公开(公告)号：US10421659B2

公开(公告)日：2019-09-24

申请号：US15811471

申请日：2017-11-13

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC: B81B3/00 ,  B81C99/00

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US10139227B2

公开(公告)日：2018-11-27

申请号：US15159655

申请日：2016-05-19

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson

IPC: G01P15/125 ,  G01C19/56 ,  G01C19/5776 ,  G01P15/12

Abstract: A micro-electro-mechanical system includes a proof mass, an anchor, an amplifier, a sense element, a reference element, and a feedback element. The proof mass is configured to move in response to a stimulus. The anchor is coupled to the proof mass via a spring. The amplifier is configured to receive a proof mass signal from the proof mass via the spring and the anchor. The amplifier may be configured to amplify the received proof mass signal to generate an output signal. The sense element may be connected between the proof mass and a first input signal. The reference element may be connected between the anchor and a second input signal. The feedback element may be connected between the proof mass and the output signal. The feedback element and the sense element may change in response to proof mass displacement.

公开(公告)号：US20190212144A1

公开(公告)日：2019-07-11

申请号：US15868746

申请日：2018-01-11

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson

IPC: G01C19/56 ,  B81B3/00

CPC classification number: G01C19/56 ,  B81B3/0018 ,  B81B2201/0228 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5733 ,  G01C19/574 ,  G01P15/125

Abstract: A microelectromechanical (MEMS) sensor comprises MEMS components located within a MEMS layer and located relative to one or more electrodes. A plurality of proof masses are located within the MEMS layer and are not electrically coupled to each other within the MEMS layer. Both the first proof mass and the second proof mass move relative to at least a common electrode of the one or more electrodes, such that the relative position of each of the proof masses relative to the electrode may be sensed. A sensed parameter may be determined based on the sensed relative positions.

公开(公告)号：US20190162538A1

公开(公告)日：2019-05-30

申请号：US15828323

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01C19/5712 ,  G01P15/125 ,  B81B3/00

CPC classification number: G01C19/5712 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5783 ,  G01P15/125

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

公开(公告)号：US20190144264A1

公开(公告)日：2019-05-16

申请号：US15811471

申请日：2017-11-13

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC: B81B3/00 ,  B81C99/00

CPC classification number: B81B3/0013 ,  B81B3/0008 ,  B81B3/0027 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/04 ,  B81B2203/055 ,  B81C99/003 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P21/00 ,  G01P2015/0808

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US20220144624A1

公开(公告)日：2022-05-12

申请号：US17583860

申请日：2022-01-25

Applicant: InvenSense, Inc.

Inventor： Alexander Castro ,  Matthew Thompson ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Houri Johari-Galle

IPC: B81B3/00 ,  G01P15/125

Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

公开(公告)号：US20190359479A1

公开(公告)日：2019-11-28

申请号：US16538166

申请日：2019-08-12

Applicant: INVENSENSE, INC.

Inventor： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC: B81B3/00 ,  B81C99/00

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US11009350B2

公开(公告)日：2021-05-18

申请号：US15868746

申请日：2018-01-11

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson

IPC: G01C19/56 ,  B81B3/00 ,  G01C19/5733 ,  G01P15/125 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5712

Abstract: A microelectromechanical (MEMS) sensor comprises MEMS components located within a MEMS layer and located relative to one or more electrodes. A plurality of proof masses are located within the MEMS layer and are not electrically coupled to each other within the MEMS layer. Both the first proof mass and the second proof mass move relative to at least a common electrode of the one or more electrodes, such that the relative position of each of the proof masses relative to the electrode may be sensed. A sensed parameter may be determined based on the sensed relative positions.

公开(公告)号：US10732196B2

公开(公告)日：2020-08-04

申请号：US15828304

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/08 ,  B81B7/02 ,  G01P15/125 ,  B81B5/00

Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

公开(公告)号：US20190162747A1

公开(公告)日：2019-05-30

申请号：US15828304

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/08 ,  B81B7/02

Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.