公开(公告)号：US20220144624A1

公开(公告)日：2022-05-12

申请号：US17583860

申请日：2022-01-25

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: B81B3/00 ,  G01P15/125

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US20140360268A1

公开(公告)日：2014-12-11

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

Abstract translation: 这里描述的是加速度计，其可以对加速度敏感，但是不是由于加速度以外的源而是锚定运动。 加速度计可以使用一组电极和/或换能器，其可以记录检测质量块和支撑结构的运动并采用和输出消除机构，使得加速度计能够区分由加速度以外的源而导致的加速度和锚运动。 例如，可以从加速度计的输出信号中消除锚定运动的影响，使得加速度计仅对加速度表现出灵敏度。

公开(公告)号：US11268976B2

公开(公告)日：2022-03-08

申请号：US15586497

申请日：2017-05-04

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: G01P15/125 ,  G01P15/08 ,  B81B3/00

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US10717641B2

公开(公告)日：2020-07-21

申请号：US15846990

申请日：2017-12-19

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Chae Ahn

IPC: B81B3/00 ,  B81B7/00 ,  G01L1/10 ,  B81C99/00

Abstract: In some embodiments, a sensor includes a microelectromechanical system (MEMS) structure, a cover, and a bump stop. The MEMS structure is configured to move responsive to electromechanical stimuli. The cover is positioned on the MEMS structure. The cover is configured to mechanically protect the MEMS structure. The bump stop is disposed on a substrate and the bump stop is configured to stop the MEMS structure from moving beyond a certain point. The bump stop is further configured to stop the MEMS structure from making physical contact with the substrate. Moreover, the cover is configured to apply a force to the MEMS structure responsive to a voltage being applied to the cover.

公开(公告)号：US20180238927A1

公开(公告)日：2018-08-23

申请号：US15586497

申请日：2017-05-04

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/0802

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US09766264B2

公开(公告)日：2017-09-19

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P21/00 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.