(公告)号：US10727313B2

公开(公告)日：2020-07-28

申请号：US15859356

申请日：2017-12-30

Applicant: Intel Corporation

Inventor： Jeffrey S. Leib ,  Jenny Hu ,  Anindya Dasgupta ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L29/66 ,  H01L29/78 ,  H01L27/088 ,  H01L21/762 ,  H01L29/06 ,  H01L21/8234 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L29/165 ,  H01L29/417 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L21/8238 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11 ,  H01L49/02 ,  H01L29/08 ,  H01L29/51 ,  H01L27/02 ,  H01L21/02 ,  H01L29/167 ,  H01L23/00

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a semiconductor substrate comprising an N well region having a semiconductor fin protruding therefrom. A trench isolation layer is on the semiconductor substrate around the semiconductor fin, wherein the semiconductor fin extends above the trench isolation layer. A gate dielectric layer is over the semiconductor fin. A conductive layer is over the gate dielectric layer over the semiconductor fin, the conductive layer comprising titanium, nitrogen and oxygen. A P-type metal gate layer is over the conductive layer over the semiconductor fin.

公开(公告)号：US20240404917A1

公开(公告)日：2024-12-05

申请号：US18204864

申请日：2023-06-01

Applicant: Intel Corporation

Inventor： Sikandar Abbas ,  Chanaka Munasinghe ,  Leonard Guler ,  Reza Bayati ,  Madeleine Stolt ,  Makram Abd El Qader ,  Pratik Patel ,  Anindya Dasgupta

IPC: H01L23/48 ,  H01L21/768 ,  H01L23/528

Abstract: Devices, transistor structures, systems, and techniques are described herein related to coupling backside and frontside metallization layers that are on opposite sides of a device layer. A device includes a transistor having semiconductor structures extending between a source and a drain, and a gate between the source and drain, a bridge via extending between a frontside metallization over the transistor and a backside metallization below the transistor, and a thin insulative liner between the bridge via and components of the transistor.

公开(公告)号：US11955532B2

公开(公告)日：2024-04-09

申请号：US17080713

申请日：2020-10-26

Applicant: Intel Corporation

Inventor： Jeffrey S. Leib ,  Jenny Hu ,  Anindya Dasgupta ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L29/66 ,  H01L21/02 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/8238 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L27/02 ,  H01L27/088 ,  H01L27/092 ,  H01L29/06 ,  H01L29/08 ,  H01L29/165 ,  H01L29/167 ,  H01L29/417 ,  H01L29/51 ,  H01L29/78 ,  H01L49/02 ,  H10B10/00 ,  H01L23/00

CPC classification number: H01L29/66545 ,  H01L21/02532 ,  H01L21/02636 ,  H01L21/0337 ,  H01L21/28247 ,  H01L21/28518 ,  H01L21/28568 ,  H01L21/3086 ,  H01L21/31105 ,  H01L21/31144 ,  H01L21/76224 ,  H01L21/76232 ,  H01L21/76801 ,  H01L21/76802 ,  H01L21/76816 ,  H01L21/76834 ,  H01L21/76846 ,  H01L21/76849 ,  H01L21/76877 ,  H01L21/76897 ,  H01L21/823431 ,  H01L21/823481 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823821 ,  H01L21/823828 ,  H01L21/823842 ,  H01L21/823857 ,  H01L21/823871 ,  H01L21/823878 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/5283 ,  H01L23/53209 ,  H01L23/53238 ,  H01L23/53266 ,  H01L23/5329 ,  H01L27/0207 ,  H01L27/0886 ,  H01L27/0922 ,  H01L27/0924 ,  H01L28/20 ,  H01L28/24 ,  H01L29/0649 ,  H01L29/0653 ,  H01L29/0847 ,  H01L29/165 ,  H01L29/167 ,  H01L29/41783 ,  H01L29/41791 ,  H01L29/516 ,  H01L29/6653 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/66818 ,  H01L29/7843 ,  H01L29/7845 ,  H01L29/7846 ,  H01L29/7848 ,  H01L29/785 ,  H01L29/7851 ,  H01L29/7854 ,  H10B10/12 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/0332 ,  H01L21/76883 ,  H01L21/76885 ,  H01L21/823437 ,  H01L21/823475 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L29/665 ,  H01L29/7842 ,  H01L29/7853 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73204

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a semiconductor substrate comprising an N well region having a semiconductor fin protruding therefrom. A trench isolation layer is on the semiconductor substrate around the semiconductor fin, wherein the semiconductor fin extends above the trench isolation layer. A gate dielectric layer is over the semiconductor fin. A conductive layer is over the gate dielectric layer over the semiconductor fin, the conductive layer comprising titanium, nitrogen and oxygen. A P-type metal gate layer is over the conductive layer over the semiconductor fin.

公开(公告)号：US11342445B2

公开(公告)日：2022-05-24

申请号：US16918816

申请日：2020-07-01

Applicant: Intel Corporation

Inventor： Jeffrey S. Leib ,  Jenny Hu ,  Anindya Dasgupta ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L29/66 ,  H01L29/78 ,  H01L27/088 ,  H01L21/762 ,  H01L21/8234 ,  H01L21/768 ,  H01L29/165 ,  H01L29/417 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/06 ,  H01L23/522 ,  H01L23/532 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L23/528 ,  H01L27/11 ,  H01L49/02 ,  H01L29/08 ,  H01L29/51 ,  H01L27/02 ,  H01L21/02 ,  H01L29/167 ,  H01L23/00

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. A gate dielectric layer is over a top of the fin and laterally adjacent sidewalls of the fin. An N-type gate electrode is over the gate dielectric layer over the top of the fin and laterally adjacent the sidewalls of the fin, the N-type gate electrode comprising a P-type metal layer on the gate dielectric layer, and an N-type metal layer on the P-type metal layer. A first N-type source or drain region is adjacent a first side of the gate electrode. A second N-type source or drain region is adjacent a second side of the gate electrode, the second side opposite the first side.

公开(公告)号：US09704798B2

公开(公告)日：2017-07-11

申请号：US14137497

申请日：2013-12-20

Applicant: Intel Corporation

Inventor： Sridhar Govindaraju ,  Anindya Dasgupta ,  Rohit Grover

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L23/485

CPC classification number: H01L23/5226 ,  H01L21/76804 ,  H01L21/76831 ,  H01L21/76865 ,  H01L21/76877 ,  H01L23/485 ,  H01L23/53223 ,  H01L23/53238 ,  H01L23/53266 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An embodiment includes a metal interconnect structure, comprising: a dielectric layer on a substrate; an opening in the dielectric layer, wherein the opening has opening sidewalls and exposes a conductive region of at least one of the substrate and an additional interconnect structure; a first atomic layer deposition (ALD) layer on the conductive region and the opening sidewalls; a second ALD layer on a portion of the first ALD layer, and a third ALD layer within the opening and on the first ALD layer. Other embodiments are described herein.