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公开(公告)号：US11844282B2
公开(公告)日：2023-12-12
申请号：US16802436
申请日：2020-02-26
Applicant: InvenSense, Inc.
Inventor： Andre Guedes , Fabian Goericke , Stefon Shelton , Benedict Costello , David Horsley
IPC: H01L41/083 , H10N30/50 , H04R17/00 , H10N30/057 , H10N30/87 , H10N30/88
CPC classification number: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/871 , H10N30/883
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
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Patent Agency Ranking
公开(公告)号：US12284920B2
公开(公告)日：2025-04-22
申请号：US18381104
申请日：2023-10-17
Applicant: InvenSense, Inc.
Inventor： Andre Guedes , Fabian Goericke , Stefon Shelton , Benedict Costello , David Horsley
IPC: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/87 , H10N30/88
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
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3.发明公开公开(公告)号：US20240157398A1
公开(公告)日：2024-05-16
申请号：US18423200
申请日：2024-01-25
Applicant: InvenSense, Inc.
Inventor： Stefon Shelton , Fabian Goericke , Benedict Costello
CPC classification number: B06B1/0629 , B06B1/0651 , B06B1/0666 , B06B1/0685 , H10N30/04 , Y10T29/42
Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
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公开(公告)号：US20240049602A1
公开(公告)日：2024-02-08
申请号：US18381104
申请日：2023-10-17
Applicant: InvenSense, Inc.
Inventor： Andre Guedes , Fabian Goericke , Stefon Shelton , Benedict Costello , David Horsley
IPC: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/87 , H10N30/88
CPC classification number: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/871 , H10N30/883
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
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公开(公告)号：US12226801B2
公开(公告)日：2025-02-18
申请号：US18423200
申请日：2024-01-25
Applicant: InvenSense, Inc.
Inventor： Stefon Shelton , Fabian Goericke , Benedict Costello
Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
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6.发明授权公开(公告)号：US11938515B2
公开(公告)日：2024-03-26
申请号：US16957064
申请日：2018-12-21
Applicant: InvenSense, Inc.
Inventor： Fabian Goericke , Stefon Shelton , Benedict Costello
CPC classification number: B06B1/0629 , B06B1/0651 , B06B1/0666 , B06B1/0685 , H10N30/04 , Y10T29/42
Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
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